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Er2O3薄膜型热辐射体的制备与性能研究

刘士彦 姚博 谭永胜 徐海涛 冀婷 方泽波

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Er2O3薄膜型热辐射体的制备与性能研究

刘士彦, 姚博, 谭永胜, 徐海涛, 冀婷, 方泽波

Preparation and performance study of Er2O3 film selective thermal emitter

Liu Shi-Yan, Yao Bo, Tan Yong-Sheng, Xu Hai-Tao, Ji Ting, Fang Ze-Bo
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  • 调制辐射体的可见和近红外区域的辐射光谱与光伏电池吸收光谱的匹配是开发高性能热光伏电池技术的关键.采用电子束蒸发在单晶硅衬底上制备金属Er薄膜并进行后氧化处理制备Er2O3薄膜型辐射体.X射线衍射结果表明薄膜结晶良好,且Si基底对Er2O3薄膜的晶体结构没有显著影响.X射线光电子能谱拟合结果表明薄膜中Er元素和O元素符合Er2O3的化学计量比.高温近红外光谱测试结果表明,样品在1550 nm左右出现了明显的Er3+离子的特征辐射峰,这与GaSb光电池的吸收光谱相匹配.
    Solar thermophotovoltaic (STPV) generator is a popular energy converter due to providing low noise, low thermal mechanical stress and portability. It has the ability to exceed the efficiency of pure solar photovoltaic system. An idealized STPV generator is a reversible heat-engine, offering a theoretical efficiency of over 80%, but the actual conversion efficiency of STPV generator is still low due to the mistuned spectral property between the thermal selective emitter and the TPV cell. One key issue in developing the STPV generator with high performance is the spectral matching between the thermal radiation spectrum of radiator and the spectral response of photovoltaic cell in visible and near-infrared region, which usually lies between the visible and the near-infrared region. High-temperature spectral emissivity of rare earth oxide is of special interest, because the radiation has a narrow band of wavelengths in the near infrared and infrared region from 900 to 3000 nm. In this work, the thermal-selective film Er2O3 emitter is fabricated by post-oxidation of Er film deposited on Si substrate through using electron-beam gun evaporation. Based on the X-ray diffraction results, the Er2O3 film is of cubic phase structure and well-crystallized when the oxidation temperature is 700℃, and the Si substrate has no obvious influence on the crystal structure of Er2O3 film. According to the X-ray photoelectron spectroscopy results of the Er2O3 film after thermal oxidation at 700℃, the atomic ratio of Er/O is stoichiometric. In order to obtain the selective emission characteristic of the Er2O3 film, a measurement system is designed. The system consists of two major portions, i.e., one is a near infrared spectrometer purchased from Ocean Optics, the other is a high-temperature emission characteristic tester which can provide oxyhydrogen flame to heat the sample by using an electronic impulse ignition to torch the hydrogen-oxygen mixture. The oxyhydrogen flame passes through the nozzle and sprays vertically on the surface of the thermal-selective emitter sample. The facula of the oxyhydrogen flame convergence is very small (facula diameter:~0.8 cm), and the highest temperature achieved is about 2500℃. The measurement condition of selective emission performance of the Er2O3 film emitter coincides with the application characteristic of STPV generator. The emission performance result of the film emitter at 700℃ shows a typical gray-body emission characteristic. The measurements carried out at 900 and 1100℃ show that the Er2O3 film has a distinct emittance spectrum at 1550 nm corresponding to Er3+, and the intensity of the selective emission peak strengthens with the measuring temperature or film thickness increasing. The thermal-selective film Er2O3 emitter is found to have emission spectrum suitable for efficient matching with the infrared response of GaSb photovoltaic cell.
      通信作者: 方泽波, csfzb@usx.edu.cn
    • 基金项目: 国家自然科学基金(批准号:61405118,61504082)、浙江省自然科学基金(批准号:LY15A040001,LQ16F040001)、山西省自然科学基金(批准号:201601D021051)和绍兴市科技计划项目(批准号:2015B70009)资助的课题.
      Corresponding author: Fang Ze-Bo, csfzb@usx.edu.cn
    • Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61405118, 61504082), the Natural Science Foundation of Zhejiang Province, China (Grant Nos. LY15A040001, LQ16F040001), the Natural Science Foundation of Shanxi Province, China (Grant No. 201601D021051), and the Scientific and Technical Plan Project of Shaoxing City, China (Grant No. 2015B70009).
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    Peng H L, Zhang W, Sun L J, Ma S D, Shi Y, Liang H W, Zhang Y J, Zheng W H 2014 Acta Phys. Sin. 63 178801 (in Chinese) [彭红玲, 张玮, 孙利杰, 马绍栋, 石岩, 渠红伟, 张冶金, 郑婉华 2014 物理学报 63 178801]

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    Seyf H R, Henry A 2016 Energ. Environ. Sci. 9 2654

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    Daneshvar H, Prinja R, Kherani N P 2015 Appl. Energ. 159 560

    [6]

    Karalis A, Joannopoulos J D 2015 Appl. Phys. Lett. 107 141108

    [7]

    Zhou Z G, Sakr E, Sun Y B, Bermel P 2016 Nanophotonics 5 1

    [8]

    Wang H C, Wen L, Song S C, Hu X, Xu G Q 2015 Photon. Res. 3 329

    [9]

    Zhou Z G, Yehia O, Bermel P 2016 J. Nanophoton. 10 016014

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    Diso D, Licciulli A, Bianco A, Lomascolo M, Leo G, Mazzer M, Tundo S, Torsello G, Maffezzoli A 2003 Mater. Sci. Eng. B 98 144

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    Guazzoni G E 1972 Appl. Spectrosc. 26 60

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    Fraas L M, Girard G R, Avery J E, Arau B A, Sundaram V S 1989 J. Appl. Phys. 66 3866

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    Licciulli A, Maffezzoli A, Diso D, Tundo S, Rella M, Torsello G, Mazzer M 2003 J. Sol-Gel Sci. Technol. 26 1119

    [14]

    Tobler W J, Durisch W 2008 Appl. Energ. 85 483

    [15]

    Chubb D L, Good B S, Chen Z 1997 AIP Conf. Proc. 401 293

    [16]

    Chubb D L, Lowe R A 1993 J. Appl. Phys. 74 5687

    [17]

    Narayanaswamy A, Canetta C 2014 Appl. Phys. Lett. 104 183107

    [18]

    Tong J K, Hsu W C, Huang Y, Boriskina S V, Chen G 2015 Sci. Rep. 5 10661

    [19]

    Mikhelashvili V, Eisenstein G, Edelmann F 2002 Appl. Phys. Lett. 80 2156

    [20]

    Pam T M, Chen C L, Yeh W W, Hou S J 2006 Appl. Phys. Lett. 89 222912

    [21]

    Dakhel A A 2006 Mater. Chem. Phys. 100 366

    [22]

    Chen S, Zhu Y Y, Wu R, Wu Y Q, Fan Y L, Jiang Z M 2007 J. Appl. Phys. 101 064106

    [23]

    Losurdo M, Giangregorio M M, Capezzuto P, Bruno G, Malandrino G, Fragalà I L, Armelao L, Barreca D, Tondello E 2008 J. Electrochem. Soc. 155 44

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    Pan T M, Shu W H, Hong J L 2007 Appl. Phys. Lett. 90 222906

  • [1]

    Xiong C, Yao R H, Geng K W 2011 Chin. Phys. B 20 57302

    [2]

    Yao X, Ding Y L, Zhang X D, Zhao Y 2015 Acta Phys. Sin. 64 038805 (in Chinese) [姚鑫, 丁艳丽, 张晓丹, 赵颖 2015 物理学报 64 038805]

    [3]

    Peng H L, Zhang W, Sun L J, Ma S D, Shi Y, Liang H W, Zhang Y J, Zheng W H 2014 Acta Phys. Sin. 63 178801 (in Chinese) [彭红玲, 张玮, 孙利杰, 马绍栋, 石岩, 渠红伟, 张冶金, 郑婉华 2014 物理学报 63 178801]

    [4]

    Seyf H R, Henry A 2016 Energ. Environ. Sci. 9 2654

    [5]

    Daneshvar H, Prinja R, Kherani N P 2015 Appl. Energ. 159 560

    [6]

    Karalis A, Joannopoulos J D 2015 Appl. Phys. Lett. 107 141108

    [7]

    Zhou Z G, Sakr E, Sun Y B, Bermel P 2016 Nanophotonics 5 1

    [8]

    Wang H C, Wen L, Song S C, Hu X, Xu G Q 2015 Photon. Res. 3 329

    [9]

    Zhou Z G, Yehia O, Bermel P 2016 J. Nanophoton. 10 016014

    [10]

    Diso D, Licciulli A, Bianco A, Lomascolo M, Leo G, Mazzer M, Tundo S, Torsello G, Maffezzoli A 2003 Mater. Sci. Eng. B 98 144

    [11]

    Guazzoni G E 1972 Appl. Spectrosc. 26 60

    [12]

    Fraas L M, Girard G R, Avery J E, Arau B A, Sundaram V S 1989 J. Appl. Phys. 66 3866

    [13]

    Licciulli A, Maffezzoli A, Diso D, Tundo S, Rella M, Torsello G, Mazzer M 2003 J. Sol-Gel Sci. Technol. 26 1119

    [14]

    Tobler W J, Durisch W 2008 Appl. Energ. 85 483

    [15]

    Chubb D L, Good B S, Chen Z 1997 AIP Conf. Proc. 401 293

    [16]

    Chubb D L, Lowe R A 1993 J. Appl. Phys. 74 5687

    [17]

    Narayanaswamy A, Canetta C 2014 Appl. Phys. Lett. 104 183107

    [18]

    Tong J K, Hsu W C, Huang Y, Boriskina S V, Chen G 2015 Sci. Rep. 5 10661

    [19]

    Mikhelashvili V, Eisenstein G, Edelmann F 2002 Appl. Phys. Lett. 80 2156

    [20]

    Pam T M, Chen C L, Yeh W W, Hou S J 2006 Appl. Phys. Lett. 89 222912

    [21]

    Dakhel A A 2006 Mater. Chem. Phys. 100 366

    [22]

    Chen S, Zhu Y Y, Wu R, Wu Y Q, Fan Y L, Jiang Z M 2007 J. Appl. Phys. 101 064106

    [23]

    Losurdo M, Giangregorio M M, Capezzuto P, Bruno G, Malandrino G, Fragalà I L, Armelao L, Barreca D, Tondello E 2008 J. Electrochem. Soc. 155 44

    [24]

    Pan T M, Shu W H, Hong J L 2007 Appl. Phys. Lett. 90 222906

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出版历程
  • 收稿日期:  2017-07-05
  • 修回日期:  2017-09-08
  • 刊出日期:  2017-12-05

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