OBSERVATION ON “AS GROWN” MICRODEFECTS IN CZ SILICON SINGLE CRYSTAL

MAI ZHEN-HONG; CUI SHU-FAN; FU QUAN-GUI; LIN RU-GAN; ZHANG JIN-FU

doi:10.7498/aps.32.685

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MAI ZHEN-HONG, CUI SHU-FAN, FU QUAN-GUI, LIN RU-GAN, ZHANG JIN-FU. OBSERVATION ON “AS GROWN” MICRODEFECTS IN CZ SILICON SINGLE CRYSTAL. Acta Physica Sinica, 1983, 32(5): 685-688. DOI: 10.7498/aps.32.685

Citation:

MAI ZHEN-HONG, CUI SHU-FAN, FU QUAN-GUI, LIN RU-GAN, ZHANG JIN-FU. OBSERVATION ON “AS GROWN” MICRODEFECTS IN CZ SILICON SINGLE CRYSTAL. Acta Physica Sinica, 1983, 32(5): 685-688. DOI: 10.7498/aps.32.685

Citation:

MAI ZHEN-HONG, CUI SHU-FAN, FU QUAN-GUI, LIN RU-GAN, ZHANG JIN-FU. OBSERVATION ON “AS GROWN” MICRODEFECTS IN CZ SILICON SINGLE CRYSTAL. Acta Physica Sinica, 1983, 32(5): 685-688. DOI: 10.7498/aps.32.685