The (SrTiO3)n/(SrTi0.8Nb0.2O3)m superlattices on vicinal-cut LaAlO3 (100) single crystal substrate with tilting angle 10° have been prepared using pulsed laser deposition. The superlattices were characterized by X-ray diffraction, in which regularly distributed satellite peak structure was observed. According to the position of satellite peaks, the superperiod of superlattices was calculated and the deposition rates of SrTiO3 and SrTi0.8Nb0.2O3 were deduced as 0.78 /pulse for SrTiO3 and 0.57 /pulse for SrTi0.8Nb0.2O3. In addition, laser induced thermoelectric voltage (LITV) effect was measured for the first time in these superlattice thin films. This phenomenon indieales that this kind of artificial atomic layer thermopile structure possesses Seebeck anisotropy. It was found that when the thickness of dielectric SrTiO3 layer n=46.8 nm, for conductive SrTi0.8Nb0.2O3 layer with m=19.0 nm and m=11.4 nm, the average peak voltage of LITV signals reaches the maximum U—P=0.7 V/mJ·mm, and the minimum average response time is τ—=124 ns, respectively.