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The deposition patterns of neutral chromium atoms in a laser standing wave with different longitudinal and transverse velocities are discussed. The simulation results of atoms show that the full width at half maximum (FWHM) of a nanometer stripe is 1.49 nm and the contrast is 62.1 ∶1 when the ideal longitudinal velocity of chromimum atom is the most probable velocity 960 m/s, the FWHM of the stripe is 5.35nm and the contrast is 25.6 ∶1 when the longitudinal velocity of chromimum atom is half the most probable velocity. The simulation results of deposition with different transverse velocities are shown at the same time, the FWHM of the stripe is 4.18nm and the contrast is 20.9 ∶1, with the transverse velocity of chromimum atom being 0.25 m/s; the FWHM of the stripe is 58.4 nm and the contrast is 8.9 ∶1, with the transverse velocity of chromimum atom being 0.50 m/s.
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Keywords:
- atom lithography /
- nano metrology /
- laser standing wave /
- nanometer stripe
[1] Li T B 2005 Shanghai Measurement Testing 185 8 (in Chinese) [李同保 2005 上海计量测试 185 8]
[2] Cai W Q, Li C W, Huo Y S 1994 Acta Phys. Sin. 48 611 (in Chinese) [蔡惟泉、李传文、霍芸生 1994物理学报 48 611]
[3] Timp G L, Behrenger R L, Tennant D M 1992 Phys. Rev. Lett. 69 1636
[4] McClelland J J 1995 J. Opt. Soc. Am. B 12 1761
[5] Yan H, Tang G Q, Shi T 2010 Chin. Phys. B 19 023204
[6] Wang Z L, Y J P 2008 Chin. Phys. B 17 2466
[7] Fioretti A, Camposeo A, Tantussi F 2005 Appl. Surf. Sci. 248 196
[8] He M, Wang J, Zhan M S 2003 Chin. Opt. Lett. 1 497
[9] Zheng C L, Li T B, Ma Y, Zhang B W 2006 Acta Phys. Sin. 55 4528(in Chinese)[郑春兰、李同保、马 艳、张宝武 2006 物理学报 55 4528]
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[1] Li T B 2005 Shanghai Measurement Testing 185 8 (in Chinese) [李同保 2005 上海计量测试 185 8]
[2] Cai W Q, Li C W, Huo Y S 1994 Acta Phys. Sin. 48 611 (in Chinese) [蔡惟泉、李传文、霍芸生 1994物理学报 48 611]
[3] Timp G L, Behrenger R L, Tennant D M 1992 Phys. Rev. Lett. 69 1636
[4] McClelland J J 1995 J. Opt. Soc. Am. B 12 1761
[5] Yan H, Tang G Q, Shi T 2010 Chin. Phys. B 19 023204
[6] Wang Z L, Y J P 2008 Chin. Phys. B 17 2466
[7] Fioretti A, Camposeo A, Tantussi F 2005 Appl. Surf. Sci. 248 196
[8] He M, Wang J, Zhan M S 2003 Chin. Opt. Lett. 1 497
[9] Zheng C L, Li T B, Ma Y, Zhang B W 2006 Acta Phys. Sin. 55 4528(in Chinese)[郑春兰、李同保、马 艳、张宝武 2006 物理学报 55 4528]
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