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稳态微聚束(steady-state micro-bunching, SSMB)原理采用激光操控储存环中的电子, 可形成具有精微纵向/时间结构的电子束团, 即微聚束. 通过有机结合微聚束辐射的强相干特性以及储存环内电子束的高回旋频率特性, SSMB光源可提供高平均功率、窄带宽的相干辐射, 波段可覆盖从太赫兹到软X射线, 具有巨大的科学及产业应用前景. 本文在对现有加速器光源—同步辐射光源和自由电子激光简要介绍的基础上, 对SSMB的概念及潜力、原理验证实验进展、核心物理及关键技术挑战、清华SSMB-EUV光源方案及其对科学研究和芯片光刻潜在的变革性影响进行总结论述. 所综述的工作是在我国自己创新性工作基础上进行的, 对于国内读者了解该领域的工作及发展具有一定的帮助.Based on the laser manipulation of electron beam, the steady-state micro-bunching (SSMB) mechanism promises an electron bunch length six orders of magnitude smaller than that in a conventional storage ring. With the combination of the strong coherent characteristic of the radiation from micro-bunching and the high repetition rate of a storage ring, high-average-power, narrow-band coherent radiation with wavelengths ranging from THz to soft X-ray can be expected from an SSMB ring. Such a novel light source can provide unprecedented opportunities for accelerator photon science and industry applications like extreme ultraviolet (EUV) lithography. In this paper, the SSMB concept and its potential, the progress of SSMB proof-of-principle experiment, the key physics issues and technical challenges of an SSMB ring, the Tsinghua SSMB-EUV light source and its potential revolutionary influence on scientific research and EUV lithography are all reviewed. Some important results of the SSMB research achieved by us are also presented.
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Keywords:
- accelerator light source /
- steady-state micro-bunching /
- proof-of-principle experiment /
- extreme ultraviolet lithography
通信作者: 唐传祥, tang.xuh@tsinghua.edu.cn
作者简介:
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[41] 张耀 2022 博士学位论文 (北京: 清华大学)
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[52] Ries M 2014 Ph. D. Dissertation (Berlin: Humboldt University of Berlin)
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图 2 SSMB储存环(b)与传统储存环(a)对比
Fig. 2. Comparison between an SSMB storage ring (b) with a conventional storage ring (a)
图 4 (a)普通束团非相干辐射及(b)微聚束相干辐射示意图
Fig. 4. (a) Incoherent radiation from a conventional bunch and (b) coherent radiation from a microbunch
图 8 纵向强聚焦SSMB原理示意图
Fig. 8. Schematic layout of a storage ring using two RF systems (in SSMB laser modulators) for longitudinal strong focusing and an example beam distribution evolution in the longitudinal phase space. Note that the beam distribution in longitudinal phase space at the modulators are tilted
图 9 横纵向耦合导致的束团拉伸对SSMB中的电流分布造成的影响, 图中
$\lambda_{\text{L}}$ 为调制激光波长Fig. 9. Beam current distributions in an SSMB ring at places with different
$\mathcal{H}_{x}$ . Bunch length in an SSMB ring can easily be dominated by the horizontal emittance$\varepsilon_{x}$ at places where$\mathcal{H}_{x}\neq0$ 
图 10 SSMB-EUV光源辐射能谱样例. 对应
$\sigma_{\bot}=5, \; 10,\; $ $ 20\ $ µm, 辐射总功率分别为39, 7, 1.7 kW. 阴影区对应辐射波长$(13.5\pm {13.5}/{100})$ nm. 计算所用参数: 电子束能量$E_{0}= $ $ 400$ MeV, 平均流强$I_{\text{avg}}=1$ A, 调制激光波长$\lambda_{\text{L}} = 1064\; {\rm{nm}}$ , 辐射波长$\lambda_{\text{r}}= {\lambda_{\text{L}}}/{79}=13.5$ nm, 辐射波荡器周期长度$\lambda_{{\rm{u}}}= $ 1 cm, 辐射波荡器参数$K=1.14$ , 辐射波荡器周期数Nu = 79Fig. 10. An example EUV SSMB radiation calculation with a microbunch length of 3 nm and different transverse sizes
$\sigma_{\bot}$ . The total radiation power are 39, 7, 1.7 kW, corresponding to$\sigma_{\bot}=5,\; 10, \;20\ $ µm, respectively. The shaded area corresponds to wavelength of$(13.5\pm {13.5}/{100})$ nm. Parameters used for the calculation:$E_{0}=400$ MeV,$I_{\text{avg}}$ = 1 A,$\lambda_{\text{L}}=1064$ nm,$\lambda_{\text{r}}= {\lambda_{\text{L}}}/{79}=13.5$ nm,$\lambda_{{\rm{u}}}=1$ cm,$K=1.14$ ,$N_{{\rm{u}}}=79$ , and b.w. means bandwidth表 1 清华SSMB-EUV光源总体设计参数
Table 1. The design parameters of Tsinghua SSMB-EUV light source
技术参数 单位 设计指标 储存环周长 m 100—150 电子束能量 MeV $\geqslant 400$ 束流强度 A $\geqslant 1$ 辐射波长 nm 5—100 13.5 nm EUV功率
(2%带宽内)kW $\geqslant 1$ 13.5 nm EUV峰值/
平均亮度phs/s/mm2/mrad2/
0.1%b.w.$> 10^{23}$ 
下载: 导出CSV
表 2 各类EUV光源特点
Table 2. Characteristics of different EUV light sources
光源原理 主要特点 LPP 技术成熟, 已商业化, EUV光功率最高500 W左右, 难以支撑下一代光刻技术的进一步发展 SR 技术成熟, 成本较低, 但EUV光功率达不到EUV光刻大规模量产需求 SRF-FEL EUV光功率可达1—10 kW量级, 造价相对高昂(数十亿), 规模较大(数百米), 商业化必须做能量回收(ERL), 实现大功率EUV输出, 还需许多技术突破 SSMB EUV光功率可大于1 kW, 造价(数亿到十亿)及规模(周长$100—150$ m)适中, 作为一种全新的光源原理, 原理实验验证已经实现, 需要建设运行在EUV波段的 SSMB加速器光源研究装置, 培养科学及产业用户, 并提高其技术成熟度
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[1] Schwinger J 1949 Phys. Rev. 75 1912
Google Scholar
[2] Tzu H Y 1948 Proc. R. Soc. London, Ser. A 192 231
Google Scholar
[3] Elder F R, Gurewitsch A W, Langmuir R V, et al. 1947 Phys. Rev. 71 829
Google Scholar
[4] Zhao Z T 2010 Rev. Accel. Sci. Technol. 3 57
Google Scholar
[5] Chao A W, Chou W 2011 Reviews of Accelerator Science and Technology (Vol. 3) (Singapore: World Scientific) pp57–76
[6] Jiang X, Tang E, Xian D 1995 Rev. Sci. Instrum. 66 2343
Google Scholar
[7] National Synchrotron Radiation Laboratory of University of Science and Technology of China 1991 Development Report of Hefei Synchrotron Radiation Accelerator (in Chinese) [国家同步辐射实验室, 中国科学技术大学, 1991年, 合肥同步辐射加速器研制报告]
[8] Jiang M, Yang X, Xi H J, et al. 2009 Chin. Sci. Bull. 54 4171
Google Scholar
[9] Jiao Y, Xu G, Cui X H, et al. 2018 J. Synchrotron Radiat. 25 1611
Google Scholar
[10] Madey J M 1971 J. Appl. Phys. 42 1906
Google Scholar
[11] Deacon D A G, Elias L R, Madey J M J, et al. 1977 Phys. Rev. Lett. 38 892
Google Scholar
[12] Kondratenko A, Saldin E 1980 Part. Accel. 10 207
[13] Bonifacio R, Pellegrini C, Narducci L 1984 Opt. Commun. 50 373
Google Scholar
[14] Huang Z, Kim K J 2007 Phys. Rev. Spec. Top. Accel. Beams 10 034801
Google Scholar
[15] Pellegrini C, Marinelli A, Reiche S 2016 Rev. Mod. Phys. 88 015006
Google Scholar
[16] Emma P, Akre R, Arthur J, Bionta R, et al. 2010 Nat. Photonics 4 641
Google Scholar
[17] Hans W, Decking W 2017 Proceedings of the 38th International Free Electron Laser Conference Santa Fe, New Mexico, USA, August 20–25, 2017 p9
[18] Zhu Z Y, Zhao Z T, Wang D, et al. 2017 Proceedings of the 38th International Free Electron Laser Conference Santa Fe, NM, USA, August 20–25, 2017 p182
[19] Ratner D F, Chao A W 2010 Phys. Rev. Lett. 105 154801
Google Scholar
[20] Nodvick J S, Saxon D S 1954 Phys. Rev. 96 180
Google Scholar
[21] Williams G P, Hirschmugl C J, Kneedler E M, et al. 1989 Phys. Rev. Lett. 62 261
Google Scholar
[22] Gover A, Ianconescu R, Friedman A, et al. 2019 Rev. Mod. Phys. 91 035003
Google Scholar
[23] Jiao Y, Ratner D F, Chao A W 2011 Phys. Rev. Spec. Top. Accel. Beams 14 110702
Google Scholar
[24] Chao A, Granados E, Huang X, et al. 2016 Proceedings of the 7th International Particle Accelerator Conference Busan, Korea, May 8–13, 2016 p1048
[25] Khan S 2017 Nucl. Instrum. Methods Phys. Res. A 865 95
Google Scholar
[26] Tang C, Deng X, Huang W, et al. 2018 Proceedings of the 60th ICFA Advanced Beam Dynamics Workshop on Future Light Sources Shanghai, China, March 5–9, 2018 p166
[27] Deng X, Chao A, Huang W, et al. 2018 Proceedings of the 9th International Particle Accelerator Conference Vancouver, Canada, April 29–May 4, 2018 p4583
[28] Deng X, Chao A, Feikes J, et al. 2021 Nature 590 576
Google Scholar
[29] Tang C X 2020 The 11th International Particle Accelerator Conference Caen, France, May 10–15, 2020
[30] Feikes J 2021 The 12th International Particle Accelerator Conference Campinas, Brazil, May 24–28, 2021
[31] Rui T, Deng X, Chao A, et al. 2018 Proceedings of the 60th ICFA Advanced Beam Dynamics Workshop on Future Light Sources Shanghai, China, March 5–9, 2018 p113
[32] Pan Z, Rui T, Wan W, et al. 2019 Proceedings of the 39th International Free Electron Laser Conference Hamburg, Germany, August 26–30, 2019 p700
[33] Li C, Feng C, Jiang B, et al. 2019 Proceedings of the 10th International Particle Accelerator Conference Melbourne, Australia, May 19–24, 2019 p1507
[34] Deng X J, Klein R, Chao A W, et al. 2020 Phys. Rev. Accel. Beams 23 044001
Google Scholar
[35] Deng X J, Chao A W, Feikes J, et al. 2020 Phys. Rev. Accel. Beams 23 044002
Google Scholar
[36] Deng X J, Chao A W, Huang W H, et al. 2021 Phys. Rev. Accel. Beams 24 094001
Google Scholar
[37] Zhang Y, Deng X J, Pan Z L, et al. 2021 Phys. Rev. Accel. Beams 24 090701
Google Scholar
[38] Deng X J, Huang W H, Li Z Z, et al. 2021 Nucl. Instrum. Methods Phys. Res. A 1019 165859
Google Scholar
[39] 潘志龙 2020 博士学位论文 (北京: 清华大学)
Pan Z L 2020 Ph. D. Dissertation (Beijing: Tsinghua University) (in Chinese)
[40] Deng X J 2021 Ph. D. Dissertation (Beijing: Tsinghua University)
[41] 张耀 2022 博士学位论文 (北京: 清华大学)
Zhang Y 2022 Ph. D. Dissertation (Beijing: Tsinghua University) (in Chinese)
[42] Tsai C Y, Chao A W, Jiao Y, et al. 2021 Phys. Rev. Accel. Beams 24 114401
Google Scholar
[43] Teng L 1984 Minimizing the Emittance in Designing the Lattice of an Electron Storage Ring (Fermi National Accelerator Lab.) No. FERMILAB/TM-1269
[44] Eriksson M, Van der Veen J F, Quitmann C 2014 J. Synchrotron Radiat. 21 837
Google Scholar
[45] Bakshi V 2018 EUV Lithography (2nd Ed.) (Bellingham: SPIE Press) pp109–192
[46] Damascelli A, Hussain Z, Shen Z X 2003 Rev. Mod. Phys. 75 473
Google Scholar
[47] Lv B, Qian T, Ding H 2019 Nat. Rev. Phys. 1 609
Google Scholar
[48] Carr G, Martin M C, McKinney W R, et al. 2002 Nature 420 153
Google Scholar
[49] Cole B E, Williams J B, King B T, et al. 2001 Nature 410 60
Google Scholar
[50] Krausz F, Misha I 2009 Rev. Mod. Phys. 81 163
Google Scholar
[51] Feikes J, von Hartrott M, Ries M, et al. 2011 Phys. Rev. Spec. Top. Accel. Beams 14 030705
Google Scholar
[52] Ries M 2014 Ph. D. Dissertation (Berlin: Humboldt University of Berlin)
[53] Yu L H 1991 Phys. Rev. A 44 5178
Google Scholar
[54] Yu L H, Babzien M, Ben-Zvi I, et al. 2000 Science 289 932
Google Scholar
[55] Girard B, Lapierre Y, Ortega J M, et al. 1984 Phys. Rev. Lett. 53 2405
Google Scholar
[56] [57] Courant E, Snyder H S 1958 Ann. Phys. 3 1
Google Scholar
[58] Chao A W 1979 J. Appl. Phys. 50 595
Google Scholar
[59] Courant E D, Livingston M S, Snyder H S 1952 Phys. Rev. 88 1190
Google Scholar
[60] Deng H, Feng C 2013 Phys. Rev. Lett. 111 084801
Google Scholar
[61] Feng C, Zhao Z 2017 Sci. Rep. 7 4724
Google Scholar
[62] Kubo K, Oide K 2001 Phys. Rev. ST Accel. Beams 4 124401
Google Scholar
[63] Krinsky S, Wang J 1982 Part. Accel. 12 107
[64] Saldin E L, Schneidmiller E A, Yurkov M V 2005 Nucl. Instrum. Methods Phys. Res. A 539 499
Google Scholar
[65] Liu X 2018 Ph. D. Dissertation (Beijing: Tsinghua University)
[66] Wang H 2020 Ph. D. Dissertation (Beijing: Tsinghua University)
[67] Bakshi V 2018 Proceedings of 2018 Source Workshop Prague, Czech Republic, November 5–7, 2018 pS11
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