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(1)华中科技大学激光技术国家重点实验室,武汉430074; (2)深圳大学工程技术学院光子信息工程系,深圳518060; (3)深圳大学理学院,深圳518060
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[1] MA Ziqi, XU Qiang, XIAO Mengran, TANG Shiyi, TAO Zhiqun, YANG Dongjie, AN Xiaokai, LIU Liangliang, CUI Suihan, WU Zhongzhen. Establishment and validation of three-dimensional simulation model for magnetron sputtering of rotating cylindrical cathode. Acta Physica Sinica, 2025, 74(15): 155202. doi: 10.7498/aps.74.20250570 [2] LIANG Yuanyi, FANG Zhensong, HE Yafeng, LI Qing, HE Shoujie. Experiment and simulation on spatiotemporal microscopic dynamics of self-pulsing discharge in micro-hollow cathode. Acta Physica Sinica, 2025, 74(5): 055201. doi: 10.7498/aps.74.20241586 [3] Wei Chao, Yu Xuan, Lei Cheng, Wang Zi-Yu, Liu Sheng, Wang Du. Vibrational thermal pool multi-level theoretical model and design simulation of HBr-filled hollow-core fiber gas laser. Acta Physica Sinica, 2024, 73(15): 154201. doi: 10.7498/aps.73.20240428 [4] Zhao Li-Fen, Ha Jing, Wang Fei-Fan, Li Qing, He Shou-Jie. Simulation of hollow cathode discharge in oxygen. Acta Physica Sinica, 2022, 71(2): 025201. doi: 10.7498/aps.71.20211150 [5] Li Ti-Jun, Cui Sui-Han, Liu Liang-Liang, Li Xiao-Yuan, Wu Zhong-Can, Ma Zheng-Yong, Ricky K. Y. Fu, Tian Xiu-Bo, Paul K. Chu, Wu Zhong-Zhen. Magnetic field optimization and high-power discharge characteristics of cylindrical sputtering cathode. Acta Physica Sinica, 2021, 70(4): 045202. doi: 10.7498/aps.70.20201540 [6] . Simulation on hollow cathode discharge in oxygen. Acta Physica Sinica, 2021, (): . doi: 10.7498/aps.70.20211150 [7] He Shou-Jie, Zhou Jia, Qu Yu-Xiao, Zhang Bao-Ming, Zhang Ya, Li Qing. Simulation on complex dynamics of hollow cathode discharge in argon. Acta Physica Sinica, 2019, 68(21): 215101. doi: 10.7498/aps.68.20190734 [8] Wang Tian-Long, Qiu Qing-Quan, Jing Li-Wei, Zhang Xiao-Bo. Design of circular composite sputtering cathode and simulation of its discharge characteristics. Acta Physica Sinica, 2018, 67(7): 070703. doi: 10.7498/aps.67.20172576 [9] He Shou-Jie, Zhang Zhao, Zhao Xue-Na, Li Qing. Spatio-temporal characteristics of microhollow cathode sustained discharge. Acta Physica Sinica, 2017, 66(5): 055101. doi: 10.7498/aps.66.055101 [10] Zhang Lian-Zhu, Meng Xiu-Lan, Zhang Su, Gao Shu-Xia, Zhao Guo-Ming. Simulation of N2 microhollow cathode discharge and cathode sputtering by using a PIC/MC model. Acta Physica Sinica, 2013, 62(7): 075201. doi: 10.7498/aps.62.075201 [11] He Shou-Jie, Ha Jing, Liu Zhi-Qiang, Ouyang Ji-Ting, He Feng. Simulation of hollow cathode discharge by combining the fluid model with a transport model for metastable Ar atoms. Acta Physica Sinica, 2013, 62(11): 115203. doi: 10.7498/aps.62.115203 [12] Zheng Fei-Teng, Yang Zhong-Hai, Jin Xiao-Lin. The initiation phase of pseudospark discharge in a hollow cathode via PIC/MCC simulation. Acta Physica Sinica, 2008, 57(2): 990-995. doi: 10.7498/aps.57.990 [13] Zhou Li-Na, Wang Xin-Bing. A fluid model for the simulation of discharges in microhollow cathode. Acta Physica Sinica, 2004, 53(10): 3440-3446. doi: 10.7498/aps.53.3440 [14] Zhang Yong-Hui, Jiang Jin-Sheng, Chang An-Bi. Study of the hollow cathode plasma electron-gun. Acta Physica Sinica, 2003, 52(7): 1676-1681. doi: 10.7498/aps.52.1676 [15] Yao Xi-Lin, Wang Xin-Bing, Lai Jian-Jun. Monte Carlo simulation of the electron motion in an Ar microhollow cathode disch arge. Acta Physica Sinica, 2003, 52(6): 1450-1454. doi: 10.7498/aps.52.1450 [16] LAI JIAN-JUN, YU JIAN-HUA, HUANG JIAN-JUN, WANG XIN-BING, QIU JUN-LIN. SELF-CONSISTENT DESCRIPTION OF A DC HOLLOW CATHODE DISCHARGE AND ANALYSIS OF CATHODE SPUTTERING. Acta Physica Sinica, 2001, 50(8): 1528-1533. doi: 10.7498/aps.50.1528 [17] CHEN YONG-ZHOU, CHEN QING-MING, LI JUN, LAI JIAN-JUN, QIU JUN-LIN. COMPUTER SIMULATION OF THE ELECTRON MOTION IN A HELIUM HOLLOW-CATHODE DISCHARGE CONFINED BY A MAGNETIC FIELD. Acta Physica Sinica, 1998, 47(10): 1665-1672. doi: 10.7498/aps.47.1665 [18] HAN JUN-BO, WANG DE-ZHEN, MA TENG-CAI. A SELF-CONSISTENT MONTE CARLO SIMULATION OF IONS IN HOLLOW-CATHODE SHEATH OF ARGON GAS DISCHARGES. Acta Physica Sinica, 1996, 45(3): 428-435. doi: 10.7498/aps.45.428 [19] CHEN CHENG, SUN WEI. A SELF-CONSISTENT KINETICS MODEL OF CuBr LASER WITH HYDROGEN ADDITIVES. Acta Physica Sinica, 1995, 44(11): 1734-1746. doi: 10.7498/aps.44.1734 [20] WEI HE-LIN, LIU ZU-LI. ELECTRON TRANSPORT PROCESS IN CATHODE SHEATH OF HELIUM dc HOLLOW CATHODE GLOW DISCHARGE PLASMA. Acta Physica Sinica, 1994, 43(6): 950-957. doi: 10.7498/aps.43.950
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- Abstract views: 9872
- PDF Downloads: 610
- Cited By: 0
Publishing process
- Received Date:
10 May 2001
- Accepted Date:
05 December 2001
- Published Online:
31 May 2005
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