Preservation dose of helium-implanted in nanocrystal titanium films

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Abstract
Helium concentration profile, preservation dose and release rate from a nanocrystal titanium film implanted with helium at different energy and dose have been measured by proton Rutherford backscattering technique in a range from room temperature to 500℃. It is observed that the implanted helium may be stably preserved for a long time in the nanocrystal titanium film in the temperature environment from room temperature to below 100℃ when its concentration in up to 41%—52% of He-Ti atomic ratio, and also may be effectively preserved for a long time at room temperature if their atomic concentration ratio is up to 52%—74%. Possible mechanism of helium effectively preserved in the nanocrystal film with a large boundary volume ratio is preliminarily discussed from the energy viewpoint in this paper.

Keywords:
ion implantation /

helium /

nanocrystal titanium film /

preservation dose
Authors and contacts
Zheng Si-Xiao¹,

Luo Shun-Zhong²,

Liu Zhong-Yang¹,

Long Xing-Gui²,

Wang Pei-Lu¹,

Peng Shu-Ming²,

Liao Xiao-Dong¹,

Liu Ning¹

(1)四川大学原子核科学技术研究所、辐射物理及技术教育部重点实验室，成都 610064; (2)中国工程物理研究院核物理与化学研究所，绵阳 621900
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