A second-order gradiometric superconducting quantum interference device current sensor with cross-coupled structure

Xu Da; Zhong Qing; Cao Wen-Hui; Wang Xue-Shen; Wang Shi-Jian; Li Jin-Jin; Liu Jian-She; Chen Wei

doi:10.7498/aps.70.20201816

Abstract

Superconducting quantum interference device (SQUID) has extremely high magnetic field sensitivity, current sensitivity, and can detect a low-noise weak current signal. The SQUID current sensor has become the only option of the readout of low-noise detector, such as transition-edge sensor (TES). In this paper, a second-order gradiometric cross-coupled SQUID current sensor for TES application is developed. According to the requirements for TES detectors, the structure and various parameters of SQUID current sensor are designed. The SQUID loop, input coil and feedback coil of the SQUID current sensor all use the second-order gradiometric structure. All the couple ways between SQUID loop and input coil or feedback coil adopt cross-coupling mode in different planes, which can effectively weaken the parasitic capacitance. A second-order gradiometric cross-coupled SQUID current sensor based on Nb/Al-AlO_x/Nb Josephson junction is successfully fabricated on a silicon wafer by optimizing the process. The properties of the second-order gradiometric cross-coupled SQUID current sensor are measured at liquid helium temperature. The bias current of SQUID is 215 μA when the modulation depth of V-Φ modulation curve is maximum. The maximum modulation peak of SQUID is 31 μV. The flux-to-voltage transfer coefficient of SQUID is 108 μV/Φ₀. The input coil current sensitivity is 17 μA/Φ₀, the mutual inductance between SQUID loop and input coil is 117 pH. The current sensitivity of feedback coil is 86 μA/Φ₀, the mutual inductance between SQUID loop and feedback coil is 23 pH. The second-order gradiometric cross-coupled SQUID current sensor has a white flux noise of 2 μΦ₀/$ \sqrt{{\rm{H}}{\rm{z}}} $ and a white current noise of 34 pA/$ \sqrt{{\rm{H}}{\rm{z}}} $ with 1/f corner frequency around 200 Hz. The result of noise level under the condition without magnetic shielding shows that the SQUID current sensor with second-order gradiometric cross-coupled structure has an excellent capability of weakening the environmental electromagnetic interference. In the future, we will further improve the mutual inductance of the second-order gradiometric cross-coupled SQUID current sensor between SQUID loop and input coil, optimize the size and critical current of Josephson junction, in order to improve the input sensitivity of SQUID device, reduce the current noise level and the 1/f corner frequency, and meet more requirements for TES applications.

Keywords:

superconducting quantum interference device /
transition-edge sensor /
flux noise /
current noise /
current sensitivity

Authors and contacts

1.
Center for Advanced Measurement Science, National Institute of Metrology, Beijing 102200, China
2.
Institute of Microelectronics, Tsinghua University, Beijing 100084, China

Corresponding author: Zhong Qing, zhongq@nim.ac.cn ; Li Jin-Jin, jinjinli@nim.ac.cn ;

Funds: Project supported by the National Key R&D Program of China (Grant No. 2017YFF0206105), the National Natural Science Foundation of China (Grant Nos. 61701470, 20161361354), and the National Institute of Metrology China (Grant Nos. AKY1946, AKYZD2012)

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References

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Cited By

图 1 (a) SQUID环路示意图; (b) 一阶梯度并联SQUID环路结构示意图; (c) 一阶梯度串联SQUID环路结构示意图; (d) 二阶梯度并联SQUID环路结构示意图

Figure 1. Schematic diagrams of (a) SQUID loop, (b) a first-order gradiometric parallel SQUID loop, (c) a first-order gradiometric series SQUID loop, and (d) a second-order gradiometric parallel SQUID loop.

DownLoad: Full-Size Img PowerPoint

图 2 二阶梯度交叉耦合SQUID电流传感器扫描电子显微镜图

Figure 2. Scanning electron microscope picture of the second-order gradiometric cross-coupled SQUID current sensor.

DownLoad: Full-Size Img PowerPoint

图 3 二阶梯度交叉耦合SQUID电流传感器等效电路图

Figure 3. Equivalent circuit of the second-order gradiometric cross-coupled SQUID current sensor.

DownLoad: Full-Size Img PowerPoint

图 4 二阶梯度交叉耦合SQUID电流传感器的电流-电压曲线

Figure 4. Current-voltage curves of the second-order gradiometric cross-coupled SQUID current sensor.

DownLoad: Full-Size Img PowerPoint

图 5 二阶梯度交叉耦合SQUID输入线圈的电压-磁通调制曲线

Figure 5. Voltage-flux curve for the input coil of the second-order gradiometric cross-coupled SQUID.

DownLoad: Full-Size Img PowerPoint

图 6 二阶梯度交叉耦合SQUID反馈线圈的电压-磁通调制曲线

Figure 6. Voltage-flux curve for the feedback coil of the second-order gradiometric cross-coupled SQUID.

DownLoad: Full-Size Img PowerPoint

图 7 二阶梯度交叉耦合SQUID电流传感器的噪声曲线

Figure 7. Noise curves of the second-order gradiometric cross-coupled SQUID current sensor.

DownLoad: Full-Size Img PowerPoint

表 1 二阶梯度交叉耦合SQUID电流传感器的设计参数

Table 1. Design parameters of the second-order gradiometric cross-coupled SQUID current sensor.

参数	设计值
约瑟夫森结尺寸S/(µm × µm)	7 × 7
约瑟夫森结临界电流I₀/µA	49
约瑟夫森结电容C_J/pF	2
并联电阻R_sh/Ω	0.84
回滞系数β_c	0.2
调制系数β_L	1.6
SQUID环路电感L_SQ/pH	33
SQUID环路与输入线圈互感M_IN/pH	130
SQUID环路与反馈线圈互感M_FB/pH	36
输入线圈电感L_IN/nH	3
反馈线圈电感L_FB/nH	1
输入电流灵敏度1/M_IN/(μA·Φ₀^–1)	15
反馈电流灵敏度1/M_FB/(μA·Φ₀^–1)	56

DownLoad: CSV

表 2 二阶梯度交叉耦合SQUID电流传感器的性能参数

Table 2. Property parameters of the second-order gradiometric cross-coupled SQUID current sensor.

参数	实测值
偏置电流I_{b, max}/μA	215
并联电阻R_sh/Ω	1
回滞系数β_c	0.67
输入电流灵敏度1/M_IN/(μA·Φ₀^–1)	17
反馈电流灵敏度1/M_FB/(μA·Φ₀^–1)	86
磁通-电压转换系数V_Φ/(μV·Φ₀^–1)	108
最大调制峰值V_pp/μV	31
磁通白噪声$\sqrt{S_{\varPhi}} $/(μΦ₀·$ \sqrt{{\rm{H}}{\rm{z}}} $^–1)	2
电流白噪声$\sqrt{S_I} $/(pA·$ \sqrt{{\rm{H}}{\rm{z}}} $^–1)	34
SQUID环路与输入线圈互感M_IN/pH	117
SQUID环路与反馈线圈互感M_FB/pH	24

DownLoad: CSV

[1]	Clarke J, Braginski A I 2004 The SQUID Handbook (Vol. 1) (KgaA, Weinheim: Wiley-VCH Verlag GmbH & Co.) pp1−210
[2]	Granata C, Vettoliere A, Russo R, Fretto M, de Leo N, Lacquaniti V 2013 Appl. Phys. Lett. 103 102602 Google Scholar
[3]	Ullom J N, Bennett D A 2015 Supercond. Sci. Technol. 28 084003 Google Scholar
[4]	Jackson B D, Korte P A J, Kuur J, Mauskopf P D, Beyer J, Bruijn M P, Cros A, Gao J R, Griffin D, Hartog R, Kiviranta M, Lange G, Leeuwen B J, Macculi C, Ravera L, Trappe N, Weers H, Withington S 2012 IEEE Trans. Terahertz Sci. and Technol. 2 12 Google Scholar
[5]	Henderson S W, Ahmed Z, Austermann J, Becker D, Bennett D A, Brown D, Chaudhuri S, Cho H M S, D'Ewart J M, Dober B, Duff S M, Dusatko J E, Fatigoni S, Frisch J C, Gard J D, Halpern M, Hilton G C, Hubmayr J, Irwin K D, Karpel E D, Kernasovskiy S S, Kuenstner S E, Kuo C L, Li D, Mates J A B, Reintsema C D, Smith S R, Ullom J, Vale L R, Winkle D D V, Vissers M, Yu C 2018 Proc. SPIE, Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy IX Texas, United States, June 10−15 2018 p1070819
[6]	Cui W, Chen L B, Gao B, Guo F L, Jin H, Wang G L, Wang J J, Wang W, Wang Z S, Wang Z, Yuan F, Zhang W 2020 J. Low Temp. Phys. 199 502 Google Scholar
[7]	Schmidt M, Helversen M, López M, Gericke F, Schlottmann E, Heindel T, Kück S, Reitzenstein S, Beyer J 2018 J. Low Temp. Phys. 193 1243 Google Scholar
[8]	Irwin K D 2002 Physica C 368 203 Google Scholar
[9]	Kempf S, Wegner M, Fleischmann A, Gastaldo L, Herrmann F, Papst M, Richter D, Enss C 2017 AIP Adv. 7 015007 Google Scholar
[10]	Bennett D A, Mates J A B, Gard J D, Hoover A S, Rabin M W, Reintsema C D, Schmidt D R, Vale L R, Ullom J N 2015 IEEE Trans. Appl. Supercond. 25 2101405 Google Scholar
[11]	Drung D, Abmann C, Beyer J, Kirste A, Peters M, Ruede F, Schurig T 2007 IEEE Trans. Appl. Supercond. 17 699 Google Scholar
[12]	Stiehl G M, Cho H M, Hilton G C, Irwin K D, Mates J A B, Reintsema C D, Zink B L 2011 IEEE Trans. Appl. Supercond. 21 298 Google Scholar
[13]	Beyer J, Drung D 2008 Supercond. Sci. Technol. 21 095012 Google Scholar
[14]	Schurig T 2014 J. Phys. Conf. Ser. 568 032015 Google Scholar
[15]	Silva-Feaver M, Arnold K, Barron D, Denison E V, Dobbs M, Groh J, Hilton G, Hubmayr J, Irwin K, Lee A, Vale L R 2018 J. Low Temp. Phys. 193 600 Google Scholar
[16]	Schurig T, Trahms L 2009 IEEE CSC & ESAS European Superconductivity News Forum 3 RN9 Google Scholar
[17]	韩昊轩, 张国峰, 张雪, 梁恬恬, 应利良, 王永良, 彭炜, 王镇 2019 物理学报 68 138501 Google Scholar Han H X, Zhang G F, Zhang X, Liang T T, Ying L L, Wang Y L, Peng W, Wang Z 2019 Acta Phys. Sin. 68 138501 Google Scholar
[18]	Drung D 2016 IEEE CSC & ESAS European Supercon- ductivity News Forum 10 CR70
[19]	SQUID sensors, Magnicon GmbH www.magnicon.com [2021-02-07]
[20]	LTS Sensors, STAR Cryoelectronics www.starcryo.com [2021-02-07]
[21]	Cantor R, Hall J A, Matlachov A N, Volegov P L 2007 IEEE Trans. Appl. Supercond. 17 672 Google Scholar
[22]	Kempf S, Ferring A, Fleischmann A, Gastaldo L, Enss C, 2013 Supercond. Sci. Technol. 26 065012 Google Scholar
[23]	Kempf S, Ferring A, Fleischmann A, Enss C 2015 Supercond. Sci. Technol. 28 045008 Google Scholar
[24]	Doriese W B, Morgan K M, Bennett D A, Denison E V, Fitzgerald C P, Fowler J W, Gard J D, Hays-Wehle J P, Hilton G C, Irwin K D, Joe Y I, Mates J A B, O’Neil G C, Reintsema C D, Robbins N O, Schmidt D R, Swetz D S, Tatsuno H, Vale L R, Ullom J N 2016 J. Low Temp Phys 184 389 Google Scholar
[25]	Zhang X, Zhang G, Wang Y, Rong L, Zhang S, Wu J, Qiu L, Xie X, Wang Z 2019 IEEE Trans. Appl. Supercond. 29 1600503 Google Scholar
[26]	Kuriki S, Isobe Y, Mizutani Y 1987 J. Appl. Phys. 61 781 Google Scholar
[27]	Carelli P, Chiaventi L, Leoni R, Pullano M, Spagnolo G S 1991 Clin. Phys. Physiol. Meas. 12 13 Google Scholar
[28]	Beyer J, Drung D, Peters M, Schurig T, Bandler S R 2009 IEEE Trans. Appl. Supercond. 19 505 Google Scholar
[29]	Xu D, Li J, Cao W, Liu J, Chen W 2020 Conference on Precision Electromagnetic Measurements Denver, United States, August 24−28 2020 p9191689
[30]	Fourie C J, Perold W J 2005 IEEE Trans. Appl. Supercond. 15 300 Google Scholar
[31]	Drung D, Hinnrichs C, Barthelmess H 2006 Supercond. Sci. Technol. 19 S235 Google Scholar
[32]	Drung D, Ludwig F, Müller W, Steinhoff U, Trahms L, Koch H, Shen Y Q, Jensen M B, Vase P, Holst T, Freltoft T, Curio G 1996 Appl. Phys. Lett. 68 1421 Google Scholar

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