串联超导量子干涉器件阵列制备与测试分析

梁恬恬; 张国峰; 伍文涛; 倪志; 王永良; 应利良; 伍俊; 荣亮亮; 彭炜; 高波

doi:10.7498/aps.70.20210467

摘要

串联超导量子干涉器件(superconducting quantum interference device, SQUID)阵列通过增加SQUID数量来达到提升信噪比的目的, 即SQUID电压信号随SQUID数目比例增加而总电压噪声正比于SQUID数目的平方根值. 本文介绍了利用自主工艺线进行串联SQUID阵列研究的相关研究进展, 实现了SQUID数量分别为200和800的阵列集成, 测试得到磁通噪声达到0.5 $ \text{μ}\varPhi _{\text{0}}/\sqrt{\text{Hz}} $和输入电流灵敏度35 $ \text{μA/}\varPhi _{\text{0}} $, 等效输入电流噪声达到18 $ \text{pA/}\sqrt{\text{Hz}} $. 另外, 还给出了阵列参数与集成SQUID数量的关系, 验证了设计可靠性和工艺一致性.

关键词:

Abstract

Superconducting quantum interference device (SQUID) has been used as an extremely sensitive flux sensor up to now. Series SQUID array (SSA) is made up of several identical element-SQUIDs in series, in which each element-SQUID is coupled with the same set of input coils by mutual inductance to realize the amplified output of the input current. From the noise viewpoint, each element-SQUID in SSA is independent of each other, resulting in the total voltage noise across the array rising linearly with the square root of the number of element-SQUIDs. From the perspective of input signals, since the signals come from the same set of input coils, the voltage output of the array is enlarged with the proportion of element-SQUID number, N. Taken together, the signal-to-noise ratio of SSA is increased by $\sqrt{ {N}}$ times, or the flux noise of SSA is reduced by 1/$\sqrt{ {N}}$ times compared with that of an element-SQUID ideally. However, with the increase in the number of element-SQUIDs in series, the chip design of SSA becomes more complicated, which puts forward higher requirements for the consistency and stability of its fabrication process. Besides, there exists a certain flux coherence between element-SQUIDs in SSA, whose normal operation depends on the working state of each element-SQUID in the array. In this paper, the fabrication of series SQUID array is carried on the autonomous superconducting micro-nano process platform, with a yield rate reaching over 80% on a 4-inch standard silicon wafer. Two kinds of SSAs with 200 and 800 element-SQUIDs, respectively, are integrated in a meandering way on a chip in a millimeter area. Home-made directly-coupled readout circuit is used to obtain the characteristics of SSA. The experimental results reveal that the flux noise at best working point is as low as 0.5μ$\varPhi _{\text{0}}/\sqrt{\text{Hz}}$ and the current sensitivity is about 35 μA/Φ₀, thus, the equivalent input current noise is achieved at a level of 18 pA/$ \sqrt{\text{Hz}} $. Additionally, the dependence of relevant parameters in array on the number of element-SQUIDs is verified, which is consistent with theoretical expectation basically. These show that the reliability of device design and the consistency of fabrication process perform well, thus laying the technical foundation for developing the low-noise SQUID amplifier and the multiplexed readout of low-impedance detectors.

Keywords:

superconducting quantum interference device /
flux noise /
superconducting fabrication process

作者及机构信息

1.
中国科学院上海微系统与信息技术研究所, 信息功能材料国家重点实验室, 上海　200050

2.
中国科学院超导电子学卓越创新中心, 上海　200050

3.
中国科学院大学, 北京　100049

通信作者: 张国峰, gfzhang@mail.sim.ac.cn

基金项目: 上海市自然科学基金(批准号: 18ZR1447400)资助的课题

Authors and contacts

1.
State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

2.
Center for Excellence in Superconducting Electronics, Chinese Academy of Sciences, Shanghai 200050, China

3.
University of Chinese Academy of Sciences, Beijing 100049, China

Corresponding author: Zhang Guo-Feng, gfzhang@mail.sim.ac.cn

Funds: Project sponsored by the Natural Science Foundation of Shanghai, China (Grant No. 18ZR1447400)

文章全文 : translate this paragraph

参考文献

[1]	Deaver B S, Fairbank W M 1961 Phys. Rev. Lett. 7 4
[2]	Doll R, Näbauer M 1961 Phys. Rev. Lett. 7 51 Google Scholar
[3]	Josephson B D 1962 Phys. Lett. 1 251 Google Scholar
[4]	Josephson B D 1965 Adv. Phys. 14 419 Google Scholar
[5]	Forgacs R L, Warnick A 1967 Rev. Sci. Instrum. 38 214 Google Scholar
[6]	Drung D, Cantor R, Peters M, Scheer H J, Koch H 1990 Appl. Phys. Lett. 57 406 Google Scholar
[7]	Wang Y, Zhang G, Zhang S, Rong L, Xie X 2020 Physica C 569 1353590 Google Scholar
[8]	Seppä H, Ahonen A, Knuutila J, Simola J, Vikman V 1991 IEEE Trans. Magn. 27 2488 Google Scholar
[9]	Drung D 2010 Supercond. Sci. Technol. 23 065006 Google Scholar
[10]	Adelerhof D J, Kawai J, Uehara G, Kado H 1994 Appl. Phys. Lett. 65 2606 Google Scholar
[11]	Kang C S, Kim K, Lee S J, Hwang S M, Kim J M, Yu K K, Kwon H, Lee S K, Lee Y H 2011 J. Appl. Phys. 110 053906 Google Scholar
[12]	Xie X, Zhang Y, Wang H, Wang Y, Mück M, Dong H, Krause H J, Braginski A I, Offenhäusser A, Jiang M 2010 Supercond. Sci. Technol. 23 065016 Google Scholar
[13]	Kazami K, Kawai J, Uehara G, Kado H 1996 Jpn. J. Appl. Phys. 35 4322 Google Scholar
[14]	Falferi P, Mezzena R, Vinante A 2009 Supercond. Sci. Technol. 22 075020 Google Scholar
[15]	Kiviranta M, Gronberg L, Sipola H 2011 Supercond. Sci. Technol. 24 045003 Google Scholar
[16]	Welty R P, Martinis J M 1991 IEEE Trans. Magn. 27 2924 Google Scholar
[17]	Welty R P, Martinis J M 1993 IEEE Trans. Magn. 3 2605 Google Scholar
[18]	Morooka T, Myoren H, Takada S, Chinone K 2003 Jpn. J. Appl. Phys. 42 1375 Google Scholar
[19]	Morooka T, Tanaka K, Chinone K 2002 IEEE Trans. Appl. Supercond. 12 1866 Google Scholar
[20]	Lanting T, Dobbs M, Spieler H, Lee A T, Yamamoto Y 2009 Rev. Sci. Instrum. 80 094501 Google Scholar
[21]	Li K, Hubbell S P 1995 IEEE Trans. Appl. Supercond. 5 3255 Google Scholar
[22]	Stawiasz K G, Ketchen M B 1993 IEEE Trans. Appl. Supercond. 3 1808 Google Scholar
[23]	Semenov V K, Khapaev M M 2016 IEEE Trans. Appl. Supercond. 26 1300710 Google Scholar

施引文献

图 1 串联SQUID阵列(SSA)示意图. I_i和I_f分别表示通过输入线圈和反馈线圈的电流, V_o表示在偏置电流为I_b时SSA的输出电压

Fig. 1. Schematic diagram of series SQUID array (SSA). I_i and I_f represent the current through the input coil and feedback coil, respectively. V_o is the output voltage of SSA biased at the current I_b.

下载: 全尺寸图片幻灯片

图 2 (a) SSA光镜图; (b) SSA局部放大图

Fig. 2. (a) Microscope photograph of global and (b) partial enlargement of SSA.

下载: 全尺寸图片幻灯片

图 3 SSA平面工艺截面示意图

Fig. 3. Cross section of SSA fabrication process.

下载: 全尺寸图片幻灯片

图 4 (a) SSA电流-电压特性曲线; (b) SSA在不同偏置电流下的电压-线圈电流(磁通)特性曲线

Fig. 4. (a) Current-voltage characteristic of SSA; (b) voltage-coil current (flux) characteristic at different bias currents of SSA.

下载: 全尺寸图片幻灯片

图 5 SSA磁通噪声曲线和等效电流噪声

Fig. 5. Flux noise curve and equivalent current noise of SSA

下载: 全尺寸图片幻灯片

图 6 (a) SSA的正常态电阻R_n(方点)和最大电压调制幅度V_pp(星点)与SQUID数量之间的关系, 实线和虚线均为测试数据的线性拟合; (b) SSA的最大磁通-电压转换系数V_Φ与SQUID数量之间的关系, 其中点为测试值, 线为线性拟合的结果

Fig. 6. (a) Normal resistance R_n (square dot) and maximum voltage swing V_pp (star dot) of SSA dependence on the SQUID-element number, in which the solid and dashed line are linear fittings, respectively (b) maximum flux-to-voltage coefficient V_Φ dependence on the SQUID-element number, where the dots are experimental data and the line is the result of linear fitting.

下载: 全尺寸图片幻灯片

表 1 SSA设计参数

Table 1. Design parameters of SSA.

参数	符号	数值
约瑟夫森结面积/(μm × μm)	A	3 × 3
临界电流/μA	I_c	9
结并联电阻/Ω	R_s	1和4
垫圈尺寸/(μm × μm)	—	8 × 28
单个SQUID电感/pH	L_S	100
输入线圈匝数/匝	—	2
输入线圈线宽/μm	—	1
SQUID个数	N	200和800
输入电流灵敏度/(μA·$ \varPhi_0^{–1} $)	1/M_i	35

下载: 导出CSV

[1]	Deaver B S, Fairbank W M 1961 Phys. Rev. Lett. 7 4
[2]	Doll R, Näbauer M 1961 Phys. Rev. Lett. 7 51 Google Scholar
[3]	Josephson B D 1962 Phys. Lett. 1 251 Google Scholar
[4]	Josephson B D 1965 Adv. Phys. 14 419 Google Scholar
[5]	Forgacs R L, Warnick A 1967 Rev. Sci. Instrum. 38 214 Google Scholar
[6]	Drung D, Cantor R, Peters M, Scheer H J, Koch H 1990 Appl. Phys. Lett. 57 406 Google Scholar
[7]	Wang Y, Zhang G, Zhang S, Rong L, Xie X 2020 Physica C 569 1353590 Google Scholar
[8]	Seppä H, Ahonen A, Knuutila J, Simola J, Vikman V 1991 IEEE Trans. Magn. 27 2488 Google Scholar
[9]	Drung D 2010 Supercond. Sci. Technol. 23 065006 Google Scholar
[10]	Adelerhof D J, Kawai J, Uehara G, Kado H 1994 Appl. Phys. Lett. 65 2606 Google Scholar
[11]	Kang C S, Kim K, Lee S J, Hwang S M, Kim J M, Yu K K, Kwon H, Lee S K, Lee Y H 2011 J. Appl. Phys. 110 053906 Google Scholar
[12]	Xie X, Zhang Y, Wang H, Wang Y, Mück M, Dong H, Krause H J, Braginski A I, Offenhäusser A, Jiang M 2010 Supercond. Sci. Technol. 23 065016 Google Scholar
[13]	Kazami K, Kawai J, Uehara G, Kado H 1996 Jpn. J. Appl. Phys. 35 4322 Google Scholar
[14]	Falferi P, Mezzena R, Vinante A 2009 Supercond. Sci. Technol. 22 075020 Google Scholar
[15]	Kiviranta M, Gronberg L, Sipola H 2011 Supercond. Sci. Technol. 24 045003 Google Scholar
[16]	Welty R P, Martinis J M 1991 IEEE Trans. Magn. 27 2924 Google Scholar
[17]	Welty R P, Martinis J M 1993 IEEE Trans. Magn. 3 2605 Google Scholar
[18]	Morooka T, Myoren H, Takada S, Chinone K 2003 Jpn. J. Appl. Phys. 42 1375 Google Scholar
[19]	Morooka T, Tanaka K, Chinone K 2002 IEEE Trans. Appl. Supercond. 12 1866 Google Scholar
[20]	Lanting T, Dobbs M, Spieler H, Lee A T, Yamamoto Y 2009 Rev. Sci. Instrum. 80 094501 Google Scholar
[21]	Li K, Hubbell S P 1995 IEEE Trans. Appl. Supercond. 5 3255 Google Scholar
[22]	Stawiasz K G, Ketchen M B 1993 IEEE Trans. Appl. Supercond. 3 1808 Google Scholar
[23]	Semenov V K, Khapaev M M 2016 IEEE Trans. Appl. Supercond. 26 1300710 Google Scholar

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