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Ion implantation induced nucleation and epitaxial growth of high-quality AlN

Yu Sen Xu Sheng-Rui Tao Hong-Chang Wang Hai-Tao An Xia Yang He Xu Kang Zhang Jin-Cheng Hao Yue

Citation:

Ion implantation induced nucleation and epitaxial growth of high-quality AlN

Yu Sen, Xu Sheng-Rui, Tao Hong-Chang, Wang Hai-Tao, An Xia, Yang He, Xu Kang, Zhang Jin-Cheng, Hao Yue
cstr: 32037.14.aps.73.20240674
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  • Abstract views:  914
  • PDF Downloads:  46
  • Cited By: 0
Publishing process
  • Received Date:  11 May 2024
  • Accepted Date:  31 August 2024
  • Available Online:  04 September 2024
  • Published Online:  05 October 2024

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