Ion implantation induced nucleation and epitaxial growth of high-quality AlN

Yu Sen; Xu Sheng-Rui; Tao Hong-Chang; Wang Hai-Tao; An Xia; Yang He; Xu Kang; Zhang Jin-Cheng; Hao Yue

doi:10.7498/aps.73.20240674

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Yu Sen, Xu Sheng-Rui, Tao Hong-Chang, Wang Hai-Tao, An Xia, Yang He, Xu Kang, Zhang Jin-Cheng, Hao Yue. Ion implantation induced nucleation and epitaxial growth of high-quality AlNJ. Acta Physica Sinica, 2024, 73(19): 196101. DOI: 10.7498/aps.73.20240674

Citation:

Yu Sen, Xu Sheng-Rui, Tao Hong-Chang, Wang Hai-Tao, An Xia, Yang He, Xu Kang, Zhang Jin-Cheng, Hao Yue. Ion implantation induced nucleation and epitaxial growth of high-quality AlNJ. Acta Physica Sinica, 2024, 73(19): 196101. DOI: 10.7498/aps.73.20240674

Citation:

Yu Sen, Xu Sheng-Rui, Tao Hong-Chang, Wang Hai-Tao, An Xia, Yang He, Xu Kang, Zhang Jin-Cheng, Hao Yue. Ion implantation induced nucleation and epitaxial growth of high-quality AlNJ. Acta Physica Sinica, 2024, 73(19): 196101. DOI: 10.7498/aps.73.20240674