Study on porous silicon template for nanoimprint lithography
Acta Physica Sinica
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Acta Phys. Sin  2014, Vol. 63 Issue (1): 018102     doi:10.7498/aps.63.018102
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Study on porous silicon template for nanoimprint lithography
Zhang Zheng1, Xu Zhi-Mou1, Sun Tang-You1, Xu Hai-Feng1, Chen Cun-Hua2, Peng Jing3
1. School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China;
2. College of Chemistry, Central China Normal University, Wuhan 430079, China;
3. College of Science, Wuhan University of Science and Technology, Wuhan 430081, China
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