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INFLUENCE OF ION ENERGY AND DEPOSITION TEMPERATURE ON THE SURFACE MORPHOLOGY OF CARBON FILMS DEPOSITED BY ION BEAMS

LIAO MEI-YONG QIN FU-GUANG CHAI CHUN-LIN LIU ZHI-KAI YANG SHAO-YAN YAO ZHEN-YU WANG ZHAN-GUO

Citation:

INFLUENCE OF ION ENERGY AND DEPOSITION TEMPERATURE ON THE SURFACE MORPHOLOGY OF CARBON FILMS DEPOSITED BY ION BEAMS

LIAO MEI-YONG, QIN FU-GUANG, CHAI CHUN-LIN, LIU ZHI-KAI, YANG SHAO-YAN, YAO ZHEN-YU, WANG ZHAN-GUO
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  • Abstract views:  6226
  • PDF Downloads:  547
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Publishing process
  • Received Date:  14 November 2000
  • Accepted Date:  26 February 2001
  • Published Online:  20 July 2001

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