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摘要: 在真空环境中,利用传输线测量装置,开展微波等离子体喷流对反射电磁波衰减的实验研究.实验结果表明,采用传输线测量方法能够有效地获得等离子体对反射电磁波的衰减;在5GHz附近,以氩气为工质,流量为52.5mg/s时,52W微波功率在真空环境中产生的等离子体喷流能对反射电磁波产生最大的衰减;增加微波功率、降低真空环境压强可以提高等离子体对反射电磁波的衰减;要使等离子体能够对反射电磁波产生最大的衰减,必须选取合适的发生器参数.
Abstract: The microwave test method of transmission line can be applied to study the characteristics of wave absorption by plasma. With this method, how the parameters of microwave plasma generator, the medium being argon, and the vacuum environment affect the variation trends of plasma return loss, which imply the plasma jet attenuation of reflected electromagnetic wave, is studied in vacuum environment. Experimental results show that when the mass flow rate and output power of plasma generator are 52.5mg/s and 52W, respectively, microwave plasma jet can absorb the energy of reflected electromagnetic wave maximally at the frequency near 5GHz. With the output power increasing and the environment pressure decreasing, the wave attenuation of plasma will be increased. The plasma jet will attenuate reflected wave maximally with appropriate generator parameters.