单级衍射量子点阵光栅的聚焦离子束直写法制备及光学性能检测

黄成龙; 张继成; 刁凯迪; 曾勇; 易勇; 曹磊峰; 王红斌

doi:10.7498/aps.63.018101

摘要

采用聚焦离子束直写技术，成功制作了面积为200 μm×200 μm，线密度500 mm-1，圆孔直径800 nm，金吸收体厚度为500 nm的单级衍射量子点阵光栅. 研究了该光栅在波长442 nm激光下不同传输距离的衍射特性以及相对衍射效率. 实验结果表明，量子点阵光栅不存在高级衍射，只保留了±1级和0级衍射，具有良好的单级衍射特性. 1级衍射与0级衍射间距随传输距离的增大而增大，实测值与理论计算值相符.

关键词:

Abstract

Quantum-dot-array diffraction grating(QDADG), with an area of 200 μm×200 μm, a line density of 500 line/mm, an aperture size of 800 nm and a gold absorber of 500 nm thick, is successfully fabricated by focused ion beams. The diffraction properties and relative diffraction efficiencies of QDADG are measured at different transfer distance for 442 nm laser. It is shown that the high-order diffraction is removed from the spectra with only the ±1 and 0 order diffraction lines reserved. Moreover, in accordance with the calculated values obtained using the grating equation, variations of space between the 1st order and the 0th order increase gradually with the increase of transfer distance.

Keywords:

focused ion beam(FIB) /
quantum-dot-array diffraction grating(QDADG) /
single order diffraction

作者及机构信息

1.
西南科技大学,四川省非金属复合与功能材料重点实验室-省部共建国家重点实验室培育基地, 绵阳 621010;

2.
西南科技大学, 极端条件物质特性实验室, 绵阳 621010;

3.
中国工程物理研究院, 激光聚变研究中心, 绵阳 621900

基金项目: 四川省非金属复合与功能材料重点实验室开放基金（批准号：11zxfk19）资助的课题.

Authors and contacts

1.
State Key Laboratory Cultivation Base for Nonmetal Composites and Functional Materials, Southwest University of Science and Technology, Mianyang 621010, China;

2.
Laboratory for Extreme Conditions Matter Properties, Southwest University of Science and Technology, Mianyang 621010, China;

3.
Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China

Funds: Project supported by the Open Foundation of Key Laboratory for Nonmetal Composites and Functional Materials of Sichuan Province, China (Grant No. 11zxfk19).

参考文献

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[2]	Zou B, Chiang K S 2013 Journal of Lightwave Technology 31 2223
[3]	Mariën G, Jovanovi N, Cvetojevi N, Williams R, Haynes R, Lawrence J, Parker Q, Withford M J 2012 Astronomy & Astrophysics 421 3641
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[12]	Zhao M, Zhu X L, Chen B Q, Xie C Q, Liu M, Cao L F 2007 Optical Engineering 475 058001
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[14]	Feng Y J, Cheng Q H, Wu P H 1995 Chin. Phys. 4 301
[15]	Zhang H B, Feng R J, Katsumi U 2003 Chin. Phys. Lett. 20 2011
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[17]	Chen L M, Li P G, Fu X L, Zhang H Y, Li H L, Tang W H 2005 Acta Phys. Sin. 54 0582 (in Chinese) [陈雷明, 李培刚, 符秀丽, 张海英, Li H L, 唐为华 2005 物理学报 54 0582]
[18]	Gu W Q, Ma X G, Li W P 2006 Focused ion beam micro-nano fabrication technology (Beijing: Beijing Industry University Press) pp1–87 (in Chinese) [顾文琪, 马向国, 李文萍 2006 聚焦离子束微纳加工技术 (北京: 北京工业大学出版社) 第1–87页]
[19]	Wei L, Cao L F, Fan W, Zang H P, Gao Y L, Zhu X L, Xie C Q, Gu Y Q, Zhang B H, Wang X F 2011 High Power Laser and Particle Beams 23 387 (in Chinese) [魏来, 曹磊峰, 范伟, 臧华平, 高宇林, 朱效立, 谢长青, 谷渝秋, 张保汉, 王晓方 2011 强激光与粒子束 23 387]

施引文献

[1]	Weisberg A, Craparo J, Saro R D, Pawluczyk R 2010 Appl. Opt. 49 200
[2]	Zou B, Chiang K S 2013 Journal of Lightwave Technology 31 2223
[3]	Mariën G, Jovanovi N, Cvetojevi N, Williams R, Haynes R, Lawrence J, Parker Q, Withford M J 2012 Astronomy & Astrophysics 421 3641
[4]	Kantsyrev V L, Baure B S, Shlyaptseva A S, Fedin D A, Hansen S, Presura R, Chamberlain D, Ouart N D, Jones A, Lebeau H 2000 SPIE 4138 203
[5]	Cao L F China Patent CN200410081499 [2005-07-27] (in Chinese) [曹磊峰中国: CN200410081499 2005-07-27]
[6]	Cao L F, Forster E, Fuhrmann A, Wang C K, Kuang L Y 2007 Appl. Phys. Lett. 90 053501
[7]	David C, Bruder J, Rohbeck T, Grnzweig C, Kottler C, Diaz A, Bunk O, Pfeiffer F 2007 Microelectron. Eng. 84 1173
[8]	Gorelick S, Guzenko V A, Vila-Comamala J, David C 2010 Nanotechnology 21 295303
[9]	Luo C C, Li Y G, Susumu S 2012 Optics & Laser Technology 44 1649
[10]	Kong L Q, Zhang C J, Huang S L, Zhu X F 2012 Acta Phys. Sin. 61 036102 (in Chinese) [孔令琦, 张春婧, 黄胜利, 朱贤方 2012 物理学报 61 036102]
[11]	Sun L Y, Gao Z Y, Zou D S, Zhang L, Ma L, Tian L, Shen G D 2012 Acta Phys. Sin. 61 206801 (in Chinese) [孙丽媛, 高志远, 邹德恕, 张露, 马莉, 田亮, 沈光地 2012 物理学报 61 206801]
[12]	Zhao M, Zhu X L, Chen B Q, Xie C Q, Liu M, Cao L F 2007 Optical Engineering 475 058001
[13]	Kuang L Y, Cao L F, Zhu X L, Wu S C, Wang Z B, Wang C K, Liu S Y, Jiang S E, Yang J M, Ding Y K, Xie C Q, Zheng J 2011 Opt. Lett. 36 3954
[14]	Feng Y J, Cheng Q H, Wu P H 1995 Chin. Phys. 4 301
[15]	Zhang H B, Feng R J, Katsumi U 2003 Chin. Phys. Lett. 20 2011
[16]	Giannuzzi L A, Stevie F A 2004 Introduction to focused ion beams: instrumentation, theory, techniques and practice (New York: Springer Science+Business Media) pp1-12
[17]	Chen L M, Li P G, Fu X L, Zhang H Y, Li H L, Tang W H 2005 Acta Phys. Sin. 54 0582 (in Chinese) [陈雷明, 李培刚, 符秀丽, 张海英, Li H L, 唐为华 2005 物理学报 54 0582]
[18]	Gu W Q, Ma X G, Li W P 2006 Focused ion beam micro-nano fabrication technology (Beijing: Beijing Industry University Press) pp1–87 (in Chinese) [顾文琪, 马向国, 李文萍 2006 聚焦离子束微纳加工技术 (北京: 北京工业大学出版社) 第1–87页]
[19]	Wei L, Cao L F, Fan W, Zang H P, Gao Y L, Zhu X L, Xie C Q, Gu Y Q, Zhang B H, Wang X F 2011 High Power Laser and Particle Beams 23 387 (in Chinese) [魏来, 曹磊峰, 范伟, 臧华平, 高宇林, 朱效立, 谢长青, 谷渝秋, 张保汉, 王晓方 2011 强激光与粒子束 23 387]

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