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采用MOS方法,在液相外延生长的n型In0.75Ga0.25As0.58P0.42混晶中,我们测出了两个位于导带下面0.20eV和0.48eV处的电子陷阱,对电子的俘获截面分别为1.4×10-16cm2和3.8×10-12cm2。关于采用MOS方式研究具有多层结构的化合物半导体材料的DLITS问题,本文也进行了讨论。By means of MOS-DLTS method, two electron traps in LPE n-type In0.75Ga0.25As0.58P0.42 material have been observed. Their depths are 0.20 eV and 0.48 eV below conduction band, and capture cross sections of electrons are about 14×10-16cm2 and 3.8×10-12cm2, respectively.Some discussion on the method applied to studying DLTS of multilayer composition semiconductor materials are also given.
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