基于光纤微结构加工和敏感材料物理融合的光纤传感技术

王闵; 刘复飞; 周贤; 戴玉堂; 杨明红

doi:10.7498/aps.66.070703

摘要

将功能敏感材料与光纤在物理层面进行有机融合，充分发挥光纤传感器在结构集成、材料集成等方面的优势，将有望发展新型的光纤传感器件和系统.本文综述了飞秒激光光纤微加工技术分别在标准的单模光纤和光纤光栅上制备微结构，再结合敏感材料制备技术，实现在物理层面上光纤传感器材料和结构的集成和融合，探索实现新型高性能的光纤传感新技术.

关键词:

Integration of novel functional material with fiber optic components is one of the new trends in the field of novel sensing technologies. The combination of fiber optics with functional materials offers great potential for realizing the novel sensors. Typically in optical fibre sensing technology, fibre itself acts as sensing element and also transmitting element, such as fiber Bragg grating (FBG), Brillouin or Raman optical time domain reflectometer. However such sensing components can only detect limited physical parameters such as temperature or strain based on the principle of characteristic wavelength drifts. While the idea of optical fiber sensing technology with functional materials is quite different from that of the traditional technology, functional materials can be employed as sensing components, therefore many parameters, including chemical or biological parameters, can be detected, depending on the designs of different sensing films. When compared with the common fiber sensing technologies such as FBG and optical time domain reflectometer, fiber optic sensors based on functional materials show advantages in the diversity of measurement parameters. However, functional materials can be realized by many techniques including e-beam evaporation, magnetron sputtering, spin-coating, electro-chemical plating, etc. The mechanical stability of tiny optical fibers is still problematic, which could be a challenge to industrial applications. In this work, a femtosecond laser fabricated fiber inline micro Mach-Zehnder interferometer with deposited palladium film for hydrogen sensing is presented. Simulation results show that the transmission spectrum of the interferometer is critically dependent on the microcavity length and the refractive index of Pd film, and a short microcavity length corresponds to a high sensitivity. The experimental results obtained in a wavelength region of 1200-1400 nm, and in a hydrogen concentration range of 0-16%, accord well with those of the simulations. The developed system has high potential in hydrogen sensing with high sensitivity. Three-dimensional multitrench microstructures, femtosecond laser ablated in fiber Bragg grating cladding, TbDyFe sputtering are proposed and demonstrated for magnetic field sensing probe. Parameters such as the number of straight microtrenches, translation speed (feed rate), and laser pulse power of laser beam have been systematically varied and optimized. A 5-m-thick giant Terfenol-D magnetostrictive film is sputtered onto FBG microtrenches, and acts as a magnetic sensing transducer. Eight microtrench samples produce the highest central wavelength shift of 120 pm, nearly fivefold more sensitive than nonmicrostructured standard FBG. An increase in laser pulse power to 20 mW generates a magnetic sensitivity of 0.58 pm/mT. Interestingly, reduction in translational speed contributes dramatically to the rise in the magnetic sensitivity of the sample. These sensor samples show magnetic response reversibility and have great potential in the magnetic field sensing domain. Furthermore hydrogen sensors based on fiber Bragg gratings micro-machined by femtosecond laser to form microgrooves and sputtered with Pd/Ag composite film are proposed and demonstrated. The atomic ratio of the two metals is controlled at Pd:Ag=3:1. At room temperature, the hydrogen sensitivity of the sensor probe micro-machined by 75 mW laser power and sputtered with 520 nm of Pd/Ag film is 16.5 pm/%H. Comparably, the standard FBG hydrogen sensitivity becomes 2.5~pm/%H for the same 4% hydrogen concentration. At an ambient temperature of 35℃, the processed sensor head has a dramatic rise in hydrogen sensitivity. Besides, the sensor shows good response and repeatability during hydrogen concentration test.

Keywords:

作者及机构信息

1.
武汉纺织大学电子与电气工程学院, 武汉 430200;

2.
武汉理工大学光纤传感技术国家工程实验室, 武汉 430070

通信作者: 杨明红, minghong.yang@whut.edu.cn

基金项目: 国家自然科学基金（批准号：61290311，61505150，61575151）和湖北省自然科学基金（批准号：2014CFC1138，2015CFA016）资助的课题.

Authors and contacts

1.
School of Electronic and Electrical Engineering, Wuhan Textile University, Wuhan 430200, China;

2.
National Engineering Laboratory for Fiber Optic Sensing Technology, Wuhan University of Technology, Wuhan 430070, China

Corresponding author: Yang Ming-Hong, minghong.yang@whut.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61290311, 61505150, 61575151), and Natural Science Foundation of Hubei Province, China (Grant Nos. 2014CFC1138, 2015CFA016).

参考文献

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[11]	Yang M H, Dai J X 2012 Photon. Sensors 2 14
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[16]	Dikovska A O, Atanasov P A, Stoyanchov T R, Andreev A T, Karakoleva E I, Zafirova B S 2007 Appl. Opt. 46 2481
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[19]	Yang Z, Zhang M, Liao Y B, Tian Q, Li Q S, Zhang Y, Zhuang Z 2010 Appl. Opt. 49 2736
[20]	Liu N, Hui J, Sun C Q, Dong J H, Zhang L Z, Xiao H 2006 Sensors 6 835
[21]	Yang M H, Dai J X, Li X B, Wang J J 2010 J. Appl. Phys. 108 033102
[22]	Dai J X, Yang M H, Chen Y, Cao K, Liao H S, Zhang P C 2011 Opt. Express 19 6141
[23]	Dikovska A O, Atanasova G B, Nedyalkov N N, Stefanov P K, Atanasov P A, Karakoleva E I, Andreev A T 2010 Sensors Actuat. B:Chem. 146 331
[24]	Poole Z L, Ohodnicki P, Chen R, Lin Y, Chen K P 2014 Opt. Express 22 2665
[25]	Wang M, Yang M, Cheng J, Dai J X, Yang M H, Wang D N 2012 Opt. Lett. 37 1940
[26]	Butler M A 1991 J. Eletrochem. Soc. 138 L46
[27]	Butler M A 1994 Sensors Actuat. B:Chem. 22 142
[28]	Park K S, Kim Y H, Eom J B 2011 Opt. Express 19 18190
[29]	Wang M, Yang M H, Cheng J, Zhang G L, Liao C R, Wang D N 2013 IEEE Photon. Tech. Lett. 25 713
[30]	Zhang Y, Li Q S, Zhuang Z. 2011 Proceedings of 21st International Conference Optis Fiber Sensors Ottawa, Canada, May 15-19, 2011 p775369
[31]	Butler M A, Ginley D S 1988 J. Appl. Phys. 64 3706
[32]	Karanja J M, Dai Y T, Zhou X, Liu B, Yang M H 2015 Opt. Express 23 31034
[33]	Zhang W G, Liu Z L, Yin L M 2011 Acta Opt. Sin. 7 86 (in Chinese)[张伟刚, 刘卓琳, 殷丽梅2011光学学报7 86]

施引文献

[1]	Kao T W, Tayler H F 1996 Opt. Lett. 21 615
[2]	Rao Y J 2006 Opt. Fiber Technol. 12 227
[3]	Rao Y J, Wang Y P, Ran Z L, Zhu T 2003 J. Lightw. Technol. 21 1320
[4]	Woolley A T, Marbles R A 1995 Anal. Chem. 67 3676
[5]	Qiu F, Matsumiya M, Shin W, Izu N, Murayama N 2003 Sensors Actuat. B:Chem. 94 152
[6]	Matsumiya M, Shin W, Izu N, Murayama N 2003 Sensors Actuat. B:Chem. 93 309
[7]	Ryzhikov A S, Shatokhin A N, Putilin F N, Rumyantseva M N, Gaskov A M, Labeau M 2005 Sensors Actuat. B:Chem. 107 387
[8]	Shukla S, Seal S, Ludwig L, Parish C 2004 Sensors Actuat. B:Chem. 97 256
[9]	Tan O K, Zhu W, Tse M S, Yao X 1999 Mater. Sci. Eng. B 58 221
[10]	Gong J W, Chen Q F, Fei W F, Seal S 2004 Sensors Actuat. B:Chem. 102 117
[11]	Yang M H, Dai J X 2012 Photon. Sensors 2 14
[12]	Yang M H, Dai J X, Zhou C M, Jiang D S 2009 Opt. Express 17 20777
[13]	Butler M A 1994 J. Electrochem. Soc. 138 L46
[14]	Butler M A 1994 Sensors Actuat. B:Chem. 22 142
[15]	Bevenot X, Trouillet A, Veillas C, Gagnaire H, Clment M 2000 Sensors Actuat. B:Chem. 67 57
[16]	Dikovska A O, Atanasov P A, Stoyanchov T R, Andreev A T, Karakoleva E I, Zafirova B S 2007 Appl. Opt. 46 2481
[17]	Kim K T, Song H S, Mah J P, Hong K B, Im K, Baik S J, Yoon Y I 2007 IEEE Sens. J. 7 1767
[18]	Dikovska A O, Atanasov P A, Andreev A T, Zafirova B S, Karakoleva E I, Stoyanchov T R 2007 Appl. Surf. Sci. 254 1087
[19]	Yang Z, Zhang M, Liao Y B, Tian Q, Li Q S, Zhang Y, Zhuang Z 2010 Appl. Opt. 49 2736
[20]	Liu N, Hui J, Sun C Q, Dong J H, Zhang L Z, Xiao H 2006 Sensors 6 835
[21]	Yang M H, Dai J X, Li X B, Wang J J 2010 J. Appl. Phys. 108 033102
[22]	Dai J X, Yang M H, Chen Y, Cao K, Liao H S, Zhang P C 2011 Opt. Express 19 6141
[23]	Dikovska A O, Atanasova G B, Nedyalkov N N, Stefanov P K, Atanasov P A, Karakoleva E I, Andreev A T 2010 Sensors Actuat. B:Chem. 146 331
[24]	Poole Z L, Ohodnicki P, Chen R, Lin Y, Chen K P 2014 Opt. Express 22 2665
[25]	Wang M, Yang M, Cheng J, Dai J X, Yang M H, Wang D N 2012 Opt. Lett. 37 1940
[26]	Butler M A 1991 J. Eletrochem. Soc. 138 L46
[27]	Butler M A 1994 Sensors Actuat. B:Chem. 22 142
[28]	Park K S, Kim Y H, Eom J B 2011 Opt. Express 19 18190
[29]	Wang M, Yang M H, Cheng J, Zhang G L, Liao C R, Wang D N 2013 IEEE Photon. Tech. Lett. 25 713
[30]	Zhang Y, Li Q S, Zhuang Z. 2011 Proceedings of 21st International Conference Optis Fiber Sensors Ottawa, Canada, May 15-19, 2011 p775369
[31]	Butler M A, Ginley D S 1988 J. Appl. Phys. 64 3706
[32]	Karanja J M, Dai Y T, Zhou X, Liu B, Yang M H 2015 Opt. Express 23 31034
[33]	Zhang W G, Liu Z L, Yin L M 2011 Acta Opt. Sin. 7 86 (in Chinese)[张伟刚, 刘卓琳, 殷丽梅2011光学学报7 86]

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