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Ions extraction and collection using the RF resonance method and taking into consideration the sputtering loss

Xie Guo-Feng Wang De-Wu Ying Chun-Tong

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Ions extraction and collection using the RF resonance method and taking into consideration the sputtering loss

Xie Guo-Feng, Wang De-Wu, Ying Chun-Tong
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  • Abstract views:  6848
  • PDF Downloads:  608
  • Cited By: 0
Publishing process
  • Received Date:  18 August 2004
  • Accepted Date:  13 September 2004
  • Published Online:  10 May 2005

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