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The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅰ)——Physical model and theoretical methods

Jin Xiao-Lin Yang Zhong-Hai

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The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅰ)——Physical model and theoretical methods

Jin Xiao-Lin, Yang Zhong-Hai
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  • Abstract views:  9476
  • PDF Downloads:  1364
  • Cited By: 0
Publishing process
  • Received Date:  04 April 2006
  • Accepted Date:  26 April 2006
  • Published Online:  20 November 2006

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