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The mechanical property of diamond-like carbon films with different hydrogen concentration is studied using molecular dynamical simulation based on REBO potential energy functions. The stiffness, hardness, and elastic modulus of the films are calculated from the load-unload curve. It is shown that both of the fraction of sp3 carbon and the concentration of H in the films have strong influence on the film hardness. When H concentration in the film is lower than 39%, the hardness is mainly determined by sp3 carbon, when H concentration further increases, the hardness decreases greatly despite the increase of the sp3 fraction.
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Keywords:
- diamond-like carbon /
- reaction dynamical simulation /
- nano-indentation /
- hardness
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[2] Wang X, Wang P, Yang S R, Zhang J Y 2008 Wear 265 1708
[3] Eryilmaz O L, Erdemir A 2008 Surf. Coat. Tech. 203 750
[4] Silinskas M, Grigonis A, Kulikauskas V, Manika I 2008 Thin. Solid. Films 516 1683
[5] Laikhtman A, Hoffman A, Kalish R, Avigal Y, Breskin A, Chechik R, Shefer E, Lifshitz Y 1998 Appl. Phys. Lett. 73 1433
[6] Dillon R O, Woollam J A, Katkanant V 1984 Phys. Rev. B 29 3482
[7] Tang X M, Weber J, Baer Y, Müller C, Hnni W, Hintermann H E 1993 Phys. Rev. B 48 10124
[8] Jiu J T, Wang H, Cao C B, Zhu H 1999 J. Mater. Sci. 34 5205
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[17] Lifshitz Y, Edrei R, Hoffman A, Grossman E, Lempert G D, Berthold J, Schultrich B, Jger H U 2007 Diamond. Relat. Mater. 16 1771
[18] Zhan Y J, Dong G N, Mao J H, Xie Y B 2007 Chinese. Sci. Bull. 52 2813 (in Chinese) [张宇军、董光能、毛军红、谢友柏 2007 科学通报 52 2813] 〖19] Neyts E, Bogaerts A, van de Sanden M C M 2007 J. Phys. Conf. Series 86 012020
[19] Kai H, Li Y C, Guo D C, Li S, Li Z J 2009 Acta Phys. Sin. 58 4888 (in Chinese) [开 花、李运超、郭德成、李 双、李之杰 2009 物理学报 58 4888]
[20] Li J, Zhang K W, Meng L J, Liu W L, Zhong J X 2008 Acta Phys. Sin. 57 382 (in Chinese) [李 俊、张凯旺、孟利军、刘文亮、钟建新 2008 物理学报 57 382]
[21] Tang C, Ji L, Meng L J, Sun L Z, Zhang K W, Zhong J X 2009 Acta Phys. Sin. 58 7815 (in Chinese) [唐 超、吉 璐、孟利军、孙立忠、张凯旺、钟建新 2009 物理学报 58 7815]
[22] Brenner D W, Shenderova O A, Harrison J A, Stuart S J, Ni B, Sinnott S B 2002 J. Phys. Condens. Mat. 14 783
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[1] Erdemir A 2001 Surf. Coat. Tech. 146-147 294
[2] Wang X, Wang P, Yang S R, Zhang J Y 2008 Wear 265 1708
[3] Eryilmaz O L, Erdemir A 2008 Surf. Coat. Tech. 203 750
[4] Silinskas M, Grigonis A, Kulikauskas V, Manika I 2008 Thin. Solid. Films 516 1683
[5] Laikhtman A, Hoffman A, Kalish R, Avigal Y, Breskin A, Chechik R, Shefer E, Lifshitz Y 1998 Appl. Phys. Lett. 73 1433
[6] Dillon R O, Woollam J A, Katkanant V 1984 Phys. Rev. B 29 3482
[7] Tang X M, Weber J, Baer Y, Müller C, Hnni W, Hintermann H E 1993 Phys. Rev. B 48 10124
[8] Jiu J T, Wang H, Cao C B, Zhu H 1999 J. Mater. Sci. 34 5205
[9] Zhu L, Jiang M F, Ning Z Y, Du J L, Wang P J 2009 Acta Phys. Sin. 58 6430 (in Chinese) [朱 丽、江美福、宁兆元、杜记龙、王培君 2009 物理学报 58 6430]
[10] Zhao D C, Ren N, Ma Z J, Qiu J W, Xiao G J, Wu S H 2008 Acta Phys. Sin. 57 1935 (in Chinese) [赵栋才、任 妮、马占吉、邱家稳、肖更竭、武生虎 2008 物理学报 57 1935]
[11] Jger H U, Yu Belov A 2003 Phys. Rev. B 68 024201
[12] Marks N 2005 Diamond. Relat. Mater. 14 1223
[13] Ma T B, Hu Y Z, Wang H 2006 Acta Phys. Sin. 55 2922 (in Chinese) [马天宝、胡元中、王 慧 2006 物理学报 55 2922]
[14] Ma T B, Hu Y Z, Wang H, Li X 2007 Phys. Rev. B 75 035425
[15] Ma T B, Hu Y Z, Wang H 2007Acta Phys. Sin. 56 1129 (in Chinese) [马天宝、胡元中、王 慧 2007 物理学报 56 1129]
[16] Zhang S, Johnson H T, Wagner G. J, Liu W K, Hsia K J 2003 Acta. Mater. 51 5211
[17] Lifshitz Y, Edrei R, Hoffman A, Grossman E, Lempert G D, Berthold J, Schultrich B, Jger H U 2007 Diamond. Relat. Mater. 16 1771
[18] Zhan Y J, Dong G N, Mao J H, Xie Y B 2007 Chinese. Sci. Bull. 52 2813 (in Chinese) [张宇军、董光能、毛军红、谢友柏 2007 科学通报 52 2813] 〖19] Neyts E, Bogaerts A, van de Sanden M C M 2007 J. Phys. Conf. Series 86 012020
[19] Kai H, Li Y C, Guo D C, Li S, Li Z J 2009 Acta Phys. Sin. 58 4888 (in Chinese) [开 花、李运超、郭德成、李 双、李之杰 2009 物理学报 58 4888]
[20] Li J, Zhang K W, Meng L J, Liu W L, Zhong J X 2008 Acta Phys. Sin. 57 382 (in Chinese) [李 俊、张凯旺、孟利军、刘文亮、钟建新 2008 物理学报 57 382]
[21] Tang C, Ji L, Meng L J, Sun L Z, Zhang K W, Zhong J X 2009 Acta Phys. Sin. 58 7815 (in Chinese) [唐 超、吉 璐、孟利军、孙立忠、张凯旺、钟建新 2009 物理学报 58 7815]
[22] Brenner D W, Shenderova O A, Harrison J A, Stuart S J, Ni B, Sinnott S B 2002 J. Phys. Condens. Mat. 14 783
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