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A TiN coating with (111) and (222) preferred orientations was deposited on a Si(111) substrate by using reactive magnetron sputtering a Ti target. The deformation mechanism and fracture behavior of the coating are determined by nanoindentation and nanocratch experiments. The morphologies of the indentations and nanoscratch marks are revealed by scanning electron microscopy, in situ atomic force microscopy and optical microscopy. Local cracks of TiN appear around the indentation marks when the peak indentation displacement is below the critical value of 1000 nm. As the peak displacement exceeds 1000 nm, an interfacial fracture between the TiN coating and the Si(111) substrate is observed. Nonoscratch tests show that interfacial fractures are also induced by nanoscratch experiments under peak loads of 100 and 200 mN. The critical loads for interfacial fractures under 100 and 200 mN peak loads are equal to those under nanoindentation tests.
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Keywords:
- TiN coating /
- nanoindentation /
- nonoscratch /
- interfacial fracture
[1] Koehler J S 1970 Phys. Rev. B 2 547
[2] Veprek S, Niederhofer A, Moto K, Bolom T, Mannling H D, Nesladek P, Dollinger G, Bergmaier A 2000 Surf. Coat. Technol. 133-134 152
[3] Yu L H, Dong S R, Xu J H, Li G Y 2008 Acta Phy. Sin. 57 7063 (in Chinese) [喻利花, 董师润, 许俊华, 李戈扬 2008 物理学报 57 7063]
[4] Kong M, Wei L, Dong Y S, Li G Y 2006 Acta Phy. Sin. 55 0770 (in Chinese) [孔明, 魏仑, 董云杉, 李戈扬 2006 物理学报 55 0770]
[5] An T, Wen M, Wang L L, Hu C Q, Tian H W, Zheng W T 2009 J. Alloy Compd. 486 515
[6] Anderson P M, Foeckw T, Hazzledine P M 1999 MRS Bull. 24 27
[7] Li G Y, Han Z H, Tian J W, Xu J H, Gu M Y 2002 J. Vac. Sci. Technol. A 20 674
[8] Chu X, Barnett S A, Wong M S, Sproul W D 1993 Surf. Coat. Technol. 57 13
[9] Zhou Y M, Asaki R, Soe W H, Yamamoto R, Chen R, Iwabuchi A 1999 Wear 236 159
[10] Tavares C J, Rebouta L, Andritschky M, and Ramos S 1999 J. Mater. Process. Technol. 93 177
[11] Chu X, Wong M S, Sproul W D, and Barnett S A 1999 J. Mater. Res. 14 2500
[12] Veprek S, Niederhofer A, Moto K, Bolom T, Männling H D, Nesladek P, Dollinger G, Bergmaier A 2000 Surf. Coat. Technol. 133-134 152
[13] An T, Wang L L, Tian H W, Wen M, Zheng W T 2011 Appl. Surf. Sci. 257 7475
[14] An T, Wen M, Hu C Q, Tian H W, Zheng W T 2008 Mater. Sci Eng. A 494 324
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[1] Koehler J S 1970 Phys. Rev. B 2 547
[2] Veprek S, Niederhofer A, Moto K, Bolom T, Mannling H D, Nesladek P, Dollinger G, Bergmaier A 2000 Surf. Coat. Technol. 133-134 152
[3] Yu L H, Dong S R, Xu J H, Li G Y 2008 Acta Phy. Sin. 57 7063 (in Chinese) [喻利花, 董师润, 许俊华, 李戈扬 2008 物理学报 57 7063]
[4] Kong M, Wei L, Dong Y S, Li G Y 2006 Acta Phy. Sin. 55 0770 (in Chinese) [孔明, 魏仑, 董云杉, 李戈扬 2006 物理学报 55 0770]
[5] An T, Wen M, Wang L L, Hu C Q, Tian H W, Zheng W T 2009 J. Alloy Compd. 486 515
[6] Anderson P M, Foeckw T, Hazzledine P M 1999 MRS Bull. 24 27
[7] Li G Y, Han Z H, Tian J W, Xu J H, Gu M Y 2002 J. Vac. Sci. Technol. A 20 674
[8] Chu X, Barnett S A, Wong M S, Sproul W D 1993 Surf. Coat. Technol. 57 13
[9] Zhou Y M, Asaki R, Soe W H, Yamamoto R, Chen R, Iwabuchi A 1999 Wear 236 159
[10] Tavares C J, Rebouta L, Andritschky M, and Ramos S 1999 J. Mater. Process. Technol. 93 177
[11] Chu X, Wong M S, Sproul W D, and Barnett S A 1999 J. Mater. Res. 14 2500
[12] Veprek S, Niederhofer A, Moto K, Bolom T, Männling H D, Nesladek P, Dollinger G, Bergmaier A 2000 Surf. Coat. Technol. 133-134 152
[13] An T, Wang L L, Tian H W, Wen M, Zheng W T 2011 Appl. Surf. Sci. 257 7475
[14] An T, Wen M, Hu C Q, Tian H W, Zheng W T 2008 Mater. Sci Eng. A 494 324
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