Effect of copper precipitation on the formation of denuded zone in Czchralski silicon

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Wang Yong-Zhi, Xu Jin, Wang Na-Ting, Ji Chuan, Zhang Guang-Chao. Effect of copper precipitation on the formation of denuded zone in Czchralski silicon. Acta Physica Sinica, 2012, 61(1): 016105. DOI: 10.7498/aps.61.016105

Citation:

Wang Yong-Zhi, Xu Jin, Wang Na-Ting, Ji Chuan, Zhang Guang-Chao. Effect of copper precipitation on the formation of denuded zone in Czchralski silicon. Acta Physica Sinica, 2012, 61(1): 016105. DOI: 10.7498/aps.61.016105

Wang Yong-Zhi, Xu Jin, Wang Na-Ting, Ji Chuan, Zhang Guang-Chao. Effect of copper precipitation on the formation of denuded zone in Czchralski silicon. Acta Physica Sinica, 2012, 61(1): 016105. DOI: 10.7498/aps.61.016105

Citation:

Wang Yong-Zhi, Xu Jin, Wang Na-Ting, Ji Chuan, Zhang Guang-Chao. Effect of copper precipitation on the formation of denuded zone in Czchralski silicon. Acta Physica Sinica, 2012, 61(1): 016105. DOI: 10.7498/aps.61.016105

Effect of copper precipitation on the formation of denuded zone in Czchralski silicon

Acta Phys. Sin., 2012, 61(1): 016105.

DOI: 10.7498/aps.61.016105

CSTR: 32037.14.aps.61.016105

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