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本文利用红外显微镜和化学浸蚀的方法,研究了硅单晶中铜沉淀物的几何形态。实验表明,用红外显微镜观察到的各种形态的沉淀物是由110面上的片状沉淀组成的,样品的性质对它的形态没有影响。In this article, infra-red microscopy and etching method were used to study the morphology of the copper precipitates in silicon crystals. It was found that a variety of copper precipitates observed by ir microscopy consists of precipitated disks laying in 110 planes and their morphology bears no relation to the properties of the sample.







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