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Measurements of residual stress in beryllium thin film under standard Bragg-Brentano geometry are always problematic. In this article, a new experimental method using grazing- incidence X-ray diffraction is presented according to the convential sin2Ψ method, which effectively increases the signal-to-noise ratio. Analysis shows that the assumption (isotropic material) is logical, because the values of stress results from the three families of planes are camparable. The stress gradient can be measured at diffrenent grazing incidence angles. The results indicate the uniformity of the residual stress of the thin film along various Φ directions.
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Keywords:
- beryllium films /
- X-ray diffraction /
- residual stress
[1] Montgomery D S, Nobile A, Walsh P J 2004 Rev. Sci. Instrum. 75 3986
[2] Davydov D A, Kholopova O V, Kolbasov B N 2007 J. Nucl. Mater. 367 1079
[3] Swift D C, Tierney T E, Luo S N 2005 Phys. Plasmas 12 056308
[4] Kádas K, Vitos L, Johansson B 2007 Phys. Rev. B 75 035132
[5] Di Y X, Ji X H, Hu M, Qin Y W, Chen J L 2006 Acta Phys. Sin. 43 5451 (in Chinese) [邸玉贤, 计欣华, 胡明, 秦玉文, 陈金龙 2006物理学报 43 5451]
[6] Xu K W, Gao R S, Yu L G, He J W 1994 Acta Phys. Sin. 43 1295 (in Chinese) [徐可为, 高润生, 于莉根, 何家文 1994物理学报 43 1295]
[7] Freund L B, Suresh S 2007 Thin Film Materials: Stress, Defect, Formation, and Surface Evolution (Beijing: Science Press) pp145, 264 (in Chinese) [Freund L B, Suresh S 2007薄膜材料–-应力、缺陷的形成和表面演化 (北京: 科学出版社)第145, 264页]
[8] Doerner M F, Nix W D 1988 CRC Crit. Rev. Solid. State. Mater. Sci. 14 225
[9] Kong D J, Zhang Y K, Chen Z G, Lu J Z, Feng A X, Ren X D, Ge T 2007 Acta Phys. Sin. 56 4056 (in Chinese) [孔德军, 张永康, 陈志刚, 鲁金忠, 冯爱新, 任旭东, 葛涛 2007物理学报 56 4056]
[10] Conchon F, Renault P O, Bourhis E L, Krauss C, Goudeau P, Barthel E, Grachev S Y, Soudergard E, Rondeau V, Gy R, Lazzari R, Jupille J, Brun N 2010 Thin Solid Film 519 1563
[11] Birkholz M 2006 Thin Film Analysis by X-ray Scattering (Weinheim: WILEY-VCH Verlag GmbH & Co.KgaA) pp253, 276
[12] Peng J, Ji V, Seiler W, Tomescu A, Levesque A, Bouteville A 2006 Surf. Coat. Technol. 200 2738
[13] Ma C H, Huang J H, Chen H 2002 Thin Solid Film 418 73
[14] Bruker 2009 Diffrac Leptos 7 User Manual (Karlsruhe: Bruker AXS Gmbh) pp66-77
[15] Sun B, Kang C Y, Li R P, Liu Z L, Tang J, Xu P S, Pan G Q 2009 Nuclear Techniq. 32 492 (in Chinese) [孙柏, 康朝阳, 李锐鹏, 刘忠良, 唐军, 徐彭寿, 潘国强 2009 核技术 32 492]
[16] Dong P, Chen Y Z, Bai C M 2004 Rare Metal Materials and Engineering 33 445 (in Chinese) [董平, 陈勇忠, 柏朝茂 2004 稀有金属材料与工程 33 445]
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[1] Montgomery D S, Nobile A, Walsh P J 2004 Rev. Sci. Instrum. 75 3986
[2] Davydov D A, Kholopova O V, Kolbasov B N 2007 J. Nucl. Mater. 367 1079
[3] Swift D C, Tierney T E, Luo S N 2005 Phys. Plasmas 12 056308
[4] Kádas K, Vitos L, Johansson B 2007 Phys. Rev. B 75 035132
[5] Di Y X, Ji X H, Hu M, Qin Y W, Chen J L 2006 Acta Phys. Sin. 43 5451 (in Chinese) [邸玉贤, 计欣华, 胡明, 秦玉文, 陈金龙 2006物理学报 43 5451]
[6] Xu K W, Gao R S, Yu L G, He J W 1994 Acta Phys. Sin. 43 1295 (in Chinese) [徐可为, 高润生, 于莉根, 何家文 1994物理学报 43 1295]
[7] Freund L B, Suresh S 2007 Thin Film Materials: Stress, Defect, Formation, and Surface Evolution (Beijing: Science Press) pp145, 264 (in Chinese) [Freund L B, Suresh S 2007薄膜材料–-应力、缺陷的形成和表面演化 (北京: 科学出版社)第145, 264页]
[8] Doerner M F, Nix W D 1988 CRC Crit. Rev. Solid. State. Mater. Sci. 14 225
[9] Kong D J, Zhang Y K, Chen Z G, Lu J Z, Feng A X, Ren X D, Ge T 2007 Acta Phys. Sin. 56 4056 (in Chinese) [孔德军, 张永康, 陈志刚, 鲁金忠, 冯爱新, 任旭东, 葛涛 2007物理学报 56 4056]
[10] Conchon F, Renault P O, Bourhis E L, Krauss C, Goudeau P, Barthel E, Grachev S Y, Soudergard E, Rondeau V, Gy R, Lazzari R, Jupille J, Brun N 2010 Thin Solid Film 519 1563
[11] Birkholz M 2006 Thin Film Analysis by X-ray Scattering (Weinheim: WILEY-VCH Verlag GmbH & Co.KgaA) pp253, 276
[12] Peng J, Ji V, Seiler W, Tomescu A, Levesque A, Bouteville A 2006 Surf. Coat. Technol. 200 2738
[13] Ma C H, Huang J H, Chen H 2002 Thin Solid Film 418 73
[14] Bruker 2009 Diffrac Leptos 7 User Manual (Karlsruhe: Bruker AXS Gmbh) pp66-77
[15] Sun B, Kang C Y, Li R P, Liu Z L, Tang J, Xu P S, Pan G Q 2009 Nuclear Techniq. 32 492 (in Chinese) [孙柏, 康朝阳, 李锐鹏, 刘忠良, 唐军, 徐彭寿, 潘国强 2009 核技术 32 492]
[16] Dong P, Chen Y Z, Bai C M 2004 Rare Metal Materials and Engineering 33 445 (in Chinese) [董平, 陈勇忠, 柏朝茂 2004 稀有金属材料与工程 33 445]
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