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Thickness measurement of GaN films by X-ray diffraction

Li Hong-Tao Luo Yi Xi Guang-Yi Wang Lai Jiang Yang Zhao Wei Han Yan-Jun Hao Zhi-Biao Sun Chang-Zheng

Citation:

Thickness measurement of GaN films by X-ray diffraction

Li Hong-Tao, Luo Yi, Xi Guang-Yi, Wang Lai, Jiang Yang, Zhao Wei, Han Yan-Jun, Hao Zhi-Biao, Sun Chang-Zheng
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  • Abstract views:  9823
  • PDF Downloads:  1264
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Publishing process
  • Received Date:  20 January 2008
  • Accepted Date:  27 May 2008
  • Published Online:  20 November 2008

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