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Preparation and characterization of hydrogenated microcrystalline silicon films by HW-MWECR-CVD

Liu Guo-Han Ding Yi Zhu Xiu-Hong Chen Guang-Hua He De-Yan

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Preparation and characterization of hydrogenated microcrystalline silicon films by HW-MWECR-CVD

Liu Guo-Han, Ding Yi, Zhu Xiu-Hong, Chen Guang-Hua, He De-Yan
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  • Abstract views:  9575
  • PDF Downloads:  1260
  • Cited By: 0
Publishing process
  • Received Date:  02 November 2005
  • Accepted Date:  02 April 2006
  • Published Online:  20 November 2006

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