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The influence of deposition temperature on the structure of microcrystalline silicon film

Chen Yong-Sheng Gao Xiao-Yong Yang Shi-E Lu Jing-Xiao Gu Jin-Hua

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The influence of deposition temperature on the structure of microcrystalline silicon film

Chen Yong-Sheng, Gao Xiao-Yong, Yang Shi-E, Lu Jing-Xiao, Gu Jin-Hua
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  • Abstract views:  8345
  • PDF Downloads:  1051
  • Cited By: 0
Publishing process
  • Received Date:  11 September 2006
  • Accepted Date:  08 December 2006
  • Published Online:  20 July 2007

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