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采用复合靶共溅射方法制备了(Au,Ag)/Si复合纳米颗粒薄膜,分别采用Maxwell-Garnett理论和微分有效媒质(DEM)理论计算了Ag/Si复合薄膜的吸收光谱,实验测量结果与DEM理论计算更接近,讨论了(Au,Ag)/Si体系复合薄膜共振吸收峰宽化的微观机制.(Ag,Au)/Si nanocomposite films were deposited using the rf co-sputtering method. The absorption coefficient of Ag/Si nanocomposite film was calculated based on the Maxwell-Garnett theory and differential effective medium(DEM) theory;the experimental results of spectra agreed with the DEM theory.And the possible microstructure and the reason why the plasma resonance absorption peaks were broadened have been discussed.
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