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本文应用X射线双晶衍射研究AlGaAs/GaAs波导结构薄膜。结合实验结果,应用X射线衍射动力学理论。计算衬底和多层膜的反射强度,得到样品的真实结构。分析影响薄膜双晶衍射摇摆曲线的若干因素。An AlGaAs/GaAs waveguide structure sample was investigated by X-ray double crystal diffraction technique. Based on the X-ray dynamical diffraction theory the reflection intensities of the substrate and the films were calculated. Comparing the calculated results with the experimental ones, the real structure of the sample was obtained. The factors affecting the double crystal diffraction recking curves are discussed.
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