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调幅W(Mo)/Cu纳米多层膜He+离子辐照响应行为

植超虎 刘波 任丁 杨斌 林黎蔚

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调幅W(Mo)/Cu纳米多层膜He+离子辐照响应行为

植超虎, 刘波, 任丁, 杨斌, 林黎蔚

Microstructure evolution of W(Mo)/Cu nanometer multilayer films under He+ ion irradiation

Zhi Chao-Hu, Liu Bo, Ren Ding, Yang Bin, Lin Li-Wei
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  • 用磁控溅射技术制备不同调幅波长 (L) 的W(Mo)/Cu纳米多层膜,所制膜系在60 keV氦离子 (He+) 辐照条件下注入不同剂量: 0, 11017 He+/cm2, 51017 He+/cm2. 用X射线衍射仪 (XRD) 和高分辨透射电子显微镜(TEM)表征W(Mo)/Cu纳米多层膜辐照前后微观结构. 研究结果表明: 1) He+离子轰击引起温升效应是导致沉积态亚稳相-W 转变成稳态 -W相的主因, 而与调幅波长无明确关联; 2) 纳米多层结构中W(Mo) 和Cu膜显现出的辐照耐受性与调幅波长相关, 调幅波长越小, 抗He+的辐照性能越强; 3) 在51017 He+/cm2注入条件下, 观察到He团簇/泡在纳米结构W(Mo) 和Cu膜中的积聚行为存在明显差异: 在W (Mo) 膜中He团簇/泡的分布与晶粒取向相关, He团簇/泡倾向于沿W (211) 晶面分布; 而Cu膜非晶化且He团簇/泡在其体内呈均匀分布.
    W(Mo, 9.8 at.%)/Cu nanometer multilayer films of different individual layer thickness were prepared by RF magnetron sputtering, which were irradiated by 60 keV He+ ions at ion fluence from 0 to 51017 He+/cm2. Microstructures of nanometer multilayer W(Mo)/Cu films were investigated by high-resolution transmission electron microscope (HRTEM) and X-ray diffraction (XRD) before and after irradiation. Experimental results indicate that: (1) The phase transformation of -W (A-15) into steady state -W can be attributed to the bombardment effect of energetic He ions on the surface of films, leading to phase-transition temperature during irradiation. (2) The irradiation tolerance of W(Mo)/Cu multilayer film was found to depend on the individual layer thickness. (3) At the fluence of 51017 He+/cm2, the HRTEM results reveal that the behavior of helium cluster/bubble in the W(Mo) film is obviously different from that in the Cu film. It is interesting that the distribution of helium cluster/bubble is related to the grain orientation of W(Mo) film and tends to distribute along W (211) plane. However, Cu film is completely amorphized and helium cluster/bubble is evenly distributed in it.
    • 基金项目: 科技部国际热核聚变实验堆(ITER)计划专项;偏滤器关键技术研究(批准号: 2011GB110005);国家自然科学基金 (批准号: 11075112, 11005076)和教育部博士重点基金(批准号: 20100181120112)资助的课题.
    • Funds: Project supported by the Special Program for Key Basic Research of the Ministry of Science and Technology, China (Grant No. 2011GB110005), the National Natural Science Foundation of China (Grant Nos. 11075112, 11005076), and the Specialized Research Fund for the Doctoral Program of Higher Education of China (new teachers, No. 20100181120112).
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    Wu J H, Zhang F, Xu Z Y, Yan J C 2003 Nuclear Science and Engineering 23 132 (in Chinese) [吴继红, 张斧, 许增裕, 严建成 2003 核科学与工程 23 132]

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    Kilmametov A R, Gunderov D V, Valiev R Z, Baloghc A G, Hahn H 2008 Scr. Mater. 59 1027

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    Li N, Fu E G, Wang H, Carter J J, Shao L, Maloy S A, Misra A, Zhang X 2009 J. Nuclear Materials. 389 233

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    Gao Y, Yang T F, Xue J M, Yan S, Zhou S Q, Wang Y G, Chu P K, Zhang Y W 2011 J. Nuclear Materials. 413 11

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    Li N, Yu K Y, Lee J, Wang H, Zhang X 2010 Appl. Phys. 107 093503

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    Haseeb A S M A, Albers U, Bade K 2008 Science. Direct. 264 106

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    Hchbauer T, Misra A, Hattar K, Hoagland R G 2005 J. Appl. Phys. 98 123516

    [11]

    Wang Y C, Misra A, Hoagland R G 2006 Scr. Mater. 54 1593

    [12]

    Shen T D, Feng S H, Tang M, Valdez J A, Wang Y Q 2007 Appl. Phys. Lett. 90 263115

    [13]

    Samaras M, Derlet P M, Van Swygenhoven H, Victoria M 2002 Phys. Rev. Lett. 88 125505

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    Demkowicz M J, Hoagland R G, Hirth J P 2008 Phys. Rev. Lett. 100 136102

    [15]

    Tang L L, Kuang Y G, Chen F X, Zhang B H, Gan L 2011 Powder Metallurgy Industry. 21 6 (in Chinese) [唐亮亮, 邝用庚, 陈飞雄, 张保红, 甘乐 2011 粉末冶金工业 21 6]

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    O’Keefe M J, Grant J T, Solomon J S 1995 J. Appl. Phys. 79 12

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    Petroff P, Sheng T T, Sinha A K, Rozgonyi A K, Alexander G A 1973 J. Appl. Phys. 44 6

    [19]

    Wen Y N 2007 M.B.A. Dissertation (Xi’an: Shaanxi Normal University) (in Chinese) [文艳妮 2007 硕士学位论文 (西安: 陕西师范大学)]

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    Masato Yamagiwa, Shin Kajita, Noriyasu Ohno, Makoto Takagi, Naoaki Yoshida, Reiko Yoshihara, Wataru Sakaguchi, Hiroaki Kurishita 2011 Nuclear. Materials. 417 499

  • [1]

    Guo S Q, Feng Y B, Yan Q Z, Li J 2010 Welding Technology 39 9 (in Chinese) [郭双全, 冯云彪, 燕青芝, 黎健 2010 焊接技术 39 9]

    [2]

    Wu J H, Zhang F, Xu Z Y, Yan J C 2003 Nuclear Science and Engineering 23 132 (in Chinese) [吴继红, 张斧, 许增裕, 严建成 2003 核科学与工程 23 132]

    [3]

    Hao J K 2007 Fusion reactor materials (Vol.1) (Beijing: Chemical Industry Press) p15 (in Chinese) [郝嘉琨 2007 聚变堆材料 (1版) (北京: 化学工业出版社) 第15页]

    [4]

    Rose M, Balogh A G, Hahn H 1997 Nucl. Instr. Methods B 127-128 119

    [5]

    Kilmametov A R, Gunderov D V, Valiev R Z, Baloghc A G, Hahn H 2008 Scr. Mater. 59 1027

    [6]

    Li N, Fu E G, Wang H, Carter J J, Shao L, Maloy S A, Misra A, Zhang X 2009 J. Nuclear Materials. 389 233

    [7]

    Gao Y, Yang T F, Xue J M, Yan S, Zhou S Q, Wang Y G, Chu P K, Zhang Y W 2011 J. Nuclear Materials. 413 11

    [8]

    Li N, Yu K Y, Lee J, Wang H, Zhang X 2010 Appl. Phys. 107 093503

    [9]

    Haseeb A S M A, Albers U, Bade K 2008 Science. Direct. 264 106

    [10]

    Hchbauer T, Misra A, Hattar K, Hoagland R G 2005 J. Appl. Phys. 98 123516

    [11]

    Wang Y C, Misra A, Hoagland R G 2006 Scr. Mater. 54 1593

    [12]

    Shen T D, Feng S H, Tang M, Valdez J A, Wang Y Q 2007 Appl. Phys. Lett. 90 263115

    [13]

    Samaras M, Derlet P M, Van Swygenhoven H, Victoria M 2002 Phys. Rev. Lett. 88 125505

    [14]

    Demkowicz M J, Hoagland R G, Hirth J P 2008 Phys. Rev. Lett. 100 136102

    [15]

    Tang L L, Kuang Y G, Chen F X, Zhang B H, Gan L 2011 Powder Metallurgy Industry. 21 6 (in Chinese) [唐亮亮, 邝用庚, 陈飞雄, 张保红, 甘乐 2011 粉末冶金工业 21 6]

    [16]

    Liu M X, Hu Y F, Ma F, Xu K W 2008 Acta Metallurgica.Sinica. 44 631 (in Chinese) [刘明霞, 胡永峰, 马飞, 徐可为 2008 金属学报 44 631]

    [17]

    O’Keefe M J, Grant J T, Solomon J S 1995 J. Appl. Phys. 79 12

    [18]

    Petroff P, Sheng T T, Sinha A K, Rozgonyi A K, Alexander G A 1973 J. Appl. Phys. 44 6

    [19]

    Wen Y N 2007 M.B.A. Dissertation (Xi’an: Shaanxi Normal University) (in Chinese) [文艳妮 2007 硕士学位论文 (西安: 陕西师范大学)]

    [20]

    Masato Yamagiwa, Shin Kajita, Noriyasu Ohno, Makoto Takagi, Naoaki Yoshida, Reiko Yoshihara, Wataru Sakaguchi, Hiroaki Kurishita 2011 Nuclear. Materials. 417 499

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出版历程
  • 收稿日期:  2013-02-01
  • 修回日期:  2013-04-24
  • 刊出日期:  2013-08-05

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