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TIME RESOLVED REFLECTIVITY MEASUREMENTS OF SOLID PHASE EPITAXY IN P2+ AND P+ IMPLANTED SILICON

FANG ZI-WEI LIN CHENG-LU YANG GEN-QING LI XIAO-QIN ZOU SHI-CHAN R. G. ELLIMAN

Citation:

TIME RESOLVED REFLECTIVITY MEASUREMENTS OF SOLID PHASE EPITAXY IN P2+ AND P+ IMPLANTED SILICON

FANG ZI-WEI, LIN CHENG-LU, YANG GEN-QING, LI XIAO-QIN, ZOU SHI-CHAN, R. G. ELLIMAN
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(PLEASE TRANSLATE TO ENGLISH

BY GOOGLE TRANSLATE IF NEEDED.)

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Publishing process
  • Received Date:  02 September 1989
  • Published Online:  17 June 2005

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