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EFFECTS OF SELF-ION IRRADIATION ON SECONDARY DEFECTS IN MeV P+-IMPLANTED Si

TIAN REN-HE ZHANG XIAO-JI WU YU-GUANG ZHANG HUI-XING

Citation:

EFFECTS OF SELF-ION IRRADIATION ON SECONDARY DEFECTS IN MeV P+-IMPLANTED Si

TIAN REN-HE, ZHANG XIAO-JI, WU YU-GUANG, ZHANG HUI-XING
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  • Abstract views:  7812
  • PDF Downloads:  572
  • Cited By: 0
Publishing process
  • Received Date:  22 September 1997
  • Accepted Date:  04 December 1997
  • Published Online:  05 March 1998

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