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A STUDY ON THE PHYSICAL PROCESS OF INDIUM IMPLANTATION BY PULSE LASER AND THE DEFECT PROPERTIES IN n TYPE SILICON

LIU KAI-FENG CAI JING SUN HENG-HUI RUN YUN-ZHU CAO YONG-MING

Citation:

A STUDY ON THE PHYSICAL PROCESS OF INDIUM IMPLANTATION BY PULSE LASER AND THE DEFECT PROPERTIES IN n TYPE SILICON

LIU KAI-FENG, CAI JING, SUN HENG-HUI, RUN YUN-ZHU, CAO YONG-MING
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Publishing process
  • Received Date:  04 September 1989
  • Published Online:  17 June 2005

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