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用脉冲激光淀积方法在SrTiO3衬底上制备了BaTiO3/YBa2Cu3O7-δ（铁电/超导）双层膜，X射线分析表明BaTiO3薄膜是高度c取向的．对BaTiO3薄膜的介电和铁电性能进行了实验研究．观察到铁电薄膜特有的电滞线和蝶型C-V曲线，薄膜呈现出较好的铁电性，在铁电随机存储等领域有重要的应用前景BaTiO3/YBa2Cu3O7-δ bilayer structures have been synthesized on SrTiO3 substrates using the pulsed laser deposition technique. The X-ray analyses show that the BaTiO3 films are highly c-axis oriented. In the studies of dielectric and ferroelectric properties of the BaTiO3 films, typical hysteresis loops and butterfly C-V plots are observed. The results indicate that the BaTiO3 films are promising in FRAM and related application fields.
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