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A STUDY ON REACTION KINETICS OF THE RADICALS PRODUCED IN THE LASER-INDUCED SILANE PLASMA

FU GUANG-SHENG WANG JIN-GUO LI XIAO-WEI HAN LI Lü FU-RUN

Citation:

A STUDY ON REACTION KINETICS OF THE RADICALS PRODUCED IN THE LASER-INDUCED SILANE PLASMA

FU GUANG-SHENG, WANG JIN-GUO, LI XIAO-WEI, HAN LI, Lü FU-RUN
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  • Abstract views:  7424
  • PDF Downloads:  619
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Publishing process
  • Received Date:  25 December 1990
  • Published Online:  05 June 1991

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