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Tian Jing, Yang Xing, Liu Shang-Jun, Lian Xiao-Juan, Chen Jin-Wei, Wang Rui-Lin. Effect of thickness on the properties of Cu(Inx,Ga1-x)Se2 back conduct Mo thin films prepared by DC sputtering. Acta Physica Sinica,
2013, 62(11): 116801.
doi: 10.7498/aps.62.116801
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Liu Yun-Chuan, Zhou Yan-Ping, Wang Xue-Rong, Meng Xiang-Yan, Duan Jian, Zheng Hui-Bao. Accurate Rutherford backscattering spectrocsopy measurement of aluminium composition in AlxGa1-xN crystal film. Acta Physica Sinica,
2013, 62(16): 162901.
doi: 10.7498/aps.62.162901
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Chen Chao, Ji Yong, Gao Xiao-Yong, Zhao Meng-Ke, Ma Jiao-Min, Zhang Zeng-Yuan, Lu Jing-Xiao. Study on the deposition of aluminum-doped zinc oxide films using direct-current pulse magnetron reactive sputtering technique. Acta Physica Sinica,
2012, 61(3): 036104.
doi: 10.7498/aps.61.036104
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Wang Yong-Jun, Li Hong-Xuan, Ji Li, Liu Xiao-Hong, Wu Yan-Xia, Zhou Hui-Di, Chen Jian-Min. Preparation and properties of graphite-like carbon films fabricated by unbalanced magnetron sputtering. Acta Physica Sinica,
2012, 61(5): 056103.
doi: 10.7498/aps.61.056103
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Chen Xiao-Xue, Yao Ruo-He. DC characteristic research based on surface potential for a-Si:H thin-film transistor. Acta Physica Sinica,
2012, 61(23): 237104.
doi: 10.7498/aps.61.237104
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Cao Yue-Hua, Di Guo-Qing. Analysis of Y2O3 doped TiO2 films topography prepared by radio frequency magnetron sputtering. Acta Physica Sinica,
2011, 60(3): 037702.
doi: 10.7498/aps.60.037702
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Mu Zong-Xin, Mu Xiao-Dong, Wang Chun, Jia Li, Dong Chuang. Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current. Acta Physica Sinica,
2011, 60(1): 015204.
doi: 10.7498/aps.60.015204
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Wang Pei-Jun, Jiang Mei-Fu, Du Ji-Long, Dai Yong-Feng. Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputtering. Acta Physica Sinica,
2010, 59(12): 8920-8926.
doi: 10.7498/aps.59.8920
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Jia Lu, Xie Er-Qing, Pan Xiao-Jun, Zhang Zhen-Xing. Optical properties of amorphous GaN films deposited by sputtering. Acta Physica Sinica,
2009, 58(5): 3377-3382.
doi: 10.7498/aps.58.3377
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Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputtering. Acta Physica Sinica,
2009, 58(6): 4109-4116.
doi: 10.7498/aps.58.4109
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Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng. Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering. Acta Physica Sinica,
2008, 57(3): 1796-1801.
doi: 10.7498/aps.57.1796
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Wang Huan, Yao Shu-De, Pan Yao-Bo, Zhang Guo-Yi. Strain in AlInGaN thin films caused by different contents of Al and In studied by Rutherford backscattering/channeling and high resolution X-ray diffraction. Acta Physica Sinica,
2007, 56(6): 3350-3354.
doi: 10.7498/aps.56.3350
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Cai Yan-Qing, Yao Xin, Li Gang. Study on the superheating phenomenon of YBCO thin film. Acta Physica Sinica,
2006, 55(2): 844-848.
doi: 10.7498/aps.55.844
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Li Yong, Sun Cheng-Wei, Liu Zhi-Wen, Zhang Qing-Yu. Study of ZnO film growth by reactive magnetron sputtering using plasma emission spectra. Acta Physica Sinica,
2006, 55(8): 4232-4237.
doi: 10.7498/aps.55.4232
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Liu Zhi-Wen, Gu Jian-Feng, Sun Cheng-Wei, Zhang Qing-Yu. Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputtering. Acta Physica Sinica,
2006, 55(4): 1965-1973.
doi: 10.7498/aps.55.1965
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Wang Kun, Yao Shu-De, Hou Li-Na, Ding Zhi-Bo, Yuan Hong-Tao, Du Xiao-Long, Xue Qi-Kun. Depth-dependent elastic strain in ZnO/Zn0.9Mg0.1O/ZnO heterostructure studied by Rutherford backscattering/channeling. Acta Physica Sinica,
2006, 55(6): 2892-2896.
doi: 10.7498/aps.55.2892
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2005, 54(10): 4944-4948.
doi: 10.7498/aps.54.4944
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1994, 43(2): 340-344.
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1994, 43(10): 1569-1575.
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JI HANG, ZHAO TE-XIU, WANG XIAO-PING, DONG YI. AN IN-SITU STUDY OF ELECTRICAL RESISTIVITY OF MAGNETRON SPUTTERING Mo FILM. Acta Physica Sinica,
1993, 42(8): 1340-1345.
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