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Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering

Yang Wu-Bao Fan Song-Hua Zhang Gu-Ling Ma Pei-Ning Zhang Shou-Zhong Du Jian

Citation:

Investigation of diamond-like-carbon films prepared by unbalanced magnetron sputtering

Yang Wu-Bao, Fan Song-Hua, Zhang Gu-Ling, Ma Pei-Ning, Zhang Shou-Zhong, Du Jian
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  • Abstract views:  9524
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Publishing process
  • Received Date:  22 October 2004
  • Accepted Date:  10 December 2004
  • Published Online:  05 May 2005

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