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Effect of grid and bias on the characteristic of CHF3 electron cyclot ron resonance discharge plasma

Ye Chao Du Wei Ning Zhao-Yuan Cheng Shan-Hua

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Effect of grid and bias on the characteristic of CHF3 electron cyclot ron resonance discharge plasma

Ye Chao, Du Wei, Ning Zhao-Yuan, Cheng Shan-Hua
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  • Abstract views:  7626
  • PDF Downloads:  599
  • Cited By: 0
Publishing process
  • Received Date:  16 September 2002
  • Accepted Date:  08 November 2002
  • Published Online:  20 July 2003

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