| [1] |
Yan Shao-Qi, Gao Ji-Kun, Chen Yue, Ma Yao, Zhu Xiao-Dong. Low-density plasmas generated by electron beams passing through silicon nitride window. Acta Physica Sinica,
2024, 73(14): 144102.
doi: 10.7498/aps.73.20240302
|
| [2] |
Tong Lei, Zhao Ming-Liang, Zhang Yu-Ru, Song Yuan-Hong, Wang You-Nian. Hybrid simulation of radio frequency biased inductively coupled Ar/O2/Cl2 plasmas. Acta Physica Sinica,
2024, 73(4): 045201.
doi: 10.7498/aps.73.20231369
|
| [3] |
Song Liu-Qin, Jia Wen-Zhu, Dong Wan, Zhang Yi-Fan, Dai Zhong-Ling, Song Yuan-Hong. Numerical investigation of SiO2 film deposition enhanced by capacitively coupled discharge plasma. Acta Physica Sinica,
2022, 71(17): 170201.
doi: 10.7498/aps.71.20220493
|
| [4] |
Hou Guo-Fu, Xue Jun-Ming, Yuan Yu-Jie, Zhang Xiao-Dan, Sun Jian, Chen Xin-Liang, Geng Xin-Hua, Zhao Ying. Key issues for high-efficiency silicon thin film solar cells prepared by RF-PECVD under high-pressure-depletion conditions. Acta Physica Sinica,
2012, 61(5): 058403.
doi: 10.7498/aps.61.058403
|
| [5] |
Cai Ya-Nan, Cui Can, Shen Hong-Lei, Liang Da-Yu, Li Pei-Gang, Tang Wei-Hua. Effects of thermal treatments on the formation of nanocrystalline Si embedded in Si-rich oxide films. Acta Physica Sinica,
2012, 61(15): 157804.
doi: 10.7498/aps.61.157804
|
| [6] |
Li Yang-Ping, Liu Zheng-Tang. Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film. Acta Physica Sinica,
2009, 58(7): 5022-5028.
doi: 10.7498/aps.58.5022
|
| [7] |
Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng. Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering. Acta Physica Sinica,
2008, 57(3): 1796-1801.
doi: 10.7498/aps.57.1796
|
| [8] |
Zhao Guo-Wei, Wang Zhi-Jiang, Xu Yue-Min, Liang Zhi-Wei, Xu Jie. Numerical simulation of plasma nonlinear phenomena excited by radio-frequency wave using FDTD method. Acta Physica Sinica,
2007, 56(9): 5304-5308.
doi: 10.7498/aps.56.5304
|
| [9] |
Zou Xiu. Structure of radio-frequency flat plasma sheath in an oblique magnetic field. Acta Physica Sinica,
2006, 55(4): 1907-1913.
doi: 10.7498/aps.55.1907
|
| [10] |
Wu Zhen-Yu, Yang Yin-Tang, Wang Jia-You. Study of fluorinated amorphous carbon films prepared by electron cyclotron resonance chemical vapor deposition. Acta Physica Sinica,
2006, 55(5): 2572-2577.
doi: 10.7498/aps.55.2572
|
| [11] |
Hou Lu-Jing, Wang You-Nian. Theoretical study on nonlinear resonances of a charged micro-particle in a RF sheath. Acta Physica Sinica,
2003, 52(2): 434-441.
doi: 10.7498/aps.52.434
|
| [12] |
Ye Chao, Du Wei, Ning Zhao-Yuan, Cheng Shan-Hua. Effect of grid and bias on the characteristic of CHF3 electron cyclot ron resonance discharge plasma. Acta Physica Sinica,
2003, 52(7): 1802-1807.
doi: 10.7498/aps.52.1802
|
| [13] |
Wang Yong-Qian, Chen Wei-De, Chen Chang-Yong, Diao Hong-Wei, Zhang Shi-Ben, Xu Yan-Yue, Kong Guang-Lin, Liao Xian-Bo. . Acta Physica Sinica,
2002, 51(7): 1564-1570.
doi: 10.7498/aps.51.1564
|
| [14] |
Qiu Hua-Tan, Wang You-Nian, Ma Teng-Cai. . Acta Physica Sinica,
2002, 51(6): 1332-1337.
doi: 10.7498/aps.51.1332
|
| [15] |
YE CHAO, NING ZHAO-YUAN, CHENG SHAN-HUA, KANG JIAN. STUDY ON α-C∶F FILMS DEPOSITED BY ELECTRON CYCLOTRONRESONANCE PLASMA CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica,
2001, 50(4): 784-789.
doi: 10.7498/aps.50.784
|
| [16] |
NING ZHAO-YUAN, CHENG SHAN-HUA, YE CHAO. CHEMICAL BONDING STRUCTURE OF FLUORINATED AMORPHOUS CARBON FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica,
2001, 50(3): 566-571.
doi: 10.7498/aps.50.566
|
| [17] |
YE CHAO, NING ZHAO-YUAN, CHENG SHAN-HUA. OPTICAL PROPERTIES OF AMORPHOUS FLUORINATED CARBON FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA. Acta Physica Sinica,
2001, 50(10): 2017-2022.
doi: 10.7498/aps.50.2017
|
| [18] |
LIU HONG-XIANG, WEI HE-LIN, LIU ZU-LI, LIU YAN-HONG, WANG JUN-ZHEN. EFFECT OF THE MAGNETIC MIRROR FIELD ON THE ION ENERGY DISTRIBUTIONS IN A RADIO F REQUENCY PLASMA. Acta Physica Sinica,
2000, 49(9): 1764-1768.
doi: 10.7498/aps.49.1764
|
| [19] |
ZHU WU-BIAO, WANG YOU-NAIN, DENG XIN-LU, MA TENG-CAI. HYDRODYNAMICS SIMULATION OF RF DISCHARGE COURSES WITH NEGATIVE BIAS. Acta Physica Sinica,
1996, 45(7): 1138-1145.
doi: 10.7498/aps.45.1138
|
| [20] |
ZHU WEN-HAO, ZHU NAN-QIANG, CHEN YUE-SHAN. PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMA. Acta Physica Sinica,
1989, 38(2): 236-246.
doi: 10.7498/aps.38.236
|
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