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Diamond-like carbon films deposited on optical glass substrate by using ECR microwave acetone plasma CVD method

Yang Wu-Bao Wang Jiu-Li Zhang Gu-Ling Fan Song-Hua Liu Chi-Zi Yang Si-Ze

Citation:

Diamond-like carbon films deposited on optical glass substrate by using ECR microwave acetone plasma CVD method

Yang Wu-Bao, Wang Jiu-Li, Zhang Gu-Ling, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze
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  • Abstract views:  7695
  • PDF Downloads:  656
  • Cited By: 0
Publishing process
  • Received Date:  15 October 2003
  • Accepted Date:  01 December 2003
  • Published Online:  16 September 2004

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