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Deposition of diamond-like carbon and analysis of ion energy in CH4 or CH4+Ar dielectric barrier discharge plasma

Liu Yan-Hong Zhang Jia-Liang Wang Wei-Guo Li Jian Liu Dong-Ping Ma Teng-Cai

Citation:

Deposition of diamond-like carbon and analysis of ion energy in CH4 or CH4+Ar dielectric barrier discharge plasma

Liu Yan-Hong, Zhang Jia-Liang, Wang Wei-Guo, Li Jian, Liu Dong-Ping, Ma Teng-Cai
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  • Abstract views:  8461
  • PDF Downloads:  1327
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Publishing process
  • Received Date:  02 June 2005
  • Accepted Date:  05 August 2005
  • Published Online:  20 March 2006

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