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Size and morphology control of highly-ordered nano-silicon pillar fabricated by direct nanosphere lithography

Li Wei Xu Ling Sun Ping Zhao Wei-Ming Huang Xin-Fan Xu Jun Chen Kun-Ji

Citation:

Size and morphology control of highly-ordered nano-silicon pillar fabricated by direct nanosphere lithography

Li Wei, Xu Ling, Sun Ping, Zhao Wei-Ming, Huang Xin-Fan, Xu Jun, Chen Kun-Ji
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  • Abstract views:  9161
  • PDF Downloads:  1902
  • Cited By: 0
Publishing process
  • Received Date:  24 October 2006
  • Accepted Date:  12 December 2006
  • Published Online:  20 July 2007

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