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本文首先研究了具有通常柱间距(大于100 nm)的纳米柱阵列在近红外波段的光学特性并实现了通过改变阵列参数(如周期)来调制局域表面等离子体谐振. 随后,通过使用电子束直写和离子束刻蚀的方法制备出具有超小柱间距(小于50 nm)和超高密度(ultrahigh density)的纳米柱阵列并通过对表面等离子体谐振的调制实现了在可见光波段滤出不同颜色的单色光. 本文中所展示的纳米柱功能阵列可以与现有的数字光处理(digital light processing,DLP)技术相兼容进而构造具有超小像素的显示屏,可以在显示、成像等领域取得广泛的应用.In this work, we first investigate the optical properties of nanorod arrays with normal inter-rod spacing (>100 nm) and realize the tuning of nanorod localized surface plasma resonance (LSPR) by changing array parameters (e.g., periodicity). Then we filter our individual colors in the visible range using nanorod arrays with ultrasmall inter-rod spacing and ultrahigh density fabricated by electron beam lithography (EBL) and ion etching. The functional nanorod arrays developed in this work are compatible with current digital light processing technique, enabling screen with ultrasmall pixels which can find extensive applications in display and imaging.
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Keywords:
- nanorod /
- ultrasmall spacing /
- ultrahigh density /
- display
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[1] Wang K, Long H, Fu M, Yang G, Lu P X 2010 Opt. Lett. 35 1560
[2] Si G Y, Zhao Y H, Liu H, Teo S, Zhang M S, Huang T J, Danner A J, Teng J H 2011 Appl. Phys. Lett. 99 033105
[3] Han Q Y, Tang J C, Zhang C, Wang C, Ma H Q, Yu L, Jiao R Z 2012 Acta Phys. Sin. 61 135202 (in Chinese) [韩清瑶, 汤俊超, 张弨, 王川, 马海强, 于丽, 焦荣珍 2012 物理学报 61 135202]
[4] Jeong-Ryeol C 2010 Chin. Phys. B 19 010306
[5] Wu Z Y, Yang Y T, Wang J Y 2010 Acta Phys. Sin. 59 1890 (in Chinese) [吴振宇, 杨银堂, 汪家友 2010 物理学报 59 1890]
[6] Lv J T, Wang F W, Ma Z H, Si G Y 2013 Acta Phys. Sin. 62 057804 (in Chinese) [吕江涛, 王凤文, 马振鹤, 司光远 2013 物理学报 62 057804]
[7] Liu P B, Huang H, Cao T, Liu X Y, Qi Z B, Tang Z N, Zhang J N 2013 Appl. Phys. Lett. 102 163701
[8] Wang Y, Wang X, He X J, Mei J S, Chen M H, Yin J H, Lei Q Q 2012 Acta Phys. Sin. 61 137301 (in Chinese) [王玥, 王暄, 贺训军, 梅金硕, 陈明华, 殷景华, 雷清泉 2012 物理学报 61 137301]
[9] Zhang C L, Wang R, Min C J, Zhu S W, Yuan X C 2013 Appl. Phys. Lett. 102 011114
[10] Swaim J D, Knittel J, Bowen W P 2011 Appl. Phys. Lett. 99 243109
[11] Hong X, Du D D, Qiu Z R, Zhang G X 2007 Acta Phys. Sin. 56 7219 (in Chinese) [洪昕, 杜丹丹, 裘祖荣, 张国雄 2007 物理学报 56 7219]
[12] Zheng X H, Wang Y Q, Zhang Y 2009 Acta Phys. Sin. 58 8751 (in Chinese) [郑显华, 王瑛琪, 张岩 2009 物理学报 58 8751]
[13] Chen H J, Shao L, Li Q, Wang J F 2013 Chem. Soc. Rev. 42 2679
[14] Huang Q, Xiong S Z, Zhao Y, Zhao X D 2012 Acta Phys. Sin. 61 157801 (in Chinese) [黄茜, 熊绍珍, 赵颖, 张晓丹 2012 物理学报 61 157801]
[15] Sajan D, Hubert Joe I, Jayakumar V S 2006 J. Raman Spectrosc. 37 508
[16] Grubisic A, Schweikhard V, Baker T A, Nesbitt D J 2013 Phys. Chem. Chem. Phys. 15 10616
[17] Zhang Z, Liu Q, Qi Z M 2013 Acta Phys. Sin. 62 060703 (in Chinese) [张喆, 柳倩, 祁志美 2013 物理学报 62 060703]
[18] Jiang X X, Gu, Q C, Wang F W, Lv J T, Ma Z H, Si G Y 2013 Mater. Lett. 100 192
[19] Li Z Y, Li J F 2011 Chinese Sci. Bull (Chinese Ver) 56 2631
[20] Si G Y, Zhao Y H, Lv J T, Lu M Q, Wang F W, Liu H L, Xiang N, Huang T J, Danner A J, Teng J H, Liu Y J 2013 Nanoscale 5 6243
[21] Dong T Y, Ye K T, Liu W Q 2012 Acta Phys. Sin. 61 145202 (in Chinese) [董太源, 叶坤涛, 刘维清 2012 物理学报 61 145202]
[22] Song G F, Wang W M, Cai L K, Guo B S, Wang Q, Xu Y, Wei X, Liu Y T 2010 Acta Phys. Sin. 59 5105 (in Chinese) [宋国峰, 汪卫敏, 蔡利康, 郭宝山, 王青, 徐云, 韦欣, 刘运涛 2010 物理学报 59 5105]
[23] Wang Y, Wang X, He X J, Mei J S, Chen M H, Yin J H, Lei Q Q 2012 Acta Phys. Sin. 61 137301 (in Chinese) [王玥, 王暄, 贺训军, 梅金硕, 陈明华, 殷景华, 雷清泉 2012 物理学报 61 137301]
[24] Quidant R, Girard C 2008 Laser & Photon. Rev. 2 47
[25] Davoyan A R, Shadriivov I V, Kivshar Y S 2008 Opt. Express 16 21209
[26] Wang L, Cai W, Tan X H, Xiang Y X, Zhang X Z, Xu J J 2011 Acta Phys. Sin. 60 067305 (in Chinese) [王垒, 蔡卫, 谭信辉, 向吟啸, 张心正, 许京军 2011 物理学报 60 067305]
[27] Xiao X, Zhang Z Y, Xiao Z G, Xu D F, Deng C 2012 Acta Phys. Sin. 61 114201 (in Chinese) [肖啸, 张志友, 肖志刚, 许德富, 邓迟 2012 物理学报 61 114201]
[28] Zhang Z Y, Du J L, Guo Y K, Niu X Y, Li M, Luo X G, Du C L 2009 Chin. Phys. Lett. 26 014211
[29] Zhang Z Y, Du J L, Guo X W, Luo X G, Du C L 2007 J. Appl. Phys. 102 074301
[30] Si G Y, Teo E J, Bettiol A A, Teng J H, Danner A J 2010 J. Vac. Sci. Technol. B 28 316
[31] Chen J, Saeki F, Wiley B J, Cang H, Cobb M J, Li Z Y 2005 Nano Lett. 5 473
[32] Si G Y, Danner A J, Teo S L, Teo E J, Teng J H, Bettiol A A 2011 J. Vac. Sci. Technol. B 29 021205
[33] Chen J Y, Wiley B, Li Z Y, Campbell D, Saeki F, Cang H, Au L, Lee J, Li X D, Xia Y N 2005 Adv. Mater. 17 2255
[34] Wiley B J, Im S H, Li Z Y, Mclellan J, Siekkinen A, Xia Y N 2006 J. Phys. Chem. B 110 15666
[35] Si G Y, Zhao Y H, Lv J T, Wang F W, Liu H L, Teng J H, Liu Y J 2013 Nanoscale 5 4309
[36] Wang K, Long H, Fu M, Zhang L C, Yang G, Lu P X 2011 Acta Phys. Sin. 60 034209 (in Chinese) [王凯, 龙华, 付明, 张莉超, 杨光, 陆培祥 2011 物理学报 60 034209]
[37] Boni L D, Wood E L, Hernandez F E 2008 Plasmonics 3 171
[38] Yang G, Wang W T, Chen Z H 2002 Appl. Phys. Lett. 81 3969
[39] Lecarme O, Pinedo-Rivera T, Berton K, Berthier J, Peyrade D 2011 Appl. Phys. Lett. 98 083122
[40] Chu Y Z, Schonbrun E, Yang T, Croziera K B 2008 Appl. Phys. Lett. 93 181108
[41] Nordlander P, Oubre C, Prodan E, Li K, Stockman M I 2004 Nano Lett. 4 899
[42] Atay T, Song J H, Nurmikko A V 2004 Nano Lett. 4 1627
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