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In this paper, the effect of uniaxial stress along [110] direction on the energy-band structure parameters of (001)-bulk Si is discussed, thereby we investigate the equilibrium carrier concentration and the expressions of effective density of state (DOS) in conduction and valence band, which contain explicit physical significance. The model of intrinsic carrier concentration is proposed by combining the expressions of DOS and bandgap. The pro- posed method in this paper is also applicable to modeling the intrinsic carrier concentration under the action of uniaxial stress along an arbitrary direction, and provides some references for design, mode- ling and simulation of similar uniaxial strained Si devices.
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Keywords:
- [110]/(001)-uniaxial strained Si /
- effective density of state /
- intrinsic carrier concentration
[1] Zhang Z F, Zhang H M, Hu H Y, Xuan R X, Song J J 2009 Acta Phys.Sin. 58 4948 (in Chinese) [张志锋、张鹤鸣、胡辉勇、宣荣喜、宋建军 2009 物理学报 58 4948]
[2] Thompson S E, Sun G Y, Choi Y S 2006 IEEE Trans.Electron Devices 53 1010
[3] Shifren L, Wang X, Matagne P 2004 Appl. Phys. Lett. 85 6188
[4] Song J J, Zhang H M, Hu H Y, Dai X Y, Xuan R X 2007 Chin.Phys. 16 3827
[5] Song J J, Zhang H M, Dai X Y, Hu H Y, Xuan R X 2008 Acta Phys. Sin. 57 5918 (in Chinese) [宋建军、张鹤鸣、、戴显英、 胡辉勇、宣荣喜 2008 物理学报 57 5918] 〖6] Song J J, Zhang H M, Hu H Y, Xuan R X, Dai X Y 2009 Acta Phys. Sin. 58 7947 (in Chinese) [宋建军、张鹤鸣、胡辉勇、宣荣喜、戴显英 2009 物理学报 58 7947]
[6] Van der Walle C G 1989 Phys. Rew. B 39 1871
[7] Song J J, Zhang H M, Dai X Y, Hu H Y, Xuan R X, 2008 Acta Phys. Sin. 57 7228 (in Chinese) [宋建军、张鹤鸣、戴显英、胡辉勇、宣荣喜 2008 物理学报 57 7228]
[8] Dhar S, Ungersbk E, Kosina S, Grasser T, Selberherr S 2007 IEEE Trans.Nano. 6 97
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[1] Zhang Z F, Zhang H M, Hu H Y, Xuan R X, Song J J 2009 Acta Phys.Sin. 58 4948 (in Chinese) [张志锋、张鹤鸣、胡辉勇、宣荣喜、宋建军 2009 物理学报 58 4948]
[2] Thompson S E, Sun G Y, Choi Y S 2006 IEEE Trans.Electron Devices 53 1010
[3] Shifren L, Wang X, Matagne P 2004 Appl. Phys. Lett. 85 6188
[4] Song J J, Zhang H M, Hu H Y, Dai X Y, Xuan R X 2007 Chin.Phys. 16 3827
[5] Song J J, Zhang H M, Dai X Y, Hu H Y, Xuan R X 2008 Acta Phys. Sin. 57 5918 (in Chinese) [宋建军、张鹤鸣、、戴显英、 胡辉勇、宣荣喜 2008 物理学报 57 5918] 〖6] Song J J, Zhang H M, Hu H Y, Xuan R X, Dai X Y 2009 Acta Phys. Sin. 58 7947 (in Chinese) [宋建军、张鹤鸣、胡辉勇、宣荣喜、戴显英 2009 物理学报 58 7947]
[6] Van der Walle C G 1989 Phys. Rew. B 39 1871
[7] Song J J, Zhang H M, Dai X Y, Hu H Y, Xuan R X, 2008 Acta Phys. Sin. 57 7228 (in Chinese) [宋建军、张鹤鸣、戴显英、胡辉勇、宣荣喜 2008 物理学报 57 7228]
[8] Dhar S, Ungersbk E, Kosina S, Grasser T, Selberherr S 2007 IEEE Trans.Nano. 6 97
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