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The whispering gallery mode (WGM) microcavity has been widely used for sensing and detection because of its high quality factor, small mode size, simple and diverse manufacturing process, and high sensitivity to the surrounding environment. Microsphere cavityand microdisk cavity are typical whispering gallery mode microcavities. However, the real controllable size of the on-chip three-dimensional microsphere cavity has rarely been reported because it is difficult to prepare by photolithography. At the same time, most of the current microsphere cavity are prepared by hot melting, which have the poor ability to control the size. In this article, we have mainly demonstrated the fabrication of a dye-doped polymer whispering gallery mode microsphere by femtosecond laser two-photon polymerization, which shows good surface smoothness with a fabrication spatial resolution beyond the diffraction limit. The microsphere cavity consists with commercial photoresist SU-8 as the cavity material and Rhodamine B as the gain medium. With the 532 nm pump, the RhB-doped SU-8 can emit fluorescence in the spectral range of 600–700 nm, and thus resonant whispering gallery laser modes in this spectral region can be eventually formed in the microsphere cavities. The microcavity shows excellent lasing performance with a quality factor of ~2000. Due to the special luminescence mechanism of organic dyes, the fluorescence spectrum of the dye drifts with the change of ambient temperature, and it will form a new resonance excitation with the eigenmode of the cavity. Within a certain temperature range (20 ℃－35 ℃), the wavelength of the main lasing peak is linearly related to temperature. The results shows that the organic dye doped micro-resonator has a unique laser mechanism which can be used to construct a new type of microlaser. Moreover, the tunable microsphere laser can be used as a temperature sensor after further optimized. We believe our work will provide a positive inspiration for the rational design of miniaturized lasers with ideal performance.
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Keywords:
- femtosecond laser two-photon polymerization /
- whispering gallery mode /
- temperature tuning /
- 3D microsphere
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图 1 微球腔飞秒激光光刻流程示意图
Figure 1. Diagram of femtosecond lithography of microsphere cavity.
图 2 微腔成分分子式及形貌表征
Figure 2. Molecular formula and morphological characterization of microcavity.
图 3 泵浦探测系统示意图和样品在泵浦光照下的暗场照片
Figure 3. The schematic diagram of the lasing spectrum measurement system and dark field photography.
图 4 在不同泵浦能量密度下的激射谱和微腔激光器阈值曲线
Figure 4. Lasing spectra under different pump energy densities and the lasing threshold characteristic.
图 5 微球激光器和RhB染料的发射光谱与温度的关系
Figure 5. Emission spectrum of microsphere laser and RhB vs temperature.
图 6 (a)主激射波长与器件温度的关系; (b)温度变化时, 器件尺寸不变; 比例尺5 µm
Figure 6. (a) Main resonance peak wavelength vs device temperature; (b) the device size does not change when the temperature changes. Scale bar 5 µm.
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[1] Capon J, Baets J D, Rycke I D, Smet H D, Doutreloigne J, Calster A V, Vanfleteren J 1992 Sensors Actuat. A: Phys. 32 437
Google Scholar
[2] So V C Y, Normandin R, Stegeman G I 1979 Opt. Soc. Am. 69 1166
Google Scholar
[3] Schumann M, Bückmann T, Gruhler N, Wegener M, Pernice W 2014 Light Sci. Appl. 3 e175
Google Scholar
[4] Stegeman G I, Seaton C 1985 J. Appl. Phys. 58 R57
Google Scholar
[5] Tien P K 1977 Rev. Mod. Phys. 49 361
Google Scholar
[6] Wu Q, Turpin J P,Werner D H 2012 Light Sci. Appl. 1 e38
Google Scholar
[7] 陈小军, 张自丽, 葛辉良 2012 物理学报 61 174211
Google Scholar
Chen X J, Zhang Z L, Ge H L 2012 Acta Phys. Sin. 61 174211
Google Scholar
[8] Muller A, Shih C K, Ahn J, Lu D, Gazula D, Deppe D G 2006 Appl. Phys. Lett. 88 163105
Google Scholar
[9] 周常河 2009 激光与光电子学进展 62 2
Zhou C H 2009 LOP 62 2
[10] Rao W, Song Y, Liu M, Jin C 2010 Optik 121 1934
Google Scholar
[11] Jugessur A S, Dou J, Aitchison J S 2010 J.Vac. Sci. Technol. B 28 C6O8
Google Scholar
[12] Delouise L A, Kou P M, Miller B L 2005 Analytical Chemistry 77 3222
Google Scholar
[13] 罗娅慧, 李刚, 陈强, 赵建龙 2012 高等学校化学学报 33 2178
Google Scholar
Luo Y H, Li G, Chen Q, Zhao J L 2012 Chem. J. Chinese U. 33 2178
Google Scholar
[14] An S J, Yoon J, Lee J, Kwon O D 2006 J. Appl. Phys. 99 66
[15] 舒方杰, 杨起帆 2012 激光与光电子学进展 49 48
Shu F J, Yang Q F 2012 LOP 49 48
[16] Xiao Y F, Zou C L, Xue P, Xiao L, Li Y, Dong C H, Han Z F,Gong Q 2010 Phys. Rev. A 81 1532
[17] Qian S X, Snow J B, Tzeng H M,Chang R K 1986 Science 231 486
Google Scholar
[18] Flatae A M, Burresi M, Zeng H, Nocentini S, Wiegele S, Parmeggiani C, Kalt H, Wiersma D 2015 Light Sci. Appl. 4 e282
Google Scholar
[19] Zhang B, Wang Z, Brodbeck S, Schneider C, Kamp M, Höfling S, Deng H 2014 Light Sci. Appl. 3 e135
Google Scholar
[20] Lekenta K, Król M, Mirek R, Stephan D, Mazur R, Morawiak P, Kula P, Piecek W, Lagoudakis P G, Piętka B 2018 Light Sci. Appl. 4 74
[21] Liu X, Gao J, Gao J, Yang H, Wang X, Wang T, Shen Z, Zhen L, Hai L, Jian Z 2018 Light Sci. Appl. 7 14
Google Scholar
[22] Kippenberg T J, Spillane S M, Armani D K, Vahala K J 2003 Appl. Phys. Lett. 83 797
Google Scholar
[23] Nilsson D, Nielsen T, Kristensen A 2004 Rev. Sci. Instrum. 75 4481
Google Scholar
[24] Jiang Y, Zhen X, Huang T, Liu Y, Fan G, Xi J, Gao W, Chao G 2018 Adv. Funct. Mater. 28 1707024
Google Scholar
[25] Ta V D, Yang S, Wang Y, Gao Y, He T, Chen R, Demir H V, Sun H 2015 Appl. Phys. Lett. 107 839
[26] Wang C, Liu Y, Ji Z, Wang E, Li R, Hui J, Tang Q, Li H, Hu W P 2009 Chem. Mat. 21 2840
Google Scholar
[27] Armani D K, Kippenberg T J, Spillane S M, Vahala K J 2003 Nature 421 925
Google Scholar
[28] Chen R, Ling B, Sun X W, Sun H D 2011 Adv. Mater. 23 2128
Google Scholar
[29] Chiasera A, Dumeige Y, Féron P, Ferrari M, Jestin Y, Conti G N, Pelli S, Soria S, Righini G C 2010 Laser Photonics Rev. 4 457
Google Scholar
[30] Lin J, Xu Y, Fang Z, Wang M, Song J, Wang N, Qiao L, Fang W, Cheng Y 2015 Sci. Rep. 5 8072
Google Scholar
[31] Zhan X, Xu H L, Sun H B 2016 Front. Optoelectron. China 9 1
Google Scholar
[32] Xu H L, Sun H B 2015 Sci. China Phys. Mech. Astron. 58 1
[33] Xu B B, Xia H, Niu L G, Zhang Y L, Kai S, Chen Q D, Hiroaki M 2010 Small 6 1762
Google Scholar
[34] Wong D, Chen Q D, Niu L G, Wang J N, Wang J, Wang R, Xia H, Sun HB 2009 Lab. Chip 9 2391
Google Scholar
[35] Xu B B 2013 Lab. Chip 13 1677
Google Scholar
[36] Hou Z S, Huang Q L, Zhan Xue Peng, Li A W, Xu H L 2017 RSC. Advances 1 16531
[37] 李牧野, 李芳, 魏来, 何志聪, 张俊佩, 韩俊波, 陆培祥 2015 物理学报 64 108201
Google Scholar
Li M Y, Li F, Wei L, He Z C, Zhang J P, Han J B, Lu P X 2015 Acta Phys. Sin. 64 108201
Google Scholar
[38] Dong H, Wei Y, Zhang W, Wei C, Zhang C, Yao J, Zhao Y S 2016 J. Am. Chem. Soc. 138 1118
Google Scholar
[39] 赵小兵, 张巍巍, 吴潇杰, 徐如辉, 秦朝菲, 王闽 2018 传感技术学报 4 529
Google Scholar
Zhao X B, Zhang W W, Wu X J, Xu R H, Qin C F, Wang M 2018 Chin. Sens. Acta 4 529
Google Scholar
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