Tribocorrosion performance of Nitrogen-doped diamond like carbon coating by high power impulse magnetron sputtering technique

Shen Yong-Qing; Zhang Zhi-Qiang; Liao Bin; Wu Xian-Ying; Zhang Xu; Hua Qing-Song; Bao Man-Yu

doi:10.7498/aps.69.20200021

Abstract

Nitrogen-doped diamond like carbon film is promising in biological applications, studying the synergistic tribocorrosion performance is indispensable. In this paper, Nitrogen-doped diamond like carbon films were deposited on AISI 304L austenitic stainless steels and Si substrate by using the high power impulse magnetron sputtering technique using Ar and N₂ as precursors at room temperature. The effect of target pulse duration on the structure, mechanical properties, corrosion resistance and tribocorrosion properties in Hank's equilibrium salt solution and the corresponding mechanism were studied. The results of scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy and nano-hardness test showed that the nitrogen-doped diamond like carbon coatings prepared at a target pulse duration of 60 μs showed the sp³ bonding content of 33.9% with the hardness of 12.4 GPaand the root mean square roughness of 0.63 nm. With the increase in pulse duration to 90 μs, the sp² bonding increased, meanwhile the surface roughness increased. The results of potentiodynamic polarization indicated that the Nitrogen-doped diamond like carbon coating prepared at 60μs had best corrosion resistance with the corrosion current density of 7.65 × 10^–8 A·cm^–2. The effect of the target pulse duration on tribocorrosionbehaviour of the Nitrogen-doped diamond like carboncoating was investigated in Hank’s solution by a reciprocating tribometer equipped with a three-electrode electrochemical cell.The coatings at 60 μs exhibited excellent tribocorrosion properties with high open circuit potential of 39 mV, low COF of 0.05 without pitting corrosion due to high corrosionresistance, low contact angel and dense microstructure.The results indicated that corrosion can be accelerated by friction, but it also affect the mechanical properties of the Nitrogen-doped diamond like carbon coatings. The increase in pulse duration to 90 μs, leading to the reduction of sp³ bonds which can form a cross-linking structure. The degraded cross-linking structure decreased the corrosion resistance of the coating via the increased porosity in the coating, which weakened the interfacial strength of the coating, and ultimately led to failure of the coatingunder the action of wear.

Keywords:

high power impulse magnetron sputtering /
Nitrogen-doped diamond like carbon coating /
tribocorrosion behavior /
corrosion

Authors and contacts

1.
Key Laboratory of Beam Technology and Materials Modification of Ministry of Education, College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875, China
2.
Beijing Radiation Center, Beijing 100875, China
3.
Beijing Jinlunkuntian Special Machine Co., Ltd., Beijing 100083, China

Corresponding author: Zhang Xu, zhangxu@bnu.edu.cn

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References

[1]	Tyagi A, Walia R S, Murtaza Q, Pandey S M, Bajaj B 2019 Int. J. Refract. Met. Hard Mater. 78 107 Google Scholar
[2]	Corona-Gomez J, Shiri S, Mohammadtaheri M, Yang Q 2017 Surf. Coat. Technol. 332 120 Google Scholar
[3]	Son M J, Zhang T F, Jo Y J, Kim K H 2017 Surf. Coat. Technol. 329 77 Google Scholar
[4]	Wang C, Yang S, Zhang J 2008 J. Non. Cryst. Solids 354 1608 Google Scholar
[5]	Muhl S, Mendez J M 1999 Diam. Relat. Mater. 8 1809 Google Scholar
[6]	Zheng C L, Cui F Z, Meng B, Ge J, Liu D P, Lee I S 2005 Surf. Coat. Technol. 193 361 Google Scholar
[7]	Dress D, Celis J P, Dekempeneer E, Meneve J 1996 Surf. Coat. Technol. 85-86 575
[8]	Ronkainen H, Varjus S, Holmberg K 1998 Wear 222 120 Google Scholar
[9]	Park S J, Lee K R, Ahn S H, Kim J G 2008 Diam. Relat. Mater. 17 247 Google Scholar
[10]	Ohana T, Nakamura T, Suzuki M, Tanaka A, Koga Y 2004 Diam. Relat. Mater. 13 1500 Google Scholar
[11]	Lü Y, Li J, Liu X, Li H, Zhou H, Chen J 2012 Appl. Surf. Sci. 258 3864 Google Scholar
[12]	Cheng H C, Chiou S Y, Liu C M, Lin M H, Chen C C, Ou K L 2009 J. Alloy. Compd. 477 931 Google Scholar
[13]	Kim D H, Kim H E, Lee K R, Whang C N, Lee I S 2002 Mater. Sci. Eng. C 22 9 Google Scholar
[14]	Manhabosco T M, Müller I L 2009 Tribol. Lett. 33 193 Google Scholar
[15]	Azzi M, Paquette M, Szpunar J A, Klemberg-Sapieha J E, Martinu L 2009 Wear 267 860 Google Scholar
[16]	Sharifahmadian O, Mahboubi F 2019 Ceram. Int. 45 16424 Google Scholar
[17]	Guerino M, Massi M, Maciel H S 2003 Microelectronic. J. 34 639 Google Scholar
[18]	Bootkul D, Supsermpol B, Saenphinit N, Aramwit C, Intarasiri S 2014 Appl. Surf. Sci. 310 284 Google Scholar
[19]	Ricard A, Nouvellon C, Konstantinidis S, Dauchot J, Wautelet M, Hecq M 2002 J. Vac. Sci. Technol. A 20 1488 Google Scholar
[20]	Christou C, Barber Z H 2000 J. Vac. Sci. Technol. A 18 2897 Google Scholar
[21]	Kouznetsov V, Macak K, Schneider J M, Helmersson U, Petrov I 1999 Surf. Coat. Technol. 122 290 Google Scholar
[22]	Sarakinos K, Alami J, Konstantinidis S 2010 Surf. Coat. Technol. 204 1661 Google Scholar
[23]	Alami J, Sarakinos K, Uslu F, Wuttig M 2009 J. Phys. D: Appl. Phys 42 015304 Google Scholar
[24]	Wu Z R, Zhang M, Cui F Z 2007 Surf. Coat. Technol. 201 5710 Google Scholar
[25]	Bouchetfabre B, Lazar G, Ballutaud D, Godet C, Zellama K 2008 Diam. Relat. Mater. 17 700 Google Scholar
[26]	Ujvári T, Szikora B, Tóth A, Mohai M, Bertóti I 2002 Diam. Relat. Mater. 11 1200
[27]	Gago R, Jiménez I, Cáceres D, Agulló-Rueda F, Sajavara T, Albella J M, Climent-Font A, Vergara I, Räisänen J, Raühala E 2001 Chem. Mater. 13 129 Google Scholar
[28]	Ferrari A, Rodil S, Robertson J 2003 Phys. Rev. B 67 155306 Google Scholar
[29]	Wei S, Shao T, Peng D 2010 Diam. Relat. Mater. 19 648 Google Scholar
[30]	Niu L F, Zhang S J, Li D J, Zhang J K, Yang S G, Tian Z, Huang Z G, Zhang H L J 2001 Adhes. Sci. Technol. 15 1121 Google Scholar
[31]	Matthews A, Franklin S, Holmberg K 2007 J. Phys. D. Appl. Phys. 40 5463 Google Scholar
[32]	Philippon D, Godinho V, Nagy P M, Delplancke-Ogletree M P, Fernández A 2011 Wear 270 541
[33]	Beake B D, Vishnyakov V M, Valizadeh R, Colligon J S 2006 J. Phys. D: Appl. Phys. 39 1392 Google Scholar
[34]	Ou Y X, Chen H, Li Z Y, Lin J, Lei M K 2018 J. Am. Ceram. Soc. 101 5166 Google Scholar
[35]	Martini E M A, Muller I L 2000 Corros. Sci. 42 443 Google Scholar
[36]	Parfenov E V, Yerokhin A L, Matthews A 2007 Thin Solid Films 516 428 Google Scholar
[37]	Matthes B, Broszeit E, Aromaa J, Ronkainen H, Hannula SP, Leyland A, Matthews A 1991 Surf. Coat. Technol. 49 489 Google Scholar
[38]	Pu J, Wang J, He D, Wan S 2016 Surf. Interface Anal. 48 360 Google Scholar
[39]	Stansbury E E, Buchanan R A 1981 ASM International (USA: Materials Park, OH) p55
[40]	Písařík P, Mikšovský J, Remsa J, Zemek J, Tolde Z, Jelínek M 2018 Appl. Phys. A 124 85
[41]	Wang Y, Wang L, Wang S C, Zhang G, Wood R J K, Xue Q 2010 Tribol. Lett. 40 301 Google Scholar

Cited By

图 1 不同脉冲持续时间制备薄膜的横截面SEM图片　(a) 30 μs; (b) 60 μs; (c) 90 μs

Figure 1. Cross-sectional SEM images of the films deposited at different pulse durations: (a) 30 μs; (b) 60 μs; (c) 90 μs.

DownLoad: Full-Size Img PowerPoint

图 2 不同脉冲持续时间制备薄膜的3D AFM形貌　(a) 30 μs; (b) 60 μs; (c) 90 μs

Figure 2. AFM surface micrographs of the N-DLC films deposited at different pulse durations: (a) 30 μs; (b) 60 μs; (c) 90 μs.

DownLoad: Full-Size Img PowerPoint

图 3 在不同脉冲持续时间制备的掺氮类金刚石薄膜的XPS C1s和N1s的拟合光谱　(a), (b) 30 μs; (c), (d) 60 μs; (e), (f) 90 μs

Figure 3. XPS C1s and N1s spectra of the N-DLC films deposited at different pulse durations: (a), (b) 30 μs; (c), (d) 60 μs; (e), (f) 90 μs

DownLoad: Full-Size Img PowerPoint

图 4 在不同靶脉冲持续时间制备的N-DLC薄膜的XPS C1s光谱的拟合结果

Figure 4. The fitting result of the C1s spectra of the N-DLC films deposited at different pulse durations.

DownLoad: Full-Size Img PowerPoint

图 5 不同脉冲持续时间制备薄膜的机械性能　(a) 纳米硬度和弹性模量; (b) H/E ^*和H ³/E ^*2

Figure 5. Mechanical properties of the N-DLC films deposited at different pulse durations: (a) Hardness and elasticity modulus; (b) H/E ^* and H ³/E ^*2.

DownLoad: Full-Size Img PowerPoint

图 6 N-DLC膜和不锈钢衬底浸入Hank’s平衡盐混合溶液中的动电位极化曲线

Figure 6. Potentiodynamic polarization curves of the N-DLC films and substrate immersed in Hank’s solution.

DownLoad: Full-Size Img PowerPoint

图 7 (a)摩擦腐蚀试验的电解池结构图示意图; (b)摩蚀测试中按OCP进程操作顺序

Figure 7. (a) The structure diagram of electrolytic cells used for tribocorrosion tests; (b) sequence of operations during the tribocorrosion test illustrated by the OCP evolution.

DownLoad: Full-Size Img PowerPoint

图 8 (a)—(c)磨蚀实验中OCP和摩擦系数随着滑行时间的变化以及磨痕的光学图片; (d)摩擦实验中90 μs制备膜的摩擦系数和磨痕图

Figure 8. (a)–(c) The changes of OCP and coefficient of friction as a function of sliding times and the inserted optical micrographs of tribocorrosion tracks for coatings; (d) the normal coefficient of friction and micrographs of wear tracks.

DownLoad: Full-Size Img PowerPoint

图 9 不同靶脉冲持续时间下制备的N-DLC薄膜在去离子水(a)—(c)和Hank’s溶液(d)—(f) 滴到表面中的接触角形貌　(a), (d) 30 μs; (b), (e) 60 μs; (c), (f) 90 μs

Figure 9. The contact angle of films: the morphologies of deionized water (a)–(c) and Hank’s solution (d)–(f) droplets on the surfaces: (a), (d) 30 μs: (b), (e) 60 μs: (c), (f) 90 μs.

DownLoad: Full-Size Img PowerPoint

表 1 不锈钢衬底和N-DLC膜的动电位极化曲线的拟合结果

Table 1. The fitting results of the potentiodynamic polarization curves of the N-DLC films and substrate.

样品	E_corr/V	i_corr/A·cm^–2	b_a/mV	b_c/mV	R_p/Ω·cm²	P
304 L	–0.31	1.69 × 10^–6	323.47	117.75	2.21 × 10⁷	—
30 μs	–0.15	9.87 × 10^–8	289.51	119.61	3.72 × 10⁸	0.042
60 μs	–0.13	7.65 × 10^–8	408.84	113.72	5.05 × 10⁸	0.026
90 μs	–0.12	1.55 × 10^–7	298.24	82.91	2.05 × 10⁸	0.079

DownLoad: CSV

[1]	Tyagi A, Walia R S, Murtaza Q, Pandey S M, Bajaj B 2019 Int. J. Refract. Met. Hard Mater. 78 107 Google Scholar
[2]	Corona-Gomez J, Shiri S, Mohammadtaheri M, Yang Q 2017 Surf. Coat. Technol. 332 120 Google Scholar
[3]	Son M J, Zhang T F, Jo Y J, Kim K H 2017 Surf. Coat. Technol. 329 77 Google Scholar
[4]	Wang C, Yang S, Zhang J 2008 J. Non. Cryst. Solids 354 1608 Google Scholar
[5]	Muhl S, Mendez J M 1999 Diam. Relat. Mater. 8 1809 Google Scholar
[6]	Zheng C L, Cui F Z, Meng B, Ge J, Liu D P, Lee I S 2005 Surf. Coat. Technol. 193 361 Google Scholar
[7]	Dress D, Celis J P, Dekempeneer E, Meneve J 1996 Surf. Coat. Technol. 85-86 575
[8]	Ronkainen H, Varjus S, Holmberg K 1998 Wear 222 120 Google Scholar
[9]	Park S J, Lee K R, Ahn S H, Kim J G 2008 Diam. Relat. Mater. 17 247 Google Scholar
[10]	Ohana T, Nakamura T, Suzuki M, Tanaka A, Koga Y 2004 Diam. Relat. Mater. 13 1500 Google Scholar
[11]	Lü Y, Li J, Liu X, Li H, Zhou H, Chen J 2012 Appl. Surf. Sci. 258 3864 Google Scholar
[12]	Cheng H C, Chiou S Y, Liu C M, Lin M H, Chen C C, Ou K L 2009 J. Alloy. Compd. 477 931 Google Scholar
[13]	Kim D H, Kim H E, Lee K R, Whang C N, Lee I S 2002 Mater. Sci. Eng. C 22 9 Google Scholar
[14]	Manhabosco T M, Müller I L 2009 Tribol. Lett. 33 193 Google Scholar
[15]	Azzi M, Paquette M, Szpunar J A, Klemberg-Sapieha J E, Martinu L 2009 Wear 267 860 Google Scholar
[16]	Sharifahmadian O, Mahboubi F 2019 Ceram. Int. 45 16424 Google Scholar
[17]	Guerino M, Massi M, Maciel H S 2003 Microelectronic. J. 34 639 Google Scholar
[18]	Bootkul D, Supsermpol B, Saenphinit N, Aramwit C, Intarasiri S 2014 Appl. Surf. Sci. 310 284 Google Scholar
[19]	Ricard A, Nouvellon C, Konstantinidis S, Dauchot J, Wautelet M, Hecq M 2002 J. Vac. Sci. Technol. A 20 1488 Google Scholar
[20]	Christou C, Barber Z H 2000 J. Vac. Sci. Technol. A 18 2897 Google Scholar
[21]	Kouznetsov V, Macak K, Schneider J M, Helmersson U, Petrov I 1999 Surf. Coat. Technol. 122 290 Google Scholar
[22]	Sarakinos K, Alami J, Konstantinidis S 2010 Surf. Coat. Technol. 204 1661 Google Scholar
[23]	Alami J, Sarakinos K, Uslu F, Wuttig M 2009 J. Phys. D: Appl. Phys 42 015304 Google Scholar
[24]	Wu Z R, Zhang M, Cui F Z 2007 Surf. Coat. Technol. 201 5710 Google Scholar
[25]	Bouchetfabre B, Lazar G, Ballutaud D, Godet C, Zellama K 2008 Diam. Relat. Mater. 17 700 Google Scholar
[26]	Ujvári T, Szikora B, Tóth A, Mohai M, Bertóti I 2002 Diam. Relat. Mater. 11 1200
[27]	Gago R, Jiménez I, Cáceres D, Agulló-Rueda F, Sajavara T, Albella J M, Climent-Font A, Vergara I, Räisänen J, Raühala E 2001 Chem. Mater. 13 129 Google Scholar
[28]	Ferrari A, Rodil S, Robertson J 2003 Phys. Rev. B 67 155306 Google Scholar
[29]	Wei S, Shao T, Peng D 2010 Diam. Relat. Mater. 19 648 Google Scholar
[30]	Niu L F, Zhang S J, Li D J, Zhang J K, Yang S G, Tian Z, Huang Z G, Zhang H L J 2001 Adhes. Sci. Technol. 15 1121 Google Scholar
[31]	Matthews A, Franklin S, Holmberg K 2007 J. Phys. D. Appl. Phys. 40 5463 Google Scholar
[32]	Philippon D, Godinho V, Nagy P M, Delplancke-Ogletree M P, Fernández A 2011 Wear 270 541
[33]	Beake B D, Vishnyakov V M, Valizadeh R, Colligon J S 2006 J. Phys. D: Appl. Phys. 39 1392 Google Scholar
[34]	Ou Y X, Chen H, Li Z Y, Lin J, Lei M K 2018 J. Am. Ceram. Soc. 101 5166 Google Scholar
[35]	Martini E M A, Muller I L 2000 Corros. Sci. 42 443 Google Scholar
[36]	Parfenov E V, Yerokhin A L, Matthews A 2007 Thin Solid Films 516 428 Google Scholar
[37]	Matthes B, Broszeit E, Aromaa J, Ronkainen H, Hannula SP, Leyland A, Matthews A 1991 Surf. Coat. Technol. 49 489 Google Scholar
[38]	Pu J, Wang J, He D, Wan S 2016 Surf. Interface Anal. 48 360 Google Scholar
[39]	Stansbury E E, Buchanan R A 1981 ASM International (USA: Materials Park, OH) p55
[40]	Písařík P, Mikšovský J, Remsa J, Zemek J, Tolde Z, Jelínek M 2018 Appl. Phys. A 124 85
[41]	Wang Y, Wang L, Wang S C, Zhang G, Wood R J K, Xue Q 2010 Tribol. Lett. 40 301 Google Scholar

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