Research progress of piezoelectrets based micro-energy harvesting

Zhang Mi; Zuo Xi; Yang Tong-Qing; Zhang Xiao-Qing

doi:10.7498/aps.69.20200815

Abstract

In this paper, the progress of micro-energy harvesters by using piezoelectret-based transducers as a core element is reviewed, including basic physical principle and properties of piezoelectrets, and their applications in micro-energy harvesting. Piezoelectret is electret-based piezoelectric polymer with a foamed structure. The piezoelectric effect of such material is a synergistic effect of the electret property of the matrix polymer and the foam mechanical structure in the material. Piezoelectret, featuring strong piezoelectric effect, flexibility, low density, very small acoustic impedance and film form, is an ideal electromechanical material for lightweight flexible sensors and mechanical energy harvesters. The piezoelectret prepared by means of grid, template patterning, supercritical CO₂ assisted low-temperature assembly, lithography mold combined with rotary coating and hot pressing has regular voids and good piezoelectric properties. Piezoelectret has been used to harvest vibrational energy, human motion energy and sound energy. According to the stress direction applied to the piezoelectrets, operating modes of energy harvesters can be divided into 33 and 31 modes. The vibrational energy harvesters based on piezoelectret are utilized to harvest medium frequency vibrational energy generated by factory machines, aircrafts, automobiles, etc. Such energy harvesters can generate considerable power even in a small size. Human motion energy harvesters are generally used to power wearable sensors. The high sensitivity, lightweight, and flexibility of the piezoelectret make such a material a promising candidate for harvesting human motion energy. Owing to very small acoustic impedance, high figure-of-merit, flat response in audio and low-frequency ultrasonic range, the piezoelectrets are more appropriate for acoustic energy harvesting in air medium than conventional PZT and ferroelectric polymer PVDF.In the future, specific micro-energy harvesters using piezoelectrets as transduction material can be designed and fabricated according to the practical application environment, and their performance can be enhanced by using flexible connections of transduction elements.

Keywords:

Authors and contacts

1.
Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
2.
School of Materials Science and Engineering, Tongji University, Shanghai 201804, China

Corresponding author: Yang Tong-Qing, yangtongqing@tongji.edu.cn ; Zhang Xiao-Qing, x.zhang@tongji.edu.cn

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 61761136004)

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References

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Cited By

Figure 1. (a) Schematic of the molecular chain of β-phase PVDF; (b) charge-spring model for the occurrence of piezoelectricity in polymers; (c) piezoelectret PP (ellipsoidal areas are gas bubble and the dark area is the polymer matrix). Reproduced with permission. Copyright 2004, IEEE^[28].

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图 2 压电驻极体的层状理论模型^[42]

Figure 2. Layer model of piezoelectrets^[42].

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Figure 3. Dependence of the piezoelectric activity (thick line) and elastic coefficient (thin line) on the sample density, and the cross section diagram of the corresponding cellular structures. Reproduced with permission. Copyright 2006, John Wiley and Sons^[43].

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Figure 4. Schematic diagram of preparation of cellular piezoelectrets based on melt stretching (top) and foaming agent foams (bottom) processes. Reproduced with permission. Copyright 2010, SPIE^[44].

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图 5 多孔氟聚合物压电驻极体示意图　(a) 均匀多孔FEP层合膜示意图(经允许转载, 版权所有2005, IEEE)^[46]; (b) 用平行矩形开口的PTFE模板制备具有管状通道的双层FEP薄膜的工艺示意图和孔洞的SEM图(经AIP出版社许可转载)^[47]; (c) 金属栅网压印制备PTFE-FEP-PTFE层合膜示意图(经允许转载, 版权所有2006, Springer Nature)^[48]; (d) 模板压印制备平行隧道结构FEP层合膜示意图(图片经允许转载, 版权所有2018, Elsevier Publishing)^[17]

Figure 5. Schematic of piezoelectrets of cellular fluoropolymer: (a) Schematic of uniform cellular FEP laminated film. Reproduced with permission. Copyright 2005, IEEE^[46]; (b) a schematic illustration of the fabrication process with a PTFE template with parallel rectangular openings to prepare a two-layer FEP film with tubular channels and the SEM image of the air voids. Reproduced with the permission of AIP Publishing^[47]; (c) schematic of PTFE-FEP-PTFE laminated film prepared by metal mesh patterning. Reproduced with permission. Copyright 2006, Springer Nature^[48]; (d) schematic of template patterning fabrication process of FEP laminated film with parallel-tunnel structure. Images reproduced with permission. Copyright 2018, Elsevier Publishing^[17].

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Figure 6. Schematic preparation process of other typical cellular piezoelectrets: (a) Schematic of COC laminated film prepared by supercritical CO₂-assisted low temperature assembly method. Reproduced with permission. Copyright 2013, John Wiley and Sons^[53]; (b) schematic of preparing arched bubble PET/EVA/PET composite film. Images reproduced with permission. Copyright 2017 Elsevier Publishing^[56].

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图 7 极化方式　(a) 电晕极化; (b) 接触法极化

Figure 7. Polarization methods: (a) Corona polarization; (b) contact polarization.

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图 8 (a) 沿压电驻极体膜平面双轴加载示意图; (b) 垂直于压电驻极体膜平面加载示意图^[30]

Figure 8. (a) Schematic of biaxial loading along the plane of piezoelectret film; (b) schematic of loading perpendicular to the piezoelectret film^[30].

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Figure 10. (a) Schematic of energy harvesting setup; (b) FENG; (c) measured normalized power generated by a FENG; (d) setup of energy harvester to power LED. Images reproduced with permission. Copyright 2018, Elsevier Publishing^[17].

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图 11 (a) FEP单极性压电驻极体结构的截面示意图(上层膜带负电, 下层膜不带电); (b)归一化输出功率与频率的关系; (c) 用FEP单极性铁电驻极体能量采集装置点亮LED灯^[11]

Figure 11. (a) Schematic cross sectional view of the structure of the FEP unipolar ferroelectret (The upper layer is negatively charged and the lower layer is not charged); (b) normalized output power vs. frequency; (c) setup of energy harvester to power LED^[11].

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图 12 可穿戴传感器　(a) PP可穿戴声纹识别传感器(图片经允许转载, 版权所有2017, American Chemical Society)^[71]; (b) 多孔PP/PZT复合框架的三维细胞传感器阵列(图片经允许转载, 版权所有2018, American Chemical Society)^[72]; (c) PFA压电柔性压力传感器(图片经允许转载, 版权所有2018, Royal Society of Chemistry)^[73]

Figure 12. Wearable sensors: (a) Voiceprint recognition system based on PP films. Images reproduced with permission. Copyright 2017, American Chemical Society^[71]; (b) three-dimensional cellular sensor array (3D-CSA) array for wearable biomedical monitoring based on cellular PP/PZT composite films; Images reproduced with permission. Copyright 2018, American Chemical Society^[72]; (c) flexible piezoelectret-based pressure sensors based on PFA films. Images reproduced with permission. Copyright 2018, Royal Society of Chemistry^[73].

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Figure 13. Self-powered wireless remote system: (a) Schematic diagram and photograph of raised bubble shape FEP laminated films; (b) the fan can be controlled by self-powered wireless remote system. Images reproduced with permission. Copyright 2017, Royal Society of Chemistry^[74].

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Figure 14. Underfloor energy harvesting system based on piezoelectrets: (a) FEP/p-PTFE/FEP multilayer films; (b) schematic view and photograph of the system. Images reproduced with permission. Copyright 2019, Japanese Journal of Applied Physics^[75].

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图 15 IXPP声能采集器　(a) IXPP压电驻极体薄膜的制备过程、工作原理、以及实物图; (b) 声能采集系统示意图; (c) 结合亥姆霍兹共振腔制得的声能采集器件的示意图和实物图; (d) PP压电驻极体膜和IXPP压电驻极体膜制备得到的声能采集器件的灵敏度-频率曲线图; (e) 五个表面都附着IXPP样品的声能采集器件的输出功率-频率曲线图^[76,77]. 图片经允许转载, 图(a), (b), (c), (e)版权所有2019, IOP Publishing Ltd., 图(d)版权所有2018, IEEE

Figure 15. IXPP acoustic energy harvesters: (a) Schematic views of the preparation process, the working principle and the photographs of IXPP piezoelectret films; (b) experimental configuration of measurements for output power of IXPP acoustic energy harvesters; (c) cross-sectional view and optical image of IXPP energy harvesters made of a Helmholtz resonator with one IXPP piezoelectret film; (d) free-field sensitivities of PP and IXPP microphones in audio range; (e) schematic view (inset) and generated output power of an acoustic energy harvester consisting of a Helmholtz resonator with five IXPP films^[76,77]. Images reproduced with permission. Panels (a), (b), (c), (e) Copyright 2019, IOP Publishing Ltd., Panel (d) Copyright 2018, IEEE.

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表 1 一些材料的压电系数^[17]

Table 1. Piezoelectric coefficients of some materials^[17].

材料		$ {d}_{33} $/pC·N^–1	$ {g}_{33} $/V·m·N^–1	$ {d}_{33} \cdot {g}_{33} $/TPa^–1	$ {d}_{31} $/pC·N^–1	$ {g}_{31} $/V·m·N^–1	$ {d}_{31} \cdot {g}_{31} $/TPa^–1	Ref.
PZT-5H		640	0.021	13.44	–283	–0.0093	2.6	[33]
PVDF		–33	0.33	–10.89	23	0.216	5.0	[34]
压电驻极体	PP	140	13*	1820	～2	～0.2	～0.4	[35]
	IXPP	620	18.06	11200	—	—	—	[36]
	圆形孔洞FEP层压膜	350	30*	10500	—	—	—	[37]
	交叉隧道FEP层压膜	300	28*	8400	—	—	—	[38]
	平行隧道FEP层压膜	—	—	—	32*	3	96	[17]
	PDMS	350	28.8	10083	—	—	—	[39]
*由${g}_{33}=\dfrac{ {d}_{33} }{ {\varepsilon }_{0}{\varepsilon }_{\rm{r} } }$计算得到, $ {\varepsilon }_{\rm{r}} $为1.2.

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[2]	Fan K Q, Zhang Y W, E S J, Tang L H, Qu H H 2019 Appl. Phys. Lett. 115 203903 Google Scholar
[3]	Zhu J X, Liu X M, Shi Q F, et al. 2020 Micromachines-Basel 11 7 Google Scholar
[4]	Yang Y Y W, Wang S, Stein P, Xu B X, Yang T Q 2017 Smart Mater. Struct. 26 045011 Google Scholar
[5]	Kim H, Tadesse Y, Priya S 2009 Energy Harvesting Technologies 3 39 Google Scholar
[6]	Panda P K, Sahoo B 2015 Ferroelectr. 474 128 Google Scholar
[7]	Bauer S, Gerhard-Multhaupt R, Sessler G M 2004 Phys. Today 57 37 Google Scholar
[8]	Bauer S 2006 IEEE Trans. Dielectr. Electr. Insul. 13 953 Google Scholar
[9]	Qiu X L 2010 J. Appl. Phys. 108 011101 Google Scholar
[10]	Mohebbi A, Mighri F, Ajji A, Rodrigue D 2018 Adv. Polym. Tech. 37 468 Google Scholar
[11]	Ma X C, Zhang X Q, Sessler G M, Chen L, Yang X Y, Dai Y, He P F 2019 AIP Adv. 9 125334 Google Scholar
[12]	张欣梧, 张晓青 2013 物理学报 62 167702 Google Scholar Zhang X W, Zhang X Q 2013 Acta Phys. Sin. 62 167702 Google Scholar
[13]	Gerhard-Multhaupt R 2002 IEEE Trans. Dielectr. Electr. Insul. 9 850 Google Scholar
[14]	Zhang X Q, Huang J F, Chen J B, Wan Z M, Wang S, Xia Z F 2007 Appl. Phys. Lett. 91 182901 Google Scholar
[15]	张晓青, 黄金峰, 王学文, 夏钟福 2009 物理学报 58 3525 Google Scholar Zhang X Q, Huang J F, Wang X W, Xia Z F 2009 Acta Phys. Sin. 58 3525 Google Scholar
[16]	Chen L, Cao J L, Li G L, Fang P, Gong X S, Zhang X Q 2019 IEEE Sens. J. 19 11262 Google Scholar
[17]	Zhang X Q, Pondrom P, Sessler G M, Ma X C 2018 Nano Energy 50 52 Google Scholar
[18]	Ko W C, Chen J L, Wu W J, Lee C K 2008 Proc. SPIE 6927 69271V Google Scholar
[19]	Fang P, Wirges W, Wegener M, Zirkel L, Gerhard R 2008 E-Polymers 8 1 Google Scholar
[20]	Fujita T, Fujii K, Onishi T, Kanda K, Higuchi K, Maenaka K 2011 Procedia Eng. 25 733 Google Scholar
[21]	Furukawa T 1989 Phase Transitions 18 143 Google Scholar
[22]	Guo D, Cai K, Wang Y 2017 J. Mater. Chem. C 5 2531 Google Scholar
[23]	Salimi A, Yousefi A 2003 Polym. Test. 22 699 Google Scholar
[24]	Ribeiro C, Sencadas V, Ribelles J L G, Lanceros-Méndez S 2010 Soft Mater. 8 274 Google Scholar
[25]	Yang D C, Chen Y 1987 J. Mater. Sci. Lett. 6 599 Google Scholar
[26]	Ye H J, Shao W Z, Zhen L 2013 J. Appl. Polym. Sci. 129 2940 Google Scholar
[27]	Li X, Lim Y F, Yao K, Tay F E H, Seah K H 2013 Chem. Mater. 25 524 Google Scholar
[28]	Lindner M, Hoislbauer H, Schwodiauer R, Bauer-Gogonea S, Bauer S 2004 IEEE Trans. Dielectr. Electr. Insul. 11 255 Google Scholar
[29]	Mo X W, Zhou H, Li W B, Xu Z S, Duan J J, Huang L, Hu B, Zhou J 2019 Nano Energy 65 104033 Google Scholar
[30]	Zhang Y, Bowen C R, Ghosh S K, Mandal D, Khanbareh H, Arafa M, Wan C 2019 Nano Energy 57 118 Google Scholar
[31]	Berlincourt D A, Curran D R, Jaffe H 1964 Physical Acoustics (Pittsburgh: Academic Press) pp169−270
[32]	Xu R, Kim S G 2012 Power MEMS Atlanta, GA, USA, December 2−5, 2012 p464
[33]	Sinoceramics http://sinocera.net/en/piezo_material.asp [2020−4−25]
[34]	Ohigashi H 1976 J. Appl. Phys. 47 949 Google Scholar
[35]	Neugschwandtner G S, Schwödiauer R, Vieytes M, et al. 2000 Appl. Phys. Lett. 77 3827 Google Scholar
[36]	武丽明, 张晓青 2015 物理学报 64 177701 Google Scholar Wu L M, Zhang X Q 2015 Acta Phys. Sin. 64 177701 Google Scholar
[37]	Zhang X Q, Hillenbrand J, Sessler G M, Haberzettl S, Lou K 2012 Appl. Phys. A 107 621 Google Scholar
[38]	Zhang X Q, Sessler G M, Wang Y J 2014 J. Appl. Phys. 116 074109.1 Google Scholar
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