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This paper focuses on standardized fabrications of atomic vapor cells with multipass cells. For this purpose, we build a vacuum system that enables the sealing of the mulipass-cavity-assisted cell under vacuum. Alkali atoms are prepared inside a glass holder, and the tip of the holder is broken by controlled collisions under vacuum. Atoms are then transferred to a cell glass body part by heating. Once enough atoms accumulate inside the glass part, buffer and quenching gases are filled into the system, and the glass body part is moved to contact the silicon wafer which is bonded with a Herriott-cavity. Then the cavity part and the glass part are sealed together using the anodic bonding technique. The resulting vapor cells provide enhanced measurement sensitivity and improved device standardization, which allows for seamless replacements of each other in practical applications. The performances of these cells are tested, including a test in a double-resonance alkali-metal atomic magnetometer. A magnetic field sensitivity of 95 fT/Hz1/2 is achieved in a frequency range from 10 to 20 Hz with a multipass cell filled with 400 Torr N2 and natural Rb atoms at 100 ℃. The technology and cells developed in this work are expected to have wide applications in atomic devices, especially in He magnetometers and nuclear-spin atomic co-magnetometers, which have special requirements for cell qualities.
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Keywords:
- Herriott cavity /
- atomic magnetometer /
- optical pumping /
- vacuum sealing
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图 1 光在本文设计的多反射腔内传播示意图, 两个腔镜键合在一片硅片上形成多反射腔模块, 硅片厚度为0.5 mm, 尺寸为21 mm × 33 mm
Figure 1. Illustration of the light propagation in the multipass cavity made in this paper, the two cavity mirrors are bonded on a piece of silicon wafer, whose dimension is 0.5 mm × 21 mm × 33 mm.
图 2 含腔气室真空封装装置 (a) 真空封装腔体简图, a1和a2为1号和2号一维位移台, a3为二维位移台; (b) 铷原子充入部分, b1为加热区域(此处内侧有放置加热片的空槽), b2为尼龙隔热层, b3为玻璃罩放置平台, b4为自制碱金属原子源, b5为碱金属原子源尾管, 之后用被撞击碎开; (c) 阳极键合封装部分, c1为用于撞击b5的刀片, c2为陶瓷绝缘层, c3为含加热片的陶瓷层, c4为导热铜块, c5为与b3相同
Figure 2. Setup for vacuum-sealing the vapor cell with a multipass cavity: (a) Schematic diagram of the main vacuum chamber, a1 and a2 are No. 1 and No. 2 one-dimensional displacement stages, a3 is two-dimensional displacement stage; (b) atom filling part, b1 is the place to put a heater, b2 is nylon insulation layer, b3 is the platform for the glass container, b4 is the home-made atom source, b5 is the bottom part of the atom source, which is to be broken later in the process; (c) anodic bonding and packaging part, c1 is blade, c2 is ceramic insulation layer, c3 is ceramic insulation layer with a heater, c4 is copper, c5 is the same as b3.
图 3 利用含400 Torr N2和自然丰度Rb原子气室得到的在Rb D1线跃迁线附近的吸收光谱, 空心点为实验数据, 实线为(2)式的拟合结果, 内嵌图为气室的照片
Figure 3. The light absorption spectrum of Rb atoms near D1 line using an atomic vapor cell filled with 400 Torr N2 and Rb atoms of natural abundance, the dots are the experimental data, and the line is the fitting result, the inset is the picture of the cell.
图 4 碱金属原子磁光双共振磁力仪实验装置图, 其中探测光通过单模保偏光纤耦合到磁屏蔽内层的磁力仪探头上
Figure 4. A schematic plot of the double-resonance magnetometer setup, and the probe beam is fiber coupled to the sensor head inside the magnetic shields.
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