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在分子束外延(MBE)设备中,利用直接沉积C原子的方法在覆盖有SiO2的Si衬底(SiO2/Si)上生长石墨烯,并通过Raman光谱和近边X射线吸收精细结构谱等实验技术对不同衬底温度(500℃,600℃,700℃,900℃,1100℃,1200℃)生长的薄膜进行结构表征.实验结果表明,在衬底温度较低时生长的薄膜是无定形碳,在衬底温度高于700℃时薄膜具有石墨烯的特征,而且石墨烯的结晶质量随着衬底温度的升高而改善,但过高的衬底温度会使石墨烯质量降低.衬底温度为1100℃时结晶质量最好.衬底温度较低时C原子活性较低,难以形成有序的C-sp2六方环.而衬底温度过高时(1200℃),衬底表面部分SiO2分解,C原子与表面的Si原子或者O原子结合而阻止石墨烯的形成,并产生表面缺陷导致石墨烯结晶变差.
[1] Novoselov K S, Geim A K, Firsov A A 2004 Science 306 666
[2] Xu X G, Zhang C , Xu G J, Cao J C 2011 Chin. Phys. B 20 027201
[3] Service R F 2009 Science 324 875
[4] Morzov S V, Novoselov K S, Katsnelson M I, Schedin F, Elias DC, Jaszczak J A, Geim A K 2008 Phys. Rev. Lett. 100 016602
[5] Balandin A A, Ghosh S, BaoWZ, Calizo I, Teweldebrhan D, MiaoF, Lau C N 2008 Nano Lett. 8 902
[6] Kang C Y, Tang J, Li L M, Pan H B, Yan W S, Xu P S, Wei S Q, Chen X F, Xu X G 2011 Acta Phys. Sin. 60 047302 (in Chinese)康朝阳, 唐军, 李利民, 潘海斌, 闫文盛, 徐彭寿, 韦世强, 陈秀芳, 徐现刚 2011 物理学报 60 047302]
[7] Berger C, Song Z, Li T, Li X, Ogbazghi A Y, Feng R, Dai Z, Marchenkov A N, Conrad E H, First P N, de HeerW2004 J. Phys.Chemi. B 108 19912
[8] Tang C, Ji L, Meng L J, Sun L Z, Zhang K W, Zhong J X 2009Acta Phys. Sin. 58 7816 (in Chinese) [唐超, 吉璐, 孟利军, 孙立忠, 张凯旺, 钟建新 2009 物理学报 58 7816]
[9] Stankovich S, Dikin D A, Dommett G H B, Kohlhaas K M, ZimneyE J, Stach E A, Piner R D, Nguyen S T, Ruoff R S 2006 Nature442 282
[10] Di C A, Wei D C, Yu G, Liu Y Q, Guo Y L, Zhu D B 2008 Adv.Mater. 20 3289
[11] Wu J S, Pisula W, Mullen K 2007 Chem. Rev. 107 718
[12] Hackley J, Ali D, DiPasquale J, Demaree J D, Richardson C J K2009 Appl. Phys. Lett. 95 133114
[13] Ouerghi A, Kahouli A, Lucot D, Portail M, Travers L, Gierak J, Penuelas, Jegou P, Shukla A, Chassagne T, ZielinskiM2010 Appl.Phys. Lett. 96 191910
[14] Suemitsu M, Fukidome H 2010 J. Phys. D: Appl. Phys. 43 374012
[15] Park J, Mitchel W C, Grazulis L, Smith H E, Eyink K G, BoecklJ J, Tomich D H, Pacley S D, Hoelscher J E 2010 Adv. Mater. 224140
[16] Tang J, Kang C Y, Li L M, Yan W S, Wei S Q, Xu P S 2011Physica E 43 1415
[17] Ni Z H, Chen W, Fan X F, Kuo J L, Yu T, Wee A T S, Shen Z X2008 Phys. Rev. B 77 115416
[18] Röhrl J, Hundhausen M, Emtsev K V, Seyller T, Graupner R, LeyL 2008 Appl. Phys. Lett. 92 01918
[19] Thomsen C, Reich S 2000 Phys. Rev. Lett. 85 5214
[20] Chen D W 2010 Acta Phys. Sin. 59 6399 (in Chinese) [陈东猛 2010 物理学报 59 6399]
[21] Pimenta M A, Dresselhaus G, Dresselhaus M S, Cancado L G, Jorioa A, Saito R 2007 Phys. Chem. Chem. Phys. 9 1276
[22] Ferralis N, Maboudian R, Carraro C 2008 Phys. Rev. Lett. 101156801
[23] Canc?ado L G, Takai K, Enoki T, Endo M, Kim Y A, Mizusaki H, Jorio A, Coelho L N, Magalh?aes-Paniago R, Pimenta M A 2006Appl. Phys. Lett. 88 163106
[24] Ferrari A C, Meyer J C, Scardaci V, Casiraghi C, Lazzeri M, MauriF, Piscanec S, Jiang D, Novoselov K S, Roth S, Geim A K 2006Phys. Phys. Rev. Lett. 97 187401
[25] Ferrari A C, Robertson J, Tan P H, Li F, Cheng H M translated2007 Raman Spectroscopy in Carbons: from Nanotubes to Diamondpp4–23 (in Chinese) [德里亚·卡罗·费拉里, 约翰·罗伯逊编, 谭平恒, 李峰, 成会明 译 2007 碳材料的拉曼光谱——-从纳米管到金刚石 (北京: 化学工业出版社), 第4——23页]
[26] Gupta A, Chen G, Joshi P, Tadigadapa S, Eklund P C 2006 NanoLett. 6 2667
[27] Malarda L M, Pimentaa M A, Dresselhaus G, Dresselhaus M S2009 Phys. Rep. 473 51
[28] Faugeras C, Nerrire A, Potemski M, Mahmood A, Dujardin E, Berger C, de Heer W A 2008 Appl. Phys. Lett. 92 011914
[29] Tang J, Liu Z L, Ren P, Yao T, Yan W S, Xu P S , Wei S Q 2010Acta Phys. Sin. 59 372 (in Chinese) [唐军, 刘忠良, 任鹏, 姚涛, 闫文盛, 徐彭寿, 韦世强 2010 物理学报 59 372]
[30] Batson P E 1993 Phys. Rev. B 48 2608
[31] Fischer D A, Wentzcovitch R M, Carr R G, Continenza A, FreemanA J 1991 Phys. Rev. B 44 1427
[32] Abbas M, Wu Z Y, Zhong J, Ibrahim K, Fiori A, Orlanducci S, Sessa V, TerranovaML, Ivan D 2005 Appl. Phys. Lett. 87 051923
[33] Jeong H K, Colakerol L, Jin M H, Glans P A, Smith K E, Lee YH 2008 Chem. Phys. Lett. 460 499
[34] Emtsev K V, Speck F, Seyller Th, Ley L 2008 Phys. Rev. B 77155303
[35] Konya Z, Vesselenyi I, Kiss J, Farkas A, Oszko A 2004 Appl.Catalysis A: Grneral 260 55037302-6
-
[1] Novoselov K S, Geim A K, Firsov A A 2004 Science 306 666
[2] Xu X G, Zhang C , Xu G J, Cao J C 2011 Chin. Phys. B 20 027201
[3] Service R F 2009 Science 324 875
[4] Morzov S V, Novoselov K S, Katsnelson M I, Schedin F, Elias DC, Jaszczak J A, Geim A K 2008 Phys. Rev. Lett. 100 016602
[5] Balandin A A, Ghosh S, BaoWZ, Calizo I, Teweldebrhan D, MiaoF, Lau C N 2008 Nano Lett. 8 902
[6] Kang C Y, Tang J, Li L M, Pan H B, Yan W S, Xu P S, Wei S Q, Chen X F, Xu X G 2011 Acta Phys. Sin. 60 047302 (in Chinese)康朝阳, 唐军, 李利民, 潘海斌, 闫文盛, 徐彭寿, 韦世强, 陈秀芳, 徐现刚 2011 物理学报 60 047302]
[7] Berger C, Song Z, Li T, Li X, Ogbazghi A Y, Feng R, Dai Z, Marchenkov A N, Conrad E H, First P N, de HeerW2004 J. Phys.Chemi. B 108 19912
[8] Tang C, Ji L, Meng L J, Sun L Z, Zhang K W, Zhong J X 2009Acta Phys. Sin. 58 7816 (in Chinese) [唐超, 吉璐, 孟利军, 孙立忠, 张凯旺, 钟建新 2009 物理学报 58 7816]
[9] Stankovich S, Dikin D A, Dommett G H B, Kohlhaas K M, ZimneyE J, Stach E A, Piner R D, Nguyen S T, Ruoff R S 2006 Nature442 282
[10] Di C A, Wei D C, Yu G, Liu Y Q, Guo Y L, Zhu D B 2008 Adv.Mater. 20 3289
[11] Wu J S, Pisula W, Mullen K 2007 Chem. Rev. 107 718
[12] Hackley J, Ali D, DiPasquale J, Demaree J D, Richardson C J K2009 Appl. Phys. Lett. 95 133114
[13] Ouerghi A, Kahouli A, Lucot D, Portail M, Travers L, Gierak J, Penuelas, Jegou P, Shukla A, Chassagne T, ZielinskiM2010 Appl.Phys. Lett. 96 191910
[14] Suemitsu M, Fukidome H 2010 J. Phys. D: Appl. Phys. 43 374012
[15] Park J, Mitchel W C, Grazulis L, Smith H E, Eyink K G, BoecklJ J, Tomich D H, Pacley S D, Hoelscher J E 2010 Adv. Mater. 224140
[16] Tang J, Kang C Y, Li L M, Yan W S, Wei S Q, Xu P S 2011Physica E 43 1415
[17] Ni Z H, Chen W, Fan X F, Kuo J L, Yu T, Wee A T S, Shen Z X2008 Phys. Rev. B 77 115416
[18] Röhrl J, Hundhausen M, Emtsev K V, Seyller T, Graupner R, LeyL 2008 Appl. Phys. Lett. 92 01918
[19] Thomsen C, Reich S 2000 Phys. Rev. Lett. 85 5214
[20] Chen D W 2010 Acta Phys. Sin. 59 6399 (in Chinese) [陈东猛 2010 物理学报 59 6399]
[21] Pimenta M A, Dresselhaus G, Dresselhaus M S, Cancado L G, Jorioa A, Saito R 2007 Phys. Chem. Chem. Phys. 9 1276
[22] Ferralis N, Maboudian R, Carraro C 2008 Phys. Rev. Lett. 101156801
[23] Canc?ado L G, Takai K, Enoki T, Endo M, Kim Y A, Mizusaki H, Jorio A, Coelho L N, Magalh?aes-Paniago R, Pimenta M A 2006Appl. Phys. Lett. 88 163106
[24] Ferrari A C, Meyer J C, Scardaci V, Casiraghi C, Lazzeri M, MauriF, Piscanec S, Jiang D, Novoselov K S, Roth S, Geim A K 2006Phys. Phys. Rev. Lett. 97 187401
[25] Ferrari A C, Robertson J, Tan P H, Li F, Cheng H M translated2007 Raman Spectroscopy in Carbons: from Nanotubes to Diamondpp4–23 (in Chinese) [德里亚·卡罗·费拉里, 约翰·罗伯逊编, 谭平恒, 李峰, 成会明 译 2007 碳材料的拉曼光谱——-从纳米管到金刚石 (北京: 化学工业出版社), 第4——23页]
[26] Gupta A, Chen G, Joshi P, Tadigadapa S, Eklund P C 2006 NanoLett. 6 2667
[27] Malarda L M, Pimentaa M A, Dresselhaus G, Dresselhaus M S2009 Phys. Rep. 473 51
[28] Faugeras C, Nerrire A, Potemski M, Mahmood A, Dujardin E, Berger C, de Heer W A 2008 Appl. Phys. Lett. 92 011914
[29] Tang J, Liu Z L, Ren P, Yao T, Yan W S, Xu P S , Wei S Q 2010Acta Phys. Sin. 59 372 (in Chinese) [唐军, 刘忠良, 任鹏, 姚涛, 闫文盛, 徐彭寿, 韦世强 2010 物理学报 59 372]
[30] Batson P E 1993 Phys. Rev. B 48 2608
[31] Fischer D A, Wentzcovitch R M, Carr R G, Continenza A, FreemanA J 1991 Phys. Rev. B 44 1427
[32] Abbas M, Wu Z Y, Zhong J, Ibrahim K, Fiori A, Orlanducci S, Sessa V, TerranovaML, Ivan D 2005 Appl. Phys. Lett. 87 051923
[33] Jeong H K, Colakerol L, Jin M H, Glans P A, Smith K E, Lee YH 2008 Chem. Phys. Lett. 460 499
[34] Emtsev K V, Speck F, Seyller Th, Ley L 2008 Phys. Rev. B 77155303
[35] Konya Z, Vesselenyi I, Kiss J, Farkas A, Oszko A 2004 Appl.Catalysis A: Grneral 260 55037302-6
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