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中国物理学会期刊
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Zhang Xiao-Dan, Zhao Ying, Gao Yan-Tao, Zhu Feng, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen. Fabrication of microcrystalline silicon thin film and the study of its microstructure and stability. Acta Physica Sinica, 2005, 54(8): 3910-3914. DOI: 10.7498/aps.54.3910
Citation: Zhang Xiao-Dan, Zhao Ying, Gao Yan-Tao, Zhu Feng, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen. Fabrication of microcrystalline silicon thin film and the study of its microstructure and stability. Acta Physica Sinica, 2005, 54(8): 3910-3914. DOI: 10.7498/aps.54.3910
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Fabrication of microcrystalline silicon thin film and the study of its microstructure and stability

Acta Phys. Sin., 2005, 54(8): 3910-3914.
DOI: 10.7498/aps.54.3910
CSTR: 32037.14.aps.54.3910
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