搜索

x
中国物理学会期刊

镓铝双质掺杂提高晶闸管性能的机理研究

CSTR: 32037.14.aps.59.1964

Studies on the mechanisms of enhancing the performances of thyristors by Ga-Al doping

CSTR: 32037.14.aps.59.1964
PDF
导出引用
  • 依据Ga,A1在Si和SiO2中的扩散行为和特性,采用SiO2/Si系统,利用磁控装置精确控制Ga掺杂量,实现镓铝双质掺杂在同一扩散炉中经一次高温连续完成.该项掺杂技术能实现Si中的高均匀掺杂,扩散参数具有良好的重复性和一致性,可获得较理想的杂质浓度分布.Ga,Al与Si的共价半径相接近,高温后又采取缓慢降温等措施,能明显减少晶格缺陷,提高少子寿命,降低压降.研究了受主双质掺杂与晶闸管参数之间的关系,并对镓铝双质掺杂提高晶闸管性能的机理进行了深入的分析与讨论.研

     

    In accordance with the character of diffusing Ga and Al in SiO2/Si system and in the use of magnetic-control device for controlling accurately the doping quantity of Ga, the double-impurity doping of both Ga and Al is completed consecutively in the same high-temperature diffusion furnace. It is shown that the doping is with good uniformity,repeatability and continuity.A uniform distribution of impurity concentration can be achieved.Since the covalent radiuses of the atoms,Ga and Al,are close to that of Si,and the temperature is slowly dropped after the high temperature, the defects of the lattice is obviously reduced.The lifetime of minority carrier is significantly increases and the voltage drop is reduced.In this paper, the mechanism of enhancing the performances of thyristors by Ga-A1 doping is investigated.Our result shows that the double-impurity doping technique is conducive to raising the level of breakdown voltage and surge capacity,and improving the characteristics of current,triggering and dynamics significantly.The double-impurity doping technique is better than other known techniques of doping.

     

    目录

    /

    返回文章
    返回